Abstract: The patterns of Reflection high energy electron diffraction （RHEED） from the epitaxial growth of Si-Ge crystal are interpreted basing on the kinetical diffraction theory of crystal. The transmission pattern is studied and interpreted, which relates to the rough surface after crystal growth. The RHEED patterns of polycrystalline rings and twin crystal and their evolvements are analyzed with respec to the epitaxial growth conditions.

Keywords: 
• Si-Ge epitaxial growth /
• RHEED /
• surface reconstruction /
• transmission pattern