-
Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google’s announcement of the realization of “quantum supremacy”, superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.
-
Keywords:
- superconducting qubit /
- device fabrication /
- quantum computing
[1] Makhlin Y, Schon G, Shnirman A 2001 Rev. Mod. Phys. 73 357
Google Scholar
[2] Clarke J, Wilhelm F K 2008 Nature 19 459
[3] Devoret M H, Schoelkopf R J 2013 Science 339 1169
Google Scholar
[4] Krantz P, Kjaergaard M, Yan F, Orlando T P, Gustavsson S, Oliver W D 2019 Appl. Phys. Lett. 60 21318
[5] Kjaergaard M, Schwartz M E, Braumüller J, Krantz P, Wang I J, Gustavsson S, Oliver W D 2020 Annu. Rev. 11 369
[6] Mi X, Ippoliti M, Quintana C, et al. 2021 arXiv: 2107.13571 v2 [quant-ph]
[7] Makhlin Y, Schon G, Shnirman A 2007 Physics 73 357
[8] Paik H, Schuster D I, Bishop L S, Kirchmair G, Catelani G, Sears A P, Johnson B R, Reagor M J, Frunzio L, Glazman L I, Girvin S M, Devoret M H, Schoelkopf R J 2011 Phys. Rev. Lett. 107 240501
Google Scholar
[9] Nakamura Y, Pashkin Y A, Tsai J S 1999 Nature 398 786
Google Scholar
[10] Swingle B 2018 Nat. Phys. 14 988
Google Scholar
[11] Salathé Y, Mondal M, Oppliger M, Heinsoo J, Kurpiers P, Potocnik A, Mezzacapo A, Heras U Las, Lamata L, Solano E, Filipp S, Wallraff A 2015 Phys. Rev. X 5 021027
[12] Barends R, Lamata L, Kelly J, et al. 2015 Nat. Commun. 6 7654
Google Scholar
[13] Zhong Y P, Xu D, Wang P, Song C, Guo Q J, Liu W X, Xu K, Xia B X, Lu C Y, Han S, Pan J W, Wang H 2016 Phys. Rev. Lett. 117 110501
Google Scholar
[14] Flurin E, Ramasesh V V, Hacohen-Gourgy S, Martin L S, Yao N Y, Siddiqi I 2017 Phys. Rev. X 7 031023
[15] Roushan P, Neill C, Tangpanitanon J, et al. 2017 Science 358 1175
Google Scholar
[16] Xu K, Chen J J, Zeng Y, Zhang Y R, Song C, Liu W X, Guo Q J, Zhang P F, Xu D, Deng H, Huang K Q, Wang H, Zhu X B, Zheng D N, Fan H 2018 Phys. Rev. Lett. 120 050507
Google Scholar
[17] Song C, Xu D, Zhang P, Wang J, Guo Q, Liu W, Xu K, Deng H, Huang K, Zheng D, Zheng S B, Wang H, Zhu X, Lu C Y, Pan J W 2018 Phys. Rev. Lett. 121 030502
Google Scholar
[18] Ma R, Saxberg B, Owens C, Leung N, Lu Y, Simon J, Schuster D I 2019 Nature 566 51
Google Scholar
[19] Guo X Y, Yang C, Zeng Y, Peng Y, Li H K, Deng H, Jin Y R, Chen S, Zheng D N, Fan H 2019 Phys. Rev. Appl. 11 044080
Google Scholar
[20] Arute F, Arya K, Babbush R, Bacon D, Bardin J C, Barends R, Biswas R, Boixo S, Brandao F G, Buell D A 2019 Nature 574 505
Google Scholar
[21] Xu K, Sun Z H, Liu W, Zhang Y R, Li H, Dong H, Ren W, Zhang P, Nori F, Zheng D, Fan H, Wang H 2020 Sci. Adv. 6 4935
Google Scholar
[22] Guo Q, Cheng C, Sun Z H, Song Z, Li H, Wang Z, Ren W, Dong H, Zheng D, Zhang Y R, Mondaini R, Fan H, Wang H 2021 Nat. Phys. 17 234
Google Scholar
[23] Kandala A, Temme K, Corcoles A D, Mezzacapo A, Chow J M, Gambetta J M 2019 Nature 567 491
Google Scholar
[24] KassalI, WhitfieldJD, Perdomo-OrtizA, YungMH, Aspuru-GuzikA, 2011 Ann. Rev. Phys. Chem. 62 185
Google Scholar
[25] Lloyd S 1996 Science 273 1073
Google Scholar
[26] O’Malley P J J, Babbush R, Kivlichan I D, et al. 2016 Phys. Rev. X. 6 031007
[27] Peruzzo A, McClean J, Shadbolt P, Yung M H, Zhou X Q, Love P J, Aspuru-Guzik A, O’Brien J L 2014 Nat. Comm. 5 4213
Google Scholar
[28] Emani P S, Warrell J, Anticevic A, et al. 2021 Nat. Methods. 18 701
Google Scholar
[29] Biamonte J, Wittek P, Pancotti N, Rebentrost P, Wiebe N, Lloyd S 2017 Nature 549 195
Google Scholar
[30] Ristè D, Silva M P, Ryan C A, Cross A W, Corcoles A D, Smolin J A, Gambetta J M, Chow J M, Johnson B R 2017 NPJ Quant. Inf. 3 16
Google Scholar
[31] Woerner S, Egger D J 2019 NPJ Quant. Inf. 5 15
Google Scholar
[32] Chakrabarti S, Krishnakumar R, Mazzola G, Stamatopoulos N, Woerner S, Zeng W J arXiv2012: 03819 [quant-ph]
[33] Chang J B, Vissers M R, Corcoles A D, Sandberg M, Gao J S, Abraham D W, Chow J M, Gambetta J M, Rothwell M B, Keefe G A, Steffen M, Pappas D P 2013 Appl. Phys. Lett. 103 012602
Google Scholar
[34] Zhang G Y, Liu Y B, James J, Andrew R, Houck A 2017 npj Quant. Info. 3 1
Google Scholar
[35] Blok M S, Ramasesh V V, Schuster T, Brien K O, Kreikebaum J M, Dahlen D, Morvan A, Yoshida B, Yao N Y, Siddiqi I arXiv: 2003.03307 v1 [quant-ph]
[36] Sage J M, Bolkhovsky V, Oliver W D, Turek B, Welander P B 2011 J. Appl. Phys. 109 063915
Google Scholar
[37] Stammeier M, Garcia S, Wallraff A 2018 Quantum Sci. Technol. 3 045007
Google Scholar
[38] Su F F, Liu W Y, Xu H K, Deng H, Li Z Y, Tian Y, Zhu X B, Zheng D N, Lu L, Zhao S P 2017 Chin. Phys. B 26 060308
Google Scholar
[39] Su F F, Yang Z H, Zhao S K, Yan H S, Wang Z T, Song X H, Tian Y, Zhao S P 2021 Chin. Phys. B 30 100304
Google Scholar
[40] Liu W Y, Su F F, Xu H K, Li Z Y, Tian Y, Zhu X B, Lu Li, Han S Y, Zhao S P 2018 Supercond. Sci. Tech. 31 045003
Google Scholar
[41] Su F F, Wang Z T, Xu H K, Zhao S K, Yan H S, Yang Z H, TianY, Zhao S P 2019 Chin. Phys. B 28 110303
