-
The determination of the optical constants of absorbing films, particularly on opaque substrates, is a difficult problem when solely using spectroscopic ellipsometry. First, unwanted backside reflections are incoherent with the desired reflection from the front side, which makes the fitting of optical constants difficult. Second, the optical constants of substrate must be carefully characterized in advance, as any small absorption in the substrate would be mixed into the film’s overall optical constants. Third, thickness and optical constants are strongly correlated with each other, which may prevent a unique solution for absorbing films. For the above reasons, quartz, glass slide, cover glass and float glass substrates are studied. Backside reflections of the substrates are suppressed by index matching technique. The results show that the simple technique works well for substrate materials with refractive index in a range from 1.43 to 1.64, including materials such as fused silica, float glass, etc. in a spectral range from 190 nm to 1700 nm. The refractive index and extinction coefficient of the substrate are fitted by ellipsometricψdata and the normal spectral transmittance T0. The results are consistent with the literature reported. Finally, a Combined ellipsometry and transmission approach is used to determine the thickness values and optical constants of the diamond-like carbon (DLC) film coated on the quartz and the amorphous silicon (a-Si) film coated on the glass slide and cover glass accurately.
[1] Swanepoel R 1983 J. Phys. E:Sci. Instrum. 16 1214
[2] Swanepoel R 1984 J. Phys. E:Sci. Instrum. 17 896
[3] Hilfiker J N, Singh N, Tiwald T, Convey D, Smith S M, Baker J H, Tompkins H G 2008 Thin Solid Films 516 7979
[4] McGahan W A, Johs B, Woollam J A 1993 Thin Solid Films 234 443
[5] Jellison Jr G E, Merkulov V I, Puretzky A A, Geohegan D B, Eres G, Lowndes D H, Caughman J B 2000 Thin Solid Films 377 68
[6] Jellison Jr G E, Modine F A 1996 Appl. Phys. Lett. 69 371
[7] He J, Li W, Xu R, Guo A R, Qi Q C, Jiang Y D 2008 Acta. Phys. Sin. 57 7114 (in Chinese) [何剑, 李伟, 徐睿, 郭安然, 祁康成, 蒋亚东 2008 物理学报 57 7114]
[8] Ma J M, Liang Y, Gao X Y, Chen C, Zhao M K, Lu J X 2012 Acta. Phys. Sin. 61 056106 (in Chinese) [马姣民, 梁艳, 郜小勇, 陈超, 赵孟珂, 卢景霄 2012 物理学报 61 056106]
[9] Franta D, Ohlídal I, Buršíková V, Zajíčková L 2004 Thin Solid Films 455 393
[10] Tompkins H G, Tasic S 2000 J. Vac. Sci. Technol. A 18 946
[11] Zhou Y, Wu G S, Dai W, Li H B, Wang A Y 2010 Acta Phys. Sin. 59 2356 (in Chinese) [周毅, 吴国松, 代伟, 李洪波, 汪爱英 2010 物理学报 59 2356]
[12] Synowicki R A, Johs B D, Martin A C 2011 Thin Solid Films 519 2907
[13] Fujiwara H 2007 Spectroscopic ellipsometry:principles and applications (Chichester:John Wiley & Sons) p138
[14] Forcht K, Gombert A, Joerger R, Köhl M 1997 Thin Solid Films 302 43
[15] Hayton D J, Jenkins T E 2004 Meas. Sci. Technol. 15 N17
[16] Synowicki R A 2008 Phys. Status Solidi C 5 1085
[17] Kitamura R, Pilon L, Jonasz M 2007 Appl. Optics 46 8118
[18] Bruggeman D A G 1935 Ann. Phys.-Berlin 24 636
[19] Fujiwara H, Koh J, Rovira P I, Collins R W 2000 Phys. Rev. B 61 10832
[20] Colombin L, Jelli A, Riga J, Pireaux J J, Verbist J 1977 J. Non-Cryst. Solids 24 253
[21] Dugnoille B, Virlet O 1994 Appl. Optics 33 5853
