氘在碳钨共沉积层中的滞留行为研究

张文钊; 唐兴华; 李嘉庆; 施立群

doi:10.7498/aps.62.195202

摘要

运用射频磁控溅射方法, 在氘氩混合气氛中制备了含氘碳钨共沉积薄膜. 利用离子束分析方法[卢瑟福背散射(RBS)和弹性反冲(ERD)]对薄膜样品的厚度、成分、氘含量等进行了分析; 利用拉曼光谱和扫描电子显微镜(SEM), 分别分析了薄膜的结构和表面形态. 离子束分析发现, 氘原子更易被碳原子俘获位俘获, 并且氘含量会随着沉积温度的升高而降低; 其他镀膜条件固定的情况下, 不同混合气体压强下薄膜样品中的氘浓度在5.0 Pa处有一个峰值; 拉曼光谱分析显示, 沉积温度从室温升高到725 K时, 碳钨共沉积层中的类石墨化成分增加, 同时, 非晶化的程度也加剧; 扫描电子显微镜图像表明, 随着温度的升高薄膜表面被腐蚀的痕迹消失, 但是由于应力的改变表面出现了多处的凸起.

关键词:

Abstract

The C-W co-deposition layer prepared by radio frequency magnetron sputtering was investigated to identify the characteristic of the C-W mixed layers in fusion experimental reactors. Layers were characterized by ion beam analysis (IBA), Raman spectra (RS) and scanning electron microscopy (SEM). It was found that D atoms in C-W layers are mainly trapped by the trapping site of C atoms, only a few of them are arrested by W atoms or defects. D concentration in the C-W layers deposited at 5.0Pa with a fixed flow rate ratio QD2/QAr=2.5 was lower than 10% and decreased slightly with increasing temperature. D concentration increased with the gas pressure from zero to 5 Pa and then decreased from 5 Pa to 10 Pa. RS revealed that the crystal structure of the C-W layers became graphite-like with increasing temperature. SEM images showed that the caves disappeared and convex bodies were dotted on the surfaces as the temperature increased.

Keywords:

作者及机构信息

1.
复旦大学现代物理研究所应用离子束物理教育部重点实验室, 上海 200433;

2.
复旦大学核科学与技术系, 上海 200433

基金项目: 国家自然科学基金(批准号:10975035)和国家磁约束聚变科学计划(批准号:2010GB104002)资助的课题.

Authors and contacts

1.
Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China;

2.
Department of Nuclear Science and Technology, Fudan University, Shanghai 200433, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 10975035), and the National "magnetic-confinement fusion" Program of China (Grant No. 2010GB104002).

参考文献

[1]	Federici G, Skinner C H, Brooks J N, Coad J P, Grisolia C, Haasz A A, Hassanein A, Philipps V, Pitcher C S, Roth J, Wampler W R, Whyte D G 2001 Nucl. Fusion 41 1967
[2]	Loarte A, Becoulet M, Saibene1 G, Sartori1 R, Campbell D J, Eich T, Herrmann A, Laux M, Suttrop W, Alper B, Lomas P J, Matthews G, Jachmich S, Ongena J, Innocente P 2002 Plasma Phys. Control. Fusion 44 1815
[3]	Sugiyama K, Krieger K, Lungn C P, Roth J 2009 J. Nucl. Mater. 390-391 659
[4]	Andrew P, Coad J P, Ehrenberg J, Goodall D H J, Horton L D, Jarvis O N, Lomas P J, Loughlin M J, Mccracken G M, Peacock A T, Pick M A, Saibene G, Sartori R, Thomas P R 1993 Nucl. Fusion 33 1389
[5]	Skinner C H, Blanchard W, Brooks J N 1998 20th Symp. on Fusion Technology Marseille, Sept. 1-11, 1998 p153
[6]	Mueller D, Blanchard W, Collins J, Hosea J, Kamperschroer J, LaMarche P H, Nagy A, Owens D K, Skinner C H 1997 J. Nucl. Mater. 241-243 897
[7]	Andrew P, Brennan D, Coad J P, Ehrenberg J, Gadeberg M, Gibson A, Hillis D L, How J, Jarvis O N, Jensen H, Lasser R, Marcus F, Monk R, Morgan P, Orchard J, Peacock A, Pearce R, Pick M, Rossi A, Schild P, Schunke B, Stork D 1999 Fusion Eng. Des. 47 233
[8]	Causey R A, Brooks J N, Federici G 2002 Fusion Eng. Des. 61-62 525
[9]	Jacob W, Moller W 1993 Appl. Phys. Lett. 63 1771
[10]	Causey R A, Venhaus T J 2001 Phys. Scr. 94 9
[11]	Schiettekatte F, Ross G G 1996 AIP Conf. Proc. Denton, Texas, USA, Nov. 6-9, 1996 p711
[12]	Mayer M 1998 AIP Conf. Proc. Denton, Texas, USA, Nov. 4-7, 1998 p541
[13]	Ziegler J F, Briersack J P, Ziegler M D 2012 SRIM-The Stopping and Range of Ions in Matter (SRIM company) p127
[14]	Frodelius J, Eklund P, Beckers M, Persson P O A, Hogberg H, Hultman L 2010 Thin Solid Films 518 1621
[15]	Niwase K, Tanabe T 1993 Mater. T. JIM 34 1111
[16]	Ferrai A C, Robertson J 1999 Phys. Rev. B 61 14095