Google Scholar
[42] Wang C L, Li X, Xu H K, et al. arXiv: 2105.09890 [quant-ph]
[43] Chiorescu I, Nakamura Y, Harmans C J, Mooij J E 2003 Science 299 1869
Google Scholar
[44] Simmonds R W, Lang K M, Hite D A, Nam S, Pappas D P, Martinis J M 2004 Phys. Rev. Lett. 93 077003
Google Scholar
[45] Koch J, Terri M Y, Gambetta J, Houck A A, Schuster D I, Majer J, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Phys. Rev. A 76 042319
Google Scholar
[46] Majer J, Chow J M, Gambetta J M, Koch J, Johnson B R, Schreier J A, Frunzio L, Schuster D I, Houck A A, Wallraff A, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Nature 449 443
Google Scholar
[47] Barends R, Kelly J, Megrant A, Sank D, Jeffrey E, Chen Y, Yin Y, Chiaro B, Mutus J, Neill C, O'Malley P, Roushan P, Wenner J, White T C, Cleland A N, Martinis J M 2013 Phys. Rev. Lett. 111 080502
Google Scholar
[48] Manucharyan V E, Koch J, Glazman L I, DevoretM H 2009 Science 326 113
Google Scholar
[49] Yan F, Gustavsson S, Kamal A, Birenbaum J, Sears A P, Hover D, Gudmundsen T J, Rosenberg D, Samach G, Weber S, Yoder J L, Orlando T P, Clarke J, Kerman A J, Oliver W D 2016 Nat. Comm. 7 12964
Google Scholar
[50] Zhong Y P, Li C Y, Wang H H, Chen Y 2013 Chin. Phys. B 22 110313
Google Scholar
[51] Johnson M W, Amin M H S, Gildert S, Lanting T, Hamze F, Dickson N, Harris R, Berkley A J, Johansson J, Bunyk P 2011 Nature 473 194
Google Scholar
[52] Su F F, Yang Z H 2021 Physics and Engineering 31 73
[53] Houck A A, Schreier J A, Johnson B R, Chow J M, Koch J, Gambetta J M, Schuster D I, Frunzio L, Devoret M H, Girvin S M, Schoelkopf R J 2008 Phys. Rev. Lett. 101 080502
Google Scholar
[54] Gambetta J M, Murrayc E, Fung YK K 2017 IEEE Transactions on Applied Superconductivity 27 1
[55] Pop I M, Geerlings K, Catelani G, Schoelkopf R J, Glazman L I, Devoret M H 2014 Nature 508 369
Google Scholar
[56] Martinis J M, Megrant A arXiv: 14105793 [quant-ph]
[57] Megrant A, Neill C, Barends R, et al. 2012 Appl. Phys. Lett. 100 113510
Google Scholar
[58] Quintana C M, Megrant A, Chen Z, et al. 2014 Appl. Phys. Lett. 105 062601
Google Scholar
[59] Wang C, Axline C, Gao Y Y, Brecht T, Chu Y, Frunzio L, Devoret M H, Schoelkopf R J 2015 Appl. Phys. Lett. 107 162601
Google Scholar
[60] Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J, Senior, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1
[61] Leonard E, Beck M A, Nelson J, et al. 2019 Phys. Rev. Appl. 11 014009
Google Scholar
[62] Bruno A, de Lange G, Asaad S, van der Enden K L, Langford N K, DiCarlo L 2015 Appl. Phys. Lett. 106 182601
Google Scholar
[63] Vissers M R, Gao J, Wisbey D S, Hite D A, Tseui C C, Corcoles A D, Steffen M, Pappas D P 2010 Appl. Phys. Lett. 97 232509
Google Scholar
[64] Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J W, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1700205
[65] Wisbey D S, Gao J, Vissers M R, da Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918
Google Scholar
[66] Ohya S, Chiaro B, Megrant A, et al. 2014 Supercond. Sci. Tech. 27 015009
Google Scholar
[67] Melville A, Calusine G, Woods W, Serniak K, Golden E, Niedzielski B M, Kim D K, Sevi A, Yoder J L, Dauler E A, Oliver W D 2020 Appl. Phys. Lett. 117 124004
Google Scholar
[68] Geerlings K, Shankar S, Edwards E, Frunzio L, Schoelkopf R J, Devoret M H 2012 Appl. Phys. Lett. 100 192601
Google Scholar
[69] Dunsworth A, Megrant A, Quintana C, et al. 2017 Appl. Phys. Lett. 111 022601
Google Scholar
[70] Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arxXiv1901.08042[quant-ph]
[71] Altoé M V P, Banerjee A, Berk C, et al. arXiv2012.07604[quant-ph]
[72] Premkumar A, Weiland C, Hwang S, et al. arXiv: 2004.02908 v1[quant-ph]
[73] Kamal A, Yoder J L, Yan F, Gudmundsen T J, Hover D, Sears A P, Welander P, Orlando T P, Gustavsson S, Oliver W D arXiv1606.09262[cond-mat. mes-hall]
[74] Earnest C T, Béjanin J H, McConkey T G, Peters E A, Korinek A, Yuan H, Mariantoni M 2018 Supercond. Sci. Tech. 31 125013
Google Scholar
[75] You J Q and Nori F 2011 Nature 474 589
Google Scholar
[76] Kjaergaard A, Schwartz M E, Braumüller J, Krantz P, Wang J I J, Gustavsson S, Oliver W D 2020 Ann. Rev. Cond. Matter Phys. 11 369
Google Scholar
[77] Kreikebaum J M, Dove A, Livingston W, Kim E, Siddiqi I 2016 Supercond. Sci. Tech. 29 104002
Google Scholar
[78] Segall K, Crankshaw D, Nakada D, Orlando T P, Levitov L S, Lloyd S, Markovic N, Valenzuela S O, Tinkham M, Berggren K K 2003 Phys. Rev. B 67 220506
Google Scholar
[79] Gurvitch M, Washington M A, Huggins H A 1983 Appl. Phys. Lett. 42 472
Google Scholar
[80] Cava R J, Batlogg B, Krajewski J J, Poulsen H F, Gammel P, Peck W F, Rupp L W 1991 Phys. Rev. B 44 6973
Google Scholar
[81] Verjauw J, Potočnik A, Mongillo M, et al. 2021 Phys. Rev. Applied 16 014018
Google Scholar
[82] Place A P M, Rodgers L V H, Rodgers L V H, et al. 2021 Nat. Comm. 12 1779