[22] Zhao J M, Yang P 2012 Microsystem Technologies 18 1455
-
[1] Swanepoel R 1983 J. Phys. E:Sci. Instrum. 16 1214
[2] Swanepoel R 1984 J. Phys. E:Sci. Instrum. 17 896
[3] Hilfiker J N, Singh N, Tiwald T, Convey D, Smith S M, Baker J H, Tompkins H G 2008 Thin Solid Films 516 7979
[4] McGahan W A, Johs B, Woollam J A 1993 Thin Solid Films 234 443
[5] Jellison Jr G E, Merkulov V I, Puretzky A A, Geohegan D B, Eres G, Lowndes D H, Caughman J B 2000 Thin Solid Films 377 68
[6] Jellison Jr G E, Modine F A 1996 Appl. Phys. Lett. 69 371
[7] He J, Li W, Xu R, Guo A R, Qi Q C, Jiang Y D 2008 Acta. Phys. Sin. 57 7114 (in Chinese) [何剑, 李伟, 徐睿, 郭安然, 祁康成, 蒋亚东 2008 物理学报 57 7114]
[8] Ma J M, Liang Y, Gao X Y, Chen C, Zhao M K, Lu J X 2012 Acta. Phys. Sin. 61 056106 (in Chinese) [马姣民, 梁艳, 郜小勇, 陈超, 赵孟珂, 卢景霄 2012 物理学报 61 056106]
[9] Franta D, Ohlídal I, Buršíková V, Zajíčková L 2004 Thin Solid Films 455 393
[10] Tompkins H G, Tasic S 2000 J. Vac. Sci. Technol. A 18 946
[11] Zhou Y, Wu G S, Dai W, Li H B, Wang A Y 2010 Acta Phys. Sin. 59 2356 (in Chinese) [周毅, 吴国松, 代伟, 李洪波, 汪爱英 2010 物理学报 59 2356]
[12] Synowicki R A, Johs B D, Martin A C 2011 Thin Solid Films 519 2907
[13] Fujiwara H 2007 Spectroscopic ellipsometry:principles and applications (Chichester:John Wiley & Sons) p138
[14] Forcht K, Gombert A, Joerger R, Köhl M 1997 Thin Solid Films 302 43
[15] Hayton D J, Jenkins T E 2004 Meas. Sci. Technol. 15 N17
[16] Synowicki R A 2008 Phys. Status Solidi C 5 1085
[17] Kitamura R, Pilon L, Jonasz M 2007 Appl. Optics 46 8118
[18] Bruggeman D A G 1935 Ann. Phys.-Berlin 24 636
[19] Fujiwara H, Koh J, Rovira P I, Collins R W 2000 Phys. Rev. B 61 10832
[20] Colombin L, Jelli A, Riga J, Pireaux J J, Verbist J 1977 J. Non-Cryst. Solids 24 253
[21] Dugnoille B, Virlet O 1994 Appl. Optics 33 5853
[22] Zhao J M, Yang P 2012 Microsystem Technologies 18 1455
-
[1] Xu Zi-Qiang, Wu Xiao-Qing, Xu Man-Man, Bi Cui-Cui, Han Yong, Shao Shi-Yong. Estimation of ${\boldsymbol{C_n^2}}$ profile of troposphere over the sea. Acta Physica Sinica, 2021, 70(24): 244204. doi: 10.7498/aps.70.20211201[2] Dong Zheng-Qiong, Zhao Hang, Zhu Jin-Long, Shi Ya-Ting. Influence of incident illumination on optical scattering measurement of typical photoresist nanostructure. Acta Physica Sinica, 2020, 69(3): 030601. doi: 10.7498/aps.69.20191525 [3] Shi Wen-Jun, Yi Ying-Yan, Li Min. Pressure dependence of refractive index of Ge near the absorption edge. Acta Physica Sinica, 2016, 65(16): 167801. doi: 10.7498/aps.65.167801 [4] Jia Yu-Peng, Wang Jing-Fu, Zheng Kun-Can, Zhang Bing, Pan Gang, Gong Zhi-Jun, Wu Wen-Fei. Measurement of single phase flow in porous media using PIV technique. Acta Physica Sinica, 2016, 65(10): 106701. doi: 10.7498/aps.65.106701 [5] Wang Pan-Pan, Zhang Yu-Zhi, Peng Ming-Dong, Zhang Yun-Long, Wu Ling-Nan, Cao Yun-Zhen, Song Li-Xin. Spectroscopic ellipsometry analysis of vanadium oxide film in Vis-NIR and NIR-MIR. Acta Physica Sinica, 2016, 65(12): 127201. doi: 10.7498/aps.65.127201 [6] Yu Tian-Yan, Qin Yang, Liu Ding-Quan. Investigation of the crystal and optical properties of ZnS thin films deposited at different temperature. Acta Physica Sinica, 2013, 62(21): 214211. doi: 10.7498/aps.62.214211 [7] Huang Zhuo-Yin, Li Guo-Long, Li Kan, Zhen Hong-Yu, Shen Wei-Dong, Liu Xiang-Dong, Liu