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Research on silane depletion status during the deposition of silicon thin films by high-pressure PECVD

Hou Guo-Fu Xue Jun-Ming Sun Jian Guo Qun-Chao Zhang De-Kun Ren Hui-Zhi Zhao Ying Geng Xin-Hua Li Yi-Gang

Citation:

Research on silane depletion status during the deposition of silicon thin films by high-pressure PECVD

Hou Guo-Fu, Xue Jun-Ming, Sun Jian, Guo Qun-Chao, Zhang De-Kun, Ren Hui-Zhi, Zhao Ying, Geng Xin-Hua, Li Yi-Gang
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  • Abstract views:  9836
  • PDF Downloads:  1480
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Publishing process
  • Received Date:  23 January 2006
  • Accepted Date:  05 July 2006
  • Published Online:  05 January 2007

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