Google Scholar
[83] Gladczuk L, Patel A, Paur C S, Sosnowski M 2004 Thin Solid Films 467 150
Google Scholar
[84] Face D W, Probe D E 1987 J. Vac. Sci. Tech. 5 3406
[85] Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263
Google Scholar
[86] Schauer A, Roschy M 1972 Thin Solid Films 12 313
Google Scholar
[87] Fàbrega L, Fernández-Martínez I, Parra-Borderías M, Gil O, Camón A, Arrabal R G, Sesé J, Santiso J, Costa-Krämer J L, Briones F 2009 IEEE Trans. Appl. Supercond. 19 3779
Google Scholar
[88] Shearrow A, Koolstra G, Whiteley S J, Earnest N, Barry P S, Heremans F J, Awschalom D D, Shirokoff E, Schuster D I arXiv1808.06009 [cond-mat. mes-hall]
[89] Profeta G, Franchini C, Lathiotakis N N, Floris A, Sanna A, Marques M A L, Lüders M, Massidda S, Gross E K U, Continenza A 2006 Phys. Rev. Lett. 96 047003
Google Scholar
[90] Pickard C J, Errea I, Eremets M I 2020 Ann. Rev. Condens. Matter. Phys. 11 57
Google Scholar
[91] Lisenfeld J, Bilmes A, Megrant A, Barends R, Kelly J, Klimov P, Weiss G, Martinis J M, Ustinov A V 2019 NPJ Quantum Inf. 5 105
Google Scholar
[92] Park J, Yan A, Tilka J A, Sampson K C, Savage D E, Prance J R, Simmons C B, Lagally M G, Coppersmith S N, Eriksson M A, Holt M V, Evans P G 2016 Appl. Phys. Lett. 4 066102
[93] Lisenfeld J, Grabovskij G J, Müller C, Cole J H, Weiss G, Ustinov A V 2015 Nat. Comm. 6 6182
Google Scholar
[94] Pateras A, Park Y, Ahn Y, Tilka J A, Holt M V, Reichl C, Wegscheider W, Baart T A, Dehollain J P, Mukhopadhyay U, Vandersypen L M K, Evans P G 2018 Nano Lett. 18 2780
Google Scholar
[95] Anderson A C, Smith S C 1973 J. Phys. Chem. Solids 34 111
Google Scholar
[96] Wang H, Shi C, Hu J, Han S, Yu C, Wu R Q 2015 Phys. Rev. Lett. 115 077002
Google Scholar
[97] Lee D, Du Bois J L, Lordi V 2014 Phys. Rev. Lett. 112 017001
Google Scholar
[98] Kumar P, Sendelbach S, Beck M A, Freeland J W, Wang Z, Wang H, Yu C C, Wu R Q, Pappas D P, McDermott R 2016 Phys. Rev. Appl. 6 041001
Google Scholar
[99] Choi S, Lee D H, Louie S G, Clarke J 2009 Phys. Rev. Lett. 103 197001
Google Scholar
[100] Neill C, Megrant A, Barends R, Chen Y, Chiaro B, Kelly J, Mutus J Y, O’Malley P J J, Sank D, Wenner J, White T C, Yin Y, Cleland A N, Martinis J M 2013 Appl. Phys. Lett. 103 072601
Google Scholar
[101] Lock E H, Xu P, Kohler T, Camacho L, Prestigiacomo J, Rosen Y J, Osborn K D 2019 IEEE Trans. Appl. Supercond. 29 1700108
[102] Woods W, Calusine G, Melville A, Sevi A, Golden E, Kim D K, Rosenberg D, Yoder J L, Oliver W D 2019 Phys. Rev. Appl. 12 014012
Google Scholar
[103] Dolan G J 1977 Appl. Phys. Lett. 31 337
Google Scholar
[104] Costache M V, Bridoux G, Neumann I, Valenzuela S O 2012 J. Vac. Sci. Tech. B. 30 104
[105] Kreikebaum J M, O’Brien K P, Morvan A, Siddiqi I 2020 Supercond. Sci. Tech. 33 0602
Google Scholar
[106] Shapiro S 1963 Phys. Rev. Lett. 11 80
Google Scholar
[107] Clarke J 1972 Phys. Rev. Lett. 28 1363
Google Scholar
[108] Cai N, Zhou G, Müller K, Starr D E 2012 Appl. Phys. Lett. 101 171605
Google Scholar
[109] Ambegaokar V, Baratoff A 1963 Phys. Rev. Lett. 10 486
Google Scholar
[110] Steinbach A, Joyez P, Cottet A, Esteve D, Devoret M H, Huber M E, Martinis J M 2001 Phys. Rev. Lett. 87 137003
Google Scholar
[111] Zhang E, Srinivasan S, Sundaresan N, et al. arXiv: 2012.08475 [quant-ph]
[112] Bilmes A, Neumann A K, Volosheniuk S, Ustinov A V, Lisenfeld J arXiv: 2101.01453 v2 [quant-ph]
[113] Osman A, Simon J, Bengtsson A, Kosen S, Krantz P, Perez D, Scigliuzzo M, Bylander J, Roudsari A F arXiv: 2011.05230 v1 [cond-mat. supr-con]
[114] Chen Z, Megrant A, Kelly J, et al. 2014 Appl. Phys. Lett. 104 052602
Google Scholar
[115] Rosenberg D, Weber S J, Conway D, Jost D R W, Mallek J, Calusine G, Das R, Kim D, Schwartz M E, Woods W, Yoder J L, Oliver W D 2020 IEEE Micro. Mag. 21 72
[116] Jin Z C, Wu H T, Yu H F, Yu Y 2018 Chin. Phys. B 27 100310
Google Scholar
[117] Burnett J J, Bylander J, Bengtsson A, Scigliuzzo M, Niepce D 2019 NPJ Quantum Inf. 5 1
Google Scholar
[118] Schlor S, Lisenfeld J, Mueller C, Bilmes A, Schneider A, Pappas D P, Ustinov A V, Weides M 2019 Phys. Rev. Lett. 123 190502
Google Scholar
[119] Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arXiv1901.08042 [quant-ph]
[120] Oliver W D, Welander P B 2013 MRS Bulletin 38 816
Google Scholar
[121] de Graaf S E, Faoro L, Burnett J, Adamyan A A, Tzalenchuk A Y, Kubatkin S E, Lindström T, Danilov A V 2018 Nat. Commun. 9 1143
Google Scholar
[122] Lisenfeld J, Mueller C, Cole J H, Bushev P, Lukashenko A, Shnirman A, Ustinov A V 2010 Phys. Rev. Lett. 105 230504
Google Scholar
[123] Paz A, Lebedeva I, Tokatly I, Rubio A 2014 Phys. Rev. B 90 224202
Google Scholar
[124] Muller C, Cole J H, Lisenfeld J 2019 Rep. Prog. Phys. 82 124501
Google Scholar
[125] Martinis J M, Cooper K B, McDermott R, Steffen M, Ansmann M, Osborn K D, Cicak K, Oh S, Pappas D P, Simmonds RW and Yu C C 2005 Phys. Rev. Lett. 95 210503