Xu. Determination of optical constants and thickness of photoactive layer in polymer oslar cells by single transmission measurement. Acta Physica Sinica, 2012, 61(4): 048801. doi: 10.7498/aps.61.048801 [8] Dai Yu, Zhang Jian-Xun. Stereoscopic visualization based on splitting of two-way polarized image beams. Acta Physica Sinica, 2011, 60(8): 084205. doi: 10.7498/aps.60.084205 [9] Li Guo-Long, Huang Zhuo-Yin, Li Kan, Zhen Hong-Yu, Shen Wei-Dong, Liu Xu. Analysis of the effect of active layer thickness on polymer solar cell performance based on optical and opto-electronic model. Acta Physica Sinica, 2011, 60(7): 077207. doi: 10.7498/aps.60.077207 [10] Liao Guo-Jin, Luo Hong, Yan Shao-Feng, Dai Xiao-Chun, Chen Ming. Determination of the optical constants of the magnetron sputtered aluminum oxide films from the transmission spectra. Acta Physica Sinica, 2011, 60(3): 034201. doi: 10.7498/aps.60.034201 [11] Zhou Yi, Wu Guo-Song, Dai Wei, Li Hong-Bo, Wang Ai-Ying. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach. Acta Physica Sinica, 2010, 59(4): 2356-2363. doi: 10.7498/aps.59.2356 [12] Xue Chun-Rong, Yi Kui, Qi Hong-Ji, Shao Jian-Da, Fan Zheng-Xiu. Optical constants of fluoride films in the DUV range. Acta Physica Sinica, 2009, 58(7): 5035-5040. doi: 10.7498/aps.58.5035 [13] Wang Xiao-Dong, Shen Jun, Wang Sheng-Zhao, Zhang Zhi-Hua. Optical constants of sol-gel derived TiO2 films characterized by spectroscopic ellipsometry. Acta Physica Sinica, 2009, 58(11): 8027-8032. doi: 10.7498/aps.58.8027 [14] Liang Li-Ping, Hao Jian-Ying, Qin Mei, Zheng Jian-Jun. Determination of the optical constants of sol-gel derived ZrO2 films simply form the transmission spectra. Acta Physica Sinica, 2008, 57(12): 7906-7911. doi: 10.7498/aps.57.7906 [15] Zhang Shuan-Qin, Shi Yun-Long, Huang Chang-Geng, Lian Chang-Chun. Design of spectral reflective properties of the stealth coating. Acta Physica Sinica, 2007, 56(9): 5508-5512. doi: 10.7498/aps.56.5508 [16] Su Wei_Tao, Li Bin, Liu Ding_Quan, Zhang Feng_Shan. The relation between crystal structure and infrared optical properties of ErF3 film. Acta Physica Sinica, 2007, 56(5): 2541-2546. doi: 10.7498/aps.56.2541 [17] Shen Zi-Cai, Kong Wei-Jin, Liu Shi-Jie, Shen Jian, Shao Jian-Da, Fan Zheng-Xiu. Refractive index analysis of graded index coatings prepared by glancing angle deposition. Acta Physica Sinica, 2006, 55(10): 5157-5160. doi: 10.7498/aps.55.5157 [18] Sun Cheng-Wei, Liu Zhi-Wen, Qin Fu-Wen, Zhang Qing-Yu, Liu Kun, Wu Shi-Fa. Influences of growth temperature on the crystalline characteristics and optical properties for ZnO films deposited by reactive magnetron sputtering. Acta Physica Sinica, 2006, 55(3): 1390-1397. doi: 10.7498/aps.55.1390 [19] Wang Cheng-Wei, Wang Jian, Li Yan, Liu Wei-Min, Xu Tao, Sun Xiao-Wei, Li Hu-Lin. Determination of the optical constants of porous anodic aluminum oxide films. Acta Physica Sinica, 2005, 54(1): 439-444. doi: 10.7498/aps.54.439 [20] FENG HONG-AN, YU YU-ZHEN, HUANG BING-ZHONG. A STUDY ON THIN FILM WITH COMPLEX REFRACTION INDEX BY SPECTROSCOPIC ELLIPSOMETRY——OPTICAL CONSTANT DISPERION AND GROWTH RATE OF ITO. Acta Physica Sinica, 1986, 35(3): 319-328. doi: 10.7498/aps.35.319
Catalog
Metrics
- Abstract views: 6734
- PDF Downloads: 336
- Cited By: 0
下载:
