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PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERING

YANG ZHI-WEI HAN SHENG-HAO YANG TIAN-LIN ZHAO JUN-QING MA JIN MA HONG-LEI CHENG CHUAN-FU

Citation:

PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERING

YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU
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  • Abstract views:  7920
  • PDF Downloads:  996
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Publishing process
  • Received Date:  15 September 1999
  • Accepted Date:  15 October 1999
  • Published Online:  05 March 2000

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