Google Scholar
[126] Neeley M, Ansmann M, Bialczak R C, Hofheinz M, Katz N, Lucero E, O’Connell A, Wang H, Cleland A N and Martinis J 2008 Phys. Rev. B 77 180508
Google Scholar
[127] Martinis J M 2009 Quantum Inf. Process. 8 81
Google Scholar
[128] Weides M, Bialczak R C, Lenander M, Lucero E, Mariantoni M, Neeley M, O’Connell A D, Sank D, Wang H, Wenner J, Yamamoto T, Yin Y, Cleland A N and Martinis J 2011 Supercond. Sci. Technol. 24 055005
Google Scholar
[129] Lecocq F, Pop I M, Peng Z H, Matei I, Crozes T, Fournier T, Naud C, Guichard W and Buisson O 2011 Nanotechnology 22 315302
Google Scholar
[130] Semenov V K, Danilov G V, Averin D V 2003 IEEE Trans. Appl. Supecond. 13 938
Google Scholar
[131] Semenov V K, Danilov G V, Averin D V 2007 IEEE Trans. Appl. Supecond. 17 455
Google Scholar
[132] Ren J, Semenov V K, Polyakov Y A, Averin D V, Tsai J S 2009 IEEE Trans. Appl. Supecond. 19 961
Google Scholar
[133] Averin D V, Xu K, Zhong Y P, Song C, Wang H, Han S 2016 Phys. Rev. Lett. 116 010501
Google Scholar
[134] Han S, Lapointe J, Lukens J E 1989 Phys. Rev. Lett. 63 1712
Google Scholar
[135] Li S X, Yu Y, Zhang Y, Qiu W, Han S 2002 Phys. Rev. Lett. 89 098301
Google Scholar
[136] Balestro F, Claudon J, Pekola J P, Buisson O 2003 Phys. Rev. Lett. 91 158301
Google Scholar
[137] Lei C U, Krayzman L, Ganjam S, Frunzio L, Schoelkopf R J 2020 Appl. Phys. Lett. 116 154002
[138] Barends R, Vercruyssen N, Endo A, de Visser P J, Zijlstra T, Klapwijk T M, Diener P, Yates S J C, Baselmans J J A 2010 Appl. Phys. Lett. 97 023508
Google Scholar
[139] Leduc H G, Bumble B, Day P K, Eom B H, Gao J, Golwala S, Mazin B A, McHugh S, Merrill A, Moore D C, Noroozian O, Turner A D, Zmuidzinas J 2010 Appl. Phys. Lett. 97 102509
Google Scholar
[140] Foxen B, Mutus J Y, Lucero E, et al. 2018 Quantum Sci. Technol. 3 014005
Google Scholar
[141] Levenson-Falk E M, Vijay R, Siddiqi I 2011 Appl. Phys. Lett. 98 123115
Google Scholar
[142] Castellanos-Beltran M A, Irwin K D, Hilton G C, Vale L R, Lehnert K W 2008 Nat. Phys. 4 929
Google Scholar
[143] Siddiqi I, Vijay R, Pierre F, Wilson C M, Metcalfe M, Rigetti C, Frunzio L, Devoret M H 2004 Phys. Rev. Lett. 93 207002
Google Scholar
[144] Reed M D, DiCarlo L, Johnson B R, Sun L, Schuster D I, Frunzio L, Schoelkopf R J 2010 Phys. Rev. Lett. 105 173601
Google Scholar
[145] Huang K Q, Guo Q J, Song C, Zheng Y R, Deng H, Wu Y L, Jin Y R, Zhu X B, Zheng D N 2017 Chin. Phys. B 26 094203
Google Scholar
[146] Yang R, DengH 2020 IEEE Trans. APP. Supercon. 30 4
Google Scholar
[147] Roy T, Kundu S, Chand M, Vadiraj A M, Ranadive A, Nehra N, Patankar M P, Aumentado J, Clerk A A, Vijaz R 2015 Appl. Phy. Lett. 107 262601
Google Scholar
[148] Xue H, Lin Z R, Jiang W B, Niu Z Q, Liu K, Peng W, Wang Z 2021 Chin. Phys. B 30 068503
Google Scholar
[149] Lu Y P, Zuo Q, Pan J Z, Jiang J L, Wei X Y, Li Z S, Xu W Q, Zhang K X, Guo T T, Wang S, Cao C H, Xu W W, Sun G Z, Wu P H 2021 Chin. Phys. B 30 068504
Google Scholar
[150] Eom B H, Day P K, LeDay H G, Zmuidzinas J 2012 Nat. Phy. 8 623
Google Scholar
[151] White T C, Mutus J Y, Kelly J, Sank D, Martinis J M 2015 Appl. Phy. Lett. 106 242601
Google Scholar
[152] Macklin C, O’Brien, Hover D, Schwartz M E, Bolkhovsky V, Zhang X, Oliver W D, Siddiqi I 2015 Science 350 307
Google Scholar
[153] Harrow A W, Montanaro A 2017 Nature 549 203
Google Scholar
[154] Kelly J, Barends R, Fowler A G, et al. 2015 Nature 519 66
Google Scholar
[155] Xu H K, Song C, Liu W Y, Xue G M, Su F F, Deng H, Tian Y, Zheng D N, Han S Y, Zhong Y P, Wang H, Liu Y X, Zhao S P 2016 Nat. Comm. 7 11018
Google Scholar
[156] Wu Y L, Bao W S, Cao S R, Chen F S, Chen M C, Pan J W, et al. arXiv: 2106.14734 v1 [quant-ph]
-
图 7 (a)铌基位相量子位中心区域的光学显微镜照片, 硅基片呈绿色, 而较暗和较亮的金属部分是Nb和Al薄膜; (b)位相量子比特能谱与能量弛豫时间的测量结果[38]
Figure 7. (a) Optical microscope image of the central region of Nb-based phase qubit, the substrate appears greenish in color while the darker and brighter parts are the Nb and Al films; (b) measurement results of energy spectrum and energy relaxation time of phase qubit[38].
图 8 (a) 铌基nSQUID量子比特中心部分的假色光学照片, 衬底、Nb层、Al层和α-Si层分别呈灰色、浅黄色、白色和棕色; (b)—(e) nSQUID量子比特不同条件下的典型二维势阱[40]
Figure 8. (a) False-colored optical photograph of the central part of Nb-based nSQUID qubit with the substrate, Nb layer, Al layers, and α-Si layer appearing in gray, light yellow, white, and brown, respectively; (b)–(e) Typical 2D potential landscapes of the nSQUID qubit [40].
图 9 (a)铌基耦合10比特器件中心区域; (b)跨过控制线的空气桥; (c)包含两个约瑟夫森结的SQUID环区域; (d)样品能量弛豫时间测量结果[39]
Figure 9. Microscope images of (a) the central region of Nb-based coupled 10-qubit device; (b) an airbridge across the control line; (c) the SQUID loop area containing two Josephson junctions; (d) measurement results of sample energy relaxation time[39].
表 1 不同生长模式制备的铌薄膜器件性质[72]
Table 1. Properties of niobium thin film devices with different growth modes[72].
