[1] |
Zheng Shi-Jian, Ding Fang, Xie Xin-Hua, Tang Zhong-Liang, Zhang Yi-Chuan, Li Huan, Yang Kuan, Zhu Xiao-Dong. A diagnosis of gas-phase processes in a high pressure DC CH4/H2 plasma. Acta Physica Sinica,
2013, 62(16): 165204.
doi: 10.7498/aps.62.165204
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[2] |
Fang Jia, Li Shuang-Liang, Xu Sheng-Zhi, Wei Chang-Chun, Zhao Ying, Zhang Xiao-Dan. Analysis on steady plasma process of high-rate microcrystalline silicon by optical emission spectroscopy. Acta Physica Sinica,
2013, 62(16): 168103.
doi: 10.7498/aps.62.168103
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[3] |
Xue Yuan, Gao Chao-Jun, Gu Jin-Hua, Feng Ya-Yang, Yang Shi-E, Lu Jing-Xiao, Huang Qiang, Feng Zhi-Qiang. Study on the properties and optical emission spectroscopy of the intrinsic silicon thin film in silicon heterojunction solar cells. Acta Physica Sinica,
2013, 62(19): 197301.
doi: 10.7498/aps.62.197301
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[4] |
Hou Guo-Fu, Lu Peng, Han Xiao-Yan, Li Gui-Jun, Wei Chang-Chun, Geng Xin-Hua, Zhao Ying. Improving the light-soaking stability of a-Si: H/μc-Si: H tandem solar cells. Acta Physica Sinica,
2012, 61(13): 138401.
doi: 10.7498/aps.61.138401
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[5] |
Li Yan-Yang, Yang Shi-E, Chen Yong-Sheng, Zhou Jian-Peng, Li Xin-Li, Lu Jing-Xiao. The study of capacitively-coupled hydrogen plasma at very high frequency. Acta Physica Sinica,
2012, 61(16): 165203.
doi: 10.7498/aps.61.165203
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[6] |
Hou Guo-Fu, Xue Jun-Ming, Yuan Yu-Jie, Zhang Xiao-Dan, Sun Jian, Chen Xin-Liang, Geng Xin-Hua, Zhao Ying. Key issues for high-efficiency silicon thin film solar cells prepared by RF-PECVD under high-pressure-depletion conditions. Acta Physica Sinica,
2012, 61(5): 058403.
doi: 10.7498/aps.61.058403
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[7] |
Zheng Xin-Xia, Zhang Xiao-Dan, Yang Su-Su, Wang Guang-Hong, Xu Sheng-Zhi, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. a-Si ∶H/a-Si ∶H/μc-Si ∶H triple junction solar cells. Acta Physica Sinica,
2011, 60(6): 068801.
doi: 10.7498/aps.60.068801
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[8] |
Li Tian-Wei, Liu Feng-Zhen, Zhu Mei-Fang. rf excited optical emission spectrum of radicals generated during hot wire chemical vapour deposition for the preparation of microcrystalline silicon thin film. Acta Physica Sinica,
2011, 60(1): 018103.
doi: 10.7498/aps.60.018103
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[9] |
Lu Peng, Hou Guo-Fu, Yuan Yu-Jie, Yang Rui-Xia, Zhao Ying. Influence of n-type layer structure on performance and light-induced degradation of n-i-p microcrystalline silicon solar cells. Acta Physica Sinica,
2010, 59(6): 4330-4336.
doi: 10.7498/aps.59.4330
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[10] |
Han Xiao-Yan, Geng Xin-Hua, Hou Guo-Fu, Zhang Xiao-Dan, Li Gui-Jun, Yuan Yu-Jie, Wei Chang-Chun, Sun Jian, Zhang De-Kun, Zhao Ying. An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films. Acta Physica Sinica,
2009, 58(2): 1344-1347.
doi: 10.7498/aps.58.1344
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[11] |
Peng Wen-Bo, Liu Shi-Yong, Xiao Hai-Bo, Zhang Chang-Sha, Shi Ming-Ji, Zeng Xiang-Bo, Xu Yan-Yue, Kong Guang-Lin, Yu Yu-De. Gap states and microstructure of microcrystalline silicon thin films. Acta Physica Sinica,
2009, 58(8): 5716-5720.
doi: 10.7498/aps.58.5716
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[12] |
Sun Fu-He, Zhang Xiao-Dan, Wang Guang-Hong, Xu Sheng-Zhi, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. Influence of boron on the properties of intrinsic microcrystalline silicon thin films. Acta Physica Sinica,
2009, 58(2): 1293-1297.
doi: 10.7498/aps.58.1293
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[13] |
Zhang Yong, Liu Yan, Lü Bin, Tang Nai-Yun, Wang Ji-Qing, Zhang Hong-Ying. Influence of barrier height of the front contact on the amorphous silicon and microcrystalline silicon heterojunction solar cells. Acta Physica Sinica,
2009, 58(4): 2829-2835.
doi: 10.7498/aps.58.2829
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[14] |
Zhang Fa-Rong, Zhang Xiao-Dan, Amanatides E., Mataras D., Zhao Jing, Zhao Ying. Study on the optical and electrical properties of plasma for the deposition of microcrystalline silicon. Acta Physica Sinica,
2008, 57(5): 3022-3026.
doi: 10.7498/aps.57.3022
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[15] |
Guo Qun-Chao, Geng Xin-Hua, Sun Jian Wei, Chang-Chun, Han Xiao-Yan, Zhang Xiao_Dan, Zhao Ying. Role of gas residence time in the deposition rate and properties of microcrystalline silicon films. Acta Physica Sinica,
2007, 56(5): 2790-2795.
doi: 10.7498/aps.56.2790
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[16] |
Yu Yun-Peng, Lin Xuan-Ying, Lin Shun-Hui, Huang Rui. Influence of light exposure and applied bias on the conductivity of microcrystalline silicon films at room temperature. Acta Physica Sinica,
2006, 55(4): 2038-2043.
doi: 10.7498/aps.55.2038
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[17] |
Gao Xiao-Yong, Li Rui, Chen Yong-Sheng, Lu Jing-Xiao, Liu Ping, Feng Tuan-Hui, Wang Hong-Juan, Yang Shi-E. Study of the structural and optical properties of microcrystalline silicon film. Acta Physica Sinica,
2006, 55(1): 98-101.
doi: 10.7498/aps.55.98
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[18] |
Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Wei Chang-Chun, Mai Yao-Hua, Gao Yan-Tao, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen. Secondary ion mass spectroscopic depth profile analysis of oxygen contamination in hydrogenated microcrystalline silicon. Acta Physica Sinica,
2005, 54(4): 1895-1898.
doi: 10.7498/aps.54.1895
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[19] |
Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Wei Chang-Chun, Wu Chun-Ya, Gao Yan-Tao, Hou Guo-Fu, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen. A study of Raman and optical emission spectroscopy on microcrystalline silicon films deposited by VHF-PECVD. Acta Physica Sinica,
2005, 54(1): 445-449.
doi: 10.7498/aps.54.445
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[20] |
Yang Hui-Dong, Wu Chun-Ya, Li Hong-Bo, Mai Yao-Hua, Zhu Feng, Zhou Zhen-Hua, Zhao Ying, Geng Xin-Hua, Xiong Shao-Zheng. Diagnosis of VHF plasmas with optical emission spectroscopy. Acta Physica Sinica,
2003, 52(9): 2324-2330.
doi: 10.7498/aps.52.2324
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