施引文献

[1]	Federici G, Skinner C H, Brooks J N, Coad J P, Grisolia C, Haasz A A, Hassanein A, Philipps V, Pitcher C S, Roth J, Wampler W R, Whyte D G 2001 Nucl. Fusion 41 1967
[2]	Loarte A, Becoulet M, Saibene1 G, Sartori1 R, Campbell D J, Eich T, Herrmann A, Laux M, Suttrop W, Alper B, Lomas P J, Matthews G, Jachmich S, Ongena J, Innocente P 2002 Plasma Phys. Control. Fusion 44 1815
[3]	Sugiyama K, Krieger K, Lungn C P, Roth J 2009 J. Nucl. Mater. 390-391 659
[4]	Andrew P, Coad J P, Ehrenberg J, Goodall D H J, Horton L D, Jarvis O N, Lomas P J, Loughlin M J, Mccracken G M, Peacock A T, Pick M A, Saibene G, Sartori R, Thomas P R 1993 Nucl. Fusion 33 1389
[5]	Skinner C H, Blanchard W, Brooks J N 1998 20th Symp. on Fusion Technology Marseille, Sept. 1-11, 1998 p153
[6]	Mueller D, Blanchard W, Collins J, Hosea J, Kamperschroer J, LaMarche P H, Nagy A, Owens D K, Skinner C H 1997 J. Nucl. Mater. 241-243 897
[7]	Andrew P, Brennan D, Coad J P, Ehrenberg J, Gadeberg M, Gibson A, Hillis D L, How J, Jarvis O N, Jensen H, Lasser R, Marcus F, Monk R, Morgan P, Orchard J, Peacock A, Pearce R, Pick M, Rossi A, Schild P, Schunke B, Stork D 1999 Fusion Eng. Des. 47 233
[8]	Causey R A, Brooks J N, Federici G 2002 Fusion Eng. Des. 61-62 525
[9]	Jacob W, Moller W 1993 Appl. Phys. Lett. 63 1771
[10]	Causey R A, Venhaus T J 2001 Phys. Scr. 94 9
[11]	Schiettekatte F, Ross G G 1996 AIP Conf. Proc. Denton, Texas, USA, Nov. 6-9, 1996 p711
[12]	Mayer M 1998 AIP Conf. Proc. Denton, Texas, USA, Nov. 4-7, 1998 p541
[13]	Ziegler J F, Briersack J P, Ziegler M D 2012 SRIM-The Stopping and Range of Ions in Matter (SRIM company) p127
[14]	Frodelius J, Eklund P, Beckers M, Persson P O A, Hogberg H, Hultman L 2010 Thin Solid Films 518 1621
[15]	Niwase K, Tanabe T 1993 Mater. T. JIM 34 1111
[16]	Ferrai A C, Robertson J 1999 Phys. Rev. B 61 14095

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