Deposition Sputtered HiPIMS opt HiPIMS norm T1/μs 56 ± 12 33 ± 2 17 ± 9 RRR 8.9 ± 0.1 5.0 ± 0.2 2.9 ± 0.1 Tc/K 9.0 ± 0.1 8.6 ± 0.1 8.1 ± 0.1 GSA/nm2 1140 ± 70 500 ± 50 180 ± 30 Nb 61 ± 3 64 ± 3 45 ± 2 NbOx 15.1 ± 0.2 16.0 ± 0.3 20.4 ± 0.8 NbO 0 ± 2 0 ± 1 5 ± 1 NbO2 3.1 ± 0.4 3.5 ± 0.2 10 ± 2 Nb2O5 20 ± 1 15.9 ± 0.8 19 ± 2 Suboxide 19 ± 2 20 ± 1 36 ± 2 表 2 不同方法生长铌薄膜以及所制备谐振腔的性质[57]
Table 2. Growth of niobium thin films by different methods and fabricated resonator properties [57].
Processa In vacuo cleaning w/μm f0/GHz Qi-H×106 Qi-L×106 (A) Sputter 100 eV Ar+ mill for 2 min 3
153.833
6.1294.30
4.500.16
0.40(B) E-beam 60 eV Ar+ mill for 2 min 3
153.810
6.0899.90
4.400.66
0.72(C) MBE None 6
154.973
6.1205.70
4.330.53
0.76(D) MBE LLb anneal 3
153.773
6.1256.58
5.380.75
0.80(E) MBE LLb and 850 ℃ anneal 3
153.876
6.12710.10
6.401.15
0.92 -
[1] Makhlin Y, Schon G, Shnirman A 2001 Rev. Mod. Phys. 73 357
Google Scholar
[2] Clarke J, Wilhelm F K 2008 Nature 19 459
[3] Devoret M H, Schoelkopf R J 2013 Science 339 1169
Google Scholar
[4] Krantz P, Kjaergaard M, Yan F, Orlando T P, Gustavsson S, Oliver W D 2019 Appl. Phys. Lett. 60 21318
[5] Kjaergaard M, Schwartz M E, Braumüller J, Krantz P, Wang I J, Gustavsson S, Oliver W D 2020 Annu. Rev. 11 369
[6] Mi X, Ippoliti M, Quintana C, et al. 2021 arXiv: 2107.13571 v2 [quant-ph]
[7] Makhlin Y, Schon G, Shnirman A 2007 Physics 73 357
[8] Paik H, Schuster D I, Bishop L S, Kirchmair G, Catelani G, Sears A P, Johnson B R, Reagor M J, Frunzio L, Glazman L I, Girvin S M, Devoret M H, Schoelkopf R J 2011 Phys. Rev. Lett. 107 240501
Google Scholar
[9] Nakamura Y, Pashkin Y A, Tsai J S 1999 Nature 398 786
Google Scholar
[10] Swingle B 2018 Nat. Phys. 14 988
Google Scholar
[11] Salathé Y, Mondal M, Oppliger M, Heinsoo J, Kurpiers P, Potocnik A, Mezzacapo A, Heras U Las, Lamata L, Solano E, Filipp S, Wallraff A 2015 Phys. Rev. X 5 021027
[12] Barends R, Lamata L, Kelly J, et al. 2015 Nat. Commun. 6 7654
Google Scholar
[13] Zhong Y P, Xu D, Wang P, Song C, Guo Q J, Liu W X, Xu K, Xia B X, Lu C Y, Han S, Pan J W, Wang H 2016 Phys. Rev. Lett. 117 110501
Google Scholar
[14] Flurin E, Ramasesh V V, Hacohen-Gourgy S, Martin L S, Yao N Y, Siddiqi I 2017 Phys. Rev. X 7 031023
[15] Roushan P, Neill C, Tangpanitanon J, et al. 2017 Science 358 1175
Google Scholar
[16] Xu K, Chen J J, Zeng Y, Zhang Y R, Song C, Liu W X, Guo Q J, Zhang P F, Xu D, Deng H, Huang K Q, Wang H, Zhu X B, Zheng D N, Fan H 2018 Phys. Rev. Lett. 120 050507
Google Scholar
[17] Song C, Xu D, Zhang P, Wang J, Guo Q, Liu W, Xu K, Deng H, Huang K, Zheng D, Zheng S B, Wang H, Zhu X, Lu C Y, Pan J W 2018 Phys. Rev. Lett. 121 030502
Google Scholar
[18] Ma R, Saxberg B, Owens C, Leung N, Lu Y, Simon J, Schuster D I 2019 Nature 566 51
Google Scholar
[19] Guo X Y, Yang C, Zeng Y, Peng Y, Li H K, Deng H, Jin Y R, Chen S, Zheng D N, Fan H 2019 Phys. Rev. Appl. 11 044080
Google Scholar
[20] Arute F, Arya K, Babbush R, Bacon D, Bardin J C, Barends R, Biswas R, Boixo S, Brandao F G, Buell D A 2019 Nature 574 505
Google Scholar
[21] Xu K, Sun Z H, Liu W, Zhang Y R, Li H, Dong H, Ren W, Zhang P, Nori F, Zheng D, Fan H, Wang H 2020 Sci. Adv. 6 4935
Google Scholar
[22] Guo Q, Cheng C, Sun Z H, Song Z, Li H, Wang Z, Ren W, Dong H, Zheng D, Zhang Y R, Mondaini R, Fan H, Wang H 2021 Nat. Phys. 17 234
Google Scholar
[23] Kandala A, Temme K, Corcoles A D, Mezzacapo A, Chow J M, Gambetta J M 2019 Nature 567 491
Google Scholar
[24] KassalI, WhitfieldJD, Perdomo-OrtizA, YungMH, Aspuru-GuzikA, 2011 Ann. Rev. Phys. Chem. 62 185
Google Scholar
[25] Lloyd S 1996 Science 273 1073
Google Scholar
[26] O’Malley P J J, Babbush R, Kivlichan I D, et al. 2016 Phys. Rev. X. 6 031007
[27] Peruzzo A, McClean J, Shadbolt P, Yung M H, Zhou X Q, Love P J, Aspuru-Guzik A, O’Brien J L 2014 Nat. Comm. 5 4213
Google Scholar
[28] Emani P S, Warrell J, Anticevic A, et al. 2021 Nat. Methods. 18 701
Google Scholar
[29] Biamonte J, Wittek P, Pancotti N, Rebentrost P, Wiebe N, Lloyd S 2017 Nature 549 195
Google Scholar
[30] Ristè D, Silva M P, Ryan C A, Cross A W, Corcoles A D, Smolin J A, Gambetta J M, Chow J M, Johnson B R 2017 NPJ Quant. Inf. 3 16
Google Scholar
[31] Woerner S, Egger D J 2019 NPJ Quant. Inf. 5 15
Google Scholar
[32] Chakrabarti S, Krishnakumar R, Mazzola G, Stamatopoulos N, Woerner S, Zeng W J arXiv2012: 03819 [quant-ph]
[33] Chang J B, Vissers M R, Corcoles A D, Sandberg M, Gao J S, Abraham D W, Chow J M, Gambetta J M, Rothwell M B, Keefe G A, Steffen M, Pappas D P 2013 Appl. Phys. Lett. 103 012602
Google Scholar
[34] Zhang G Y, Liu Y B, James J, Andrew R, Houck A 2017 npj Quant. Info. 3 1
Google Scholar
[35] Blok M S, Ramasesh V V, Schuster T, Brien K O, Kreikebaum J M, Dahlen D, Morvan A, Yoshida B, Yao N Y, Siddiqi I arXiv: 2003.03307 v1 [quant-ph]
[36] Sage J M, Bolkhovsky V, Oliver W D, Turek B, Welander P B 2011 J. Appl. Phys. 109 063915
Google Scholar
[37] Stammeier M, Garcia S, Wallraff A 2018 Quantum Sci. Technol. 3 045007
Google Scholar
[38] Su F F, Liu W Y, Xu H K, Deng H, Li Z Y, Tian Y, Zhu X B, Zheng D N, Lu L, Zhao S P 2017 Chin. Phys. B 26 060308
Google Scholar
[39] Su F F, Yang Z H, Zhao S K, Yan H S, Wang Z T, Song X H, Tian Y, Zhao S P 2021 Chin. Phys. B 30 100304
Google Scholar
[40] Liu W Y, Su F F, Xu H K, Li Z Y, Tian Y, Zhu X B, Lu Li, Han S Y, Zhao S P 2018 Supercond. Sci. Tech. 31 045003
Google Scholar
[41] Su F F, Wang Z T, Xu H K, Zhao S K, Yan H S, Yang Z H, TianY, Zhao S P 2019 Chin. Phys. B 28 110303
Google Scholar
[42] Wang C L, Li X, Xu H K, et al. arXiv: 2105.09890 [quant-ph]
[43] Chiorescu I, Nakamura Y, Harmans C J, Mooij J E 2003 Science 299 1869
Google Scholar
[44] Simmonds R W, Lang K M, Hite D A, Nam S, Pappas D P, Martinis J M 2004 Phys. Rev. Lett. 93 077003
Google Scholar
[45] Koch J, Terri M Y, Gambetta J, Houck A A, Schuster D I, Majer J, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Phys. Rev. A 76 042319
Google Scholar
[46] Majer J, Chow J M, Gambetta J M, Koch J, Johnson B R, Schreier J A, Frunzio L, Schuster D I, Houck A A, Wallraff A, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Nature 449 443
Google Scholar
[47] Barends R, Kelly J, Megrant A, Sank D, Jeffrey E, Chen Y, Yin Y, Chiaro B, Mutus J, Neill C, O'Malley P, Roushan P, Wenner J, White T C, Cleland A N, Martinis J M 2013 Phys. Rev. Lett. 111 080502
Google Scholar
[48] Manucharyan V E, Koch J, Glazman L I, DevoretM H 2009 Science 326 113
Google Scholar
[49] Yan F, Gustavsson S, Kamal A, Birenbaum J, Sears A P, Hover D, Gudmundsen T J, Rosenberg D, Samach G, Weber S, Yoder J L, Orlando T P, Clarke J, Kerman A J, Oliver W D 2016 Nat. Comm. 7 12964
Google Scholar
[50] Zhong Y P, Li C Y, Wang H H, Chen Y 2013 Chin. Phys. B 22 110313
Google Scholar
[51] Johnson M W, Amin M H S, Gildert S, Lanting T, Hamze F, Dickson N, Harris R, Berkley A J, Johansson J, Bunyk P 2011 Nature 473 194
Google Scholar
[52] Su F F, Yang Z H 2021 Physics and Engineering 31 73
[53] Houck A A, Schreier J A, Johnson B R, Chow J M, Koch J, Gambetta J M, Schuster D I, Frunzio L, Devoret M H, Girvin S M, Schoelkopf R J 2008 Phys. Rev. Lett. 101 080502
Google Scholar
[54] Gambetta J M, Murrayc E, Fung YK K 2017 IEEE Transactions on Applied Superconductivity 27 1
[55] Pop I M, Geerlings K, Catelani G, Schoelkopf R J, Glazman L I, Devoret M H 2014 Nature 508 369
Google Scholar
[56] Martinis J M, Megrant A arXiv: 14105793 [quant-ph]
[57] Megrant A, Neill C, Barends R, et al. 2012 Appl. Phys. Lett. 100 113510
Google Scholar
[58] Quintana C M, Megrant A, Chen Z, et al. 2014 Appl. Phys. Lett. 105 062601
Google Scholar
[59] Wang C, Axline C, Gao Y Y, Brecht T, Chu Y, Frunzio L, Devoret M H, Schoelkopf R J 2015 Appl. Phys. Lett. 107 162601
Google Scholar
[60] Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J, Senior, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1
[61] Leonard E, Beck M A, Nelson J, et al. 2019 Phys. Rev. Appl. 11 014009
Google Scholar
[62] Bruno A, de Lange G, Asaad S, van der Enden K L, Langford N K, DiCarlo L 2015 Appl. Phys. Lett. 106 182601
Google Scholar
[63] Vissers M R, Gao J, Wisbey D S, Hite D A, Tseui C C, Corcoles A D, Steffen M, Pappas D P 2010 Appl. Phys. Lett. 97 232509
Google Scholar
[64] Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J W, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1700205
[65] Wisbey D S, Gao J, Vissers M R, da Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918
Google Scholar
[66] Ohya S, Chiaro B, Megrant A, et al. 2014 Supercond. Sci. Tech. 27 015009
Google Scholar
[67] Melville A, Calusine G, Woods W, Serniak K, Golden E, Niedzielski B M, Kim D K, Sevi A, Yoder J L, Dauler E A, Oliver W D 2020 Appl. Phys. Lett. 117 124004
Google Scholar
[68] Geerlings K, Shankar S, Edwards E, Frunzio L, Schoelkopf R J, Devoret M H 2012 Appl. Phys. Lett. 100 192601
Google Scholar
[69] Dunsworth A, Megrant A, Quintana C, et al. 2017 Appl. Phys. Lett. 111 022601
Google Scholar
[70] Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arxXiv1901.08042[quant-ph]
[71] Altoé M V P, Banerjee A, Berk C, et al. arXiv2012.07604[quant-ph]
[72] Premkumar A, Weiland C, Hwang S, et al. arXiv: 2004.02908 v1[quant-ph]
[73] Kamal A, Yoder J L, Yan F, Gudmundsen T J, Hover D, Sears A P, Welander P, Orlando T P, Gustavsson S, Oliver W D arXiv1606.09262[cond-mat. mes-hall]
[74] Earnest C T, Béjanin J H, McConkey T G, Peters E A, Korinek A, Yuan H, Mariantoni M 2018 Supercond. Sci. Tech. 31 125013
Google Scholar
[75] You J Q and Nori F 2011 Nature 474 589
Google Scholar
[76] Kjaergaard A, Schwartz M E, Braumüller J, Krantz P, Wang J I J, Gustavsson S, Oliver W D 2020 Ann. Rev. Cond. Matter Phys. 11 369
Google Scholar
[77] Kreikebaum J M, Dove A, Livingston W, Kim E, Siddiqi I 2016 Supercond. Sci. Tech. 29 104002
Google Scholar
[78] Segall K, Crankshaw D, Nakada D, Orlando T P, Levitov L S, Lloyd S, Markovic N, Valenzuela S O, Tinkham M, Berggren K K 2003 Phys. Rev. B 67 220506
Google Scholar
[79] Gurvitch M, Washington M A, Huggins H A 1983 Appl. Phys. Lett. 42 472
Google Scholar
[80] Cava R J, Batlogg B, Krajewski J J, Poulsen H F, Gammel P, Peck W F, Rupp L W 1991 Phys. Rev. B 44 6973
Google Scholar
[81] Verjauw J, Potočnik A, Mongillo M, et al. 2021 Phys. Rev. Applied 16 014018
Google Scholar
[82] Place A P M, Rodgers L V H, Rodgers L V H, et al. 2021 Nat. Comm. 12 1779
Google Scholar
[83] Gladczuk L, Patel A, Paur C S, Sosnowski M 2004 Thin Solid Films 467 150
Google Scholar
[84] Face D W, Probe D E 1987 J. Vac. Sci. Tech. 5 3406
[85] Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263
Google Scholar
[86] Schauer A, Roschy M 1972 Thin Solid Films 12 313
Google Scholar
[87] Fàbrega L, Fernández-Martínez I, Parra-Borderías M, Gil O, Camón A, Arrabal R G, Sesé J, Santiso J, Costa-Krämer J L, Briones F 2009 IEEE Trans. Appl. Supercond. 19 3779
Google Scholar
[88] Shearrow A, Koolstra G, Whiteley S J, Earnest N, Barry P S, Heremans F J, Awschalom D D, Shirokoff E, Schuster D I arXiv1808.06009 [cond-mat. mes-hall]
[89] Profeta G, Franchini C, Lathiotakis N N, Floris A, Sanna A, Marques M A L, Lüders M, Massidda S, Gross E K U, Continenza A 2006 Phys. Rev. Lett. 96 047003
Google Scholar
[90] Pickard C J, Errea I, Eremets M I 2020 Ann. Rev. Condens. Matter. Phys. 11 57
Google Scholar
[91] Lisenfeld J, Bilmes A, Megrant A, Barends R, Kelly J, Klimov P, Weiss G, Martinis J M, Ustinov A V 2019 NPJ Quantum Inf. 5 105
Google Scholar
[92] Park J, Yan A, Tilka J A, Sampson K C, Savage D E, Prance J R, Simmons C B, Lagally M G, Coppersmith S N, Eriksson M A, Holt M V, Evans P G 2016 Appl. Phys. Lett. 4 066102
[93] Lisenfeld J, Grabovskij G J, Müller C, Cole J H, Weiss G, Ustinov A V 2015 Nat. Comm. 6 6182
Google Scholar
[94] Pateras A, Park Y, Ahn Y, Tilka J A, Holt M V, Reichl C, Wegscheider W, Baart T A, Dehollain J P, Mukhopadhyay U, Vandersypen L M K, Evans P G 2018 Nano Lett. 18 2780
Google Scholar
[95] Anderson A C, Smith S C 1973 J. Phys. Chem. Solids 34 111
Google Scholar
[96] Wang H, Shi C, Hu J, Han S, Yu C, Wu R Q 2015 Phys. Rev. Lett. 115 077002
Google Scholar
[97] Lee D, Du Bois J L, Lordi V 2014 Phys. Rev. Lett. 112 017001
Google Scholar
[98] Kumar P, Sendelbach S, Beck M A, Freeland J W, Wang Z, Wang H, Yu C C, Wu R Q, Pappas D P, McDermott R 2016 Phys. Rev. Appl. 6 041001
Google Scholar
[99] Choi S, Lee D H, Louie S G, Clarke J 2009 Phys. Rev. Lett. 103 197001
Google Scholar
[100] Neill C, Megrant A, Barends R, Chen Y, Chiaro B, Kelly J, Mutus J Y, O’Malley P J J, Sank D, Wenner J, White T C, Yin Y, Cleland A N, Martinis J M 2013 Appl. Phys. Lett. 103 072601
Google Scholar
[101] Lock E H, Xu P, Kohler T, Camacho L, Prestigiacomo J, Rosen Y J, Osborn K D 2019 IEEE Trans. Appl. Supercond. 29 1700108
[102] Woods W, Calusine G, Melville A, Sevi A, Golden E, Kim D K, Rosenberg D, Yoder J L, Oliver W D 2019 Phys. Rev. Appl. 12 014012
Google Scholar
[103] Dolan G J 1977 Appl. Phys. Lett. 31 337
Google Scholar
[104] Costache M V, Bridoux G, Neumann I, Valenzuela S O 2012 J. Vac. Sci. Tech. B. 30 104
[105] Kreikebaum J M, O’Brien K P, Morvan A, Siddiqi I 2020 Supercond. Sci. Tech. 33 0602
Google Scholar
[106] Shapiro S 1963 Phys. Rev. Lett. 11 80
Google Scholar
[107] Clarke J 1972 Phys. Rev. Lett. 28 1363
Google Scholar
[108] Cai N, Zhou G, Müller K, Starr D E 2012 Appl. Phys. Lett. 101 171605
Google Scholar
[109] Ambegaokar V, Baratoff A 1963 Phys. Rev. Lett. 10 486
Google Scholar
[110] Steinbach A, Joyez P, Cottet A, Esteve D, Devoret M H, Huber M E, Martinis J M 2001 Phys. Rev. Lett. 87 137003
Google Scholar
[111] Zhang E, Srinivasan S, Sundaresan N, et al. arXiv: 2012.08475 [quant-ph]
[112] Bilmes A, Neumann A K, Volosheniuk S, Ustinov A V, Lisenfeld J arXiv: 2101.01453 v2 [quant-ph]
[113] Osman A, Simon J, Bengtsson A, Kosen S, Krantz P, Perez D, Scigliuzzo M, Bylander J, Roudsari A F arXiv: 2011.05230 v1 [cond-mat. supr-con]
[114] Chen Z, Megrant A, Kelly J, et al. 2014 Appl. Phys. Lett. 104 052602
Google Scholar
[115] Rosenberg D, Weber S J, Conway D, Jost D R W, Mallek J, Calusine G, Das R, Kim D, Schwartz M E, Woods W, Yoder J L, Oliver W D 2020 IEEE Micro. Mag. 21 72
[116] Jin Z C, Wu H T, Yu H F, Yu Y 2018 Chin. Phys. B 27 100310
Google Scholar
[117] Burnett J J, Bylander J, Bengtsson A, Scigliuzzo M, Niepce D 2019 NPJ Quantum Inf. 5 1
Google Scholar
[118] Schlor S, Lisenfeld J, Mueller C, Bilmes A, Schneider A, Pappas D P, Ustinov A V, Weides M 2019 Phys. Rev. Lett. 123 190502
Google Scholar
[119] Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arXiv1901.08042 [quant-ph]
[120] Oliver W D, Welander P B 2013 MRS Bulletin 38 816
Google Scholar
[121] de Graaf S E, Faoro L, Burnett J, Adamyan A A, Tzalenchuk A Y, Kubatkin S E, Lindström T, Danilov A V 2018 Nat. Commun. 9 1143
Google Scholar
[122] Lisenfeld J, Mueller C, Cole J H, Bushev P, Lukashenko A, Shnirman A, Ustinov A V 2010 Phys. Rev. Lett. 105 230504
Google Scholar
[123] Paz A, Lebedeva I, Tokatly I, Rubio A 2014 Phys. Rev. B 90 224202
Google Scholar
[124] Muller C, Cole J H, Lisenfeld J 2019 Rep. Prog. Phys. 82 124501
Google Scholar
[125] Martinis J M, Cooper K B, McDermott R, Steffen M, Ansmann M, Osborn K D, Cicak K, Oh S, Pappas D P, Simmonds RW and Yu C C 2005 Phys. Rev. Lett. 95 210503
Google Scholar
[126] Neeley M, Ansmann M, Bialczak R C, Hofheinz M, Katz N, Lucero E, O’Connell A, Wang H, Cleland A N and Martinis J 2008 Phys. Rev. B 77 180508
Google Scholar
[127] Martinis J M 2009 Quantum Inf. Process. 8 81
Google Scholar
[128] Weides M, Bialczak R C, Lenander M, Lucero E, Mariantoni M, Neeley M, O’Connell A D, Sank D, Wang H, Wenner J, Yamamoto T, Yin Y, Cleland A N and Martinis J 2011 Supercond. Sci. Technol. 24 055005
Google Scholar
[129] Lecocq F, Pop I M, Peng Z H, Matei I, Crozes T, Fournier T, Naud C, Guichard W and Buisson O 2011 Nanotechnology 22 315302
Google Scholar
[130] Semenov V K, Danilov G V, Averin D V 2003 IEEE Trans. Appl. Supecond. 13 938
Google Scholar
[131] Semenov V K, Danilov G V, Averin D V 2007 IEEE Trans. Appl. Supecond. 17 455
Google Scholar
[132] Ren J, Semenov V K, Polyakov Y A, Averin D V, Tsai J S 2009 IEEE Trans. Appl. Supecond. 19 961
Google Scholar
[133] Averin D V, Xu K, Zhong Y P, Song C, Wang H, Han S 2016 Phys. Rev. Lett. 116 010501
Google Scholar
[134] Han S, Lapointe J, Lukens J E 1989 Phys. Rev. Lett. 63 1712
Google Scholar
[135] Li S X, Yu Y, Zhang Y, Qiu W, Han S 2002 Phys. Rev. Lett. 89 098301
Google Scholar
[136] Balestro F, Claudon J, Pekola J P, Buisson O 2003 Phys. Rev. Lett. 91 158301
Google Scholar
[137] Lei C U, Krayzman L, Ganjam S, Frunzio L, Schoelkopf R J 2020 Appl. Phys. Lett. 116 154002
[138] Barends R, Vercruyssen N, Endo A, de Visser P J, Zijlstra T, Klapwijk T M, Diener P, Yates S J C, Baselmans J J A 2010 Appl. Phys. Lett. 97 023508
Google Scholar
[139] Leduc H G, Bumble B, Day P K, Eom B H, Gao J, Golwala S, Mazin B A, McHugh S, Merrill A, Moore D C, Noroozian O, Turner A D, Zmuidzinas J 2010 Appl. Phys. Lett. 97 102509
Google Scholar
[140] Foxen B, Mutus J Y, Lucero E, et al. 2018 Quantum Sci. Technol. 3 014005
Google Scholar
[141] Levenson-Falk E M, Vijay R, Siddiqi I 2011 Appl. Phys. Lett. 98 123115
Google Scholar
[142] Castellanos-Beltran M A, Irwin K D, Hilton G C, Vale L R, Lehnert K W 2008 Nat. Phys. 4 929
Google Scholar
[143] Siddiqi I, Vijay R, Pierre F, Wilson C M, Metcalfe M, Rigetti C, Frunzio L, Devoret M H 2004 Phys. Rev. Lett. 93 207002
Google Scholar
[144] Reed M D, DiCarlo L, Johnson B R, Sun L, Schuster D I, Frunzio L, Schoelkopf R J 2010 Phys. Rev. Lett. 105 173601
Google Scholar
[145] Huang K Q, Guo Q J, Song C, Zheng Y R, Deng H, Wu Y L, Jin Y R, Zhu X B, Zheng D N 2017 Chin. Phys. B 26 094203
Google Scholar
[146] Yang R, DengH 2020 IEEE Trans. APP. Supercon. 30 4
Google Scholar
[147] Roy T, Kundu S, Chand M, Vadiraj A M, Ranadive A, Nehra N, Patankar M P, Aumentado J, Clerk A A, Vijaz R 2015 Appl. Phy. Lett. 107 262601
Google Scholar
[148] Xue H, Lin Z R, Jiang W B, Niu Z Q, Liu K, Peng W, Wang Z 2021 Chin. Phys. B 30 068503
Google Scholar
[149] Lu Y P, Zuo Q, Pan J Z, Jiang J L, Wei X Y, Li Z S, Xu W Q, Zhang K X, Guo T T, Wang S, Cao C H, Xu W W, Sun G Z, Wu P H 2021 Chin. Phys. B 30 068504
Google Scholar
[150] Eom B H, Day P K, LeDay H G, Zmuidzinas J 2012 Nat. Phy. 8 623
Google Scholar
[151] White T C, Mutus J Y, Kelly J, Sank D, Martinis J M 2015 Appl. Phy. Lett. 106 242601
Google Scholar
[152] Macklin C, O’Brien, Hover D, Schwartz M E, Bolkhovsky V, Zhang X, Oliver W D, Siddiqi I 2015 Science 350 307
Google Scholar
[153] Harrow A W, Montanaro A 2017 Nature 549 203
Google Scholar
[154] Kelly J, Barends R, Fowler A G, et al. 2015 Nature 519 66
Google Scholar
[155] Xu H K, Song C, Liu W Y, Xue G M, Su F F, Deng H, Tian Y, Zheng D N, Han S Y, Zhong Y P, Wang H, Liu Y X, Zhao S P 2016 Nat. Comm. 7 11018
Google Scholar
[156] Wu Y L, Bao W S, Cao S R, Chen F S, Chen M C, Pan J W, et al. arXiv: 2106.14734 v1 [quant-ph]
Catalog
Metrics
- Abstract views: 6107
- PDF Downloads: 275
- Cited By: 0