-
Metasurface lenses are miniature flat lenses that achieve precise control of the phase, amplitude, and polarization of incident light by modulating the parameters of each unit on the substrate. Compared with conventional optical lenses, they have the advantages of small size, light weight, and high integration, and are the core components of photonic chips. Currently, the hot topics for metasurface lens are broadband and achromatic devices, and there is still little attention paid to the resolution improvement. To break through the diffraction limit and further improve the focusing performance and imaging resolution of metasurface lenses, we use unit cells to perform multi-dimensional modulation of the incident light field. Specifically, in this paper, we combine phase modulation of metasurface lens with a pupil filtering for the first time, which has been widely applied in traditional microscopy imaging and adaptive optics, and has demonstrated powerful resolution enhancement effects. The fusion of these two technologies will continue to improve the imaging performance of metasurface lenses and expand their application fields.
In this article, we firstly design a single-cell super-surface lens composed of a Silicon nanofin array and a silica substrate as a benchmark for comparing the performance of fused super-surface lens. The lens achieves an ideal focal spot for incident light at 633 nm, resulting in a FWHM of 376.0 nm. Then, a three-zone phase modulating pupil filter was proposed and designed with the same aperture of metasurface lens, which has a phase jump of 0-π-0 from inside to outside of the aperture. From the simulation results, the main lobe size of the focal spot has been compressed obviously. In the optimization, its structural parameters were scanned for the best performance, and the optimal set of structural parameters was selected and applied in the fusion metasurface lens. Finally, the fused metasurface lens was designed by combining the metasurface lens with the three-zone phase modulating pupil filter, and the FWHM of its focal spot was compressed to 323.4 nm (≈0.51λ), which is not only 15% smaller than original metasurface lens’s FWHM of 376.0 nm, but also much smaller than the diffraction limit of 0.61λ/NA (when NA=0.9, it is approximately 429.0 nm). This result preliminarily demonstrates the super-resolution performance of the fused super-surface lens. With the comprehensive regulation of multi-dimensional information, such as amplitude, polarization, and vortex, the fused super-surface optical lens will achieve more excellent super-resolution focusing and imaging performance, and will also be widely used in the fields of super-resolution imaging, virtual reality, and 3-D optical display, due to its characteristics of high resolution, high integration, and high miniaturization.-
Keywords:
- Meta-lens /
- pupil filter /
- super-resolution imaging
-
[1] Feng M D，, Wang J F，, Ma H，, Mo W D，, Ye H J，, Qu S B 2013 J. Appl. Phys. 114(7) 074508
[2] Lin D M, Fan P Y, Hasman E, Brongersma M L 2014 Science 345(6194) 298-302
[3] West P R, Stewart J L, Kildishev A V, Shalaev V M, Shkunov V V, Strohkendl F, Zakharenkov Y A, Dodds R K, Byren R 2014 Optics Express 22(21) 26212-26221
[4] Li S H, Li J S 2019 Aip Advances 9(3) 035146
[5] Marlek SC，Ee HS，Agarwal R 2017 Nano Letters 17(6) 3641-3645
[6] Cai B，Wu L，Zhu X W，Cheng Z Z, Cheng Y Z 2024 Results in Physics 58 107509
[7] Li Y L，Xu J F，Liu, F H，Xu L Z，Fang B，Li, C X 2024 Physica Scripta 99(7) 075536
[8] M Khorasaninejad, F Capasso 2017 Science. 358 6367
[9] Hu T, Xia R, Wang S C，Yang Z Y，Zhao M，2024 Journal of Physics D: Applied Physics. 57(35) 355103
[10] Xu P，Li X C, Xiao Yu F，Yang T, Zhang X L，Huang H X，Wang M Y，Yuan X，Xu H D 2023 Acta Phys. Sin. 72(1) 014208 [徐平, 李雄超, 肖钰斐, 杨拓, 张旭琳, 黄海漩, 王梦禹, 袁霞, 徐海东 2023 物理学报 72(1) 014208]
[11] Zhang Q S, Guo D, Shen C S, Chen Z F, Bai N F 2024 Physica Scripta 99(1) 015516
[12] GTD Francia. Super-gain antennas and optical resolving power[J]. Nuovo Cimento. Suppl., 1952,9 426-438
[13] Luo Z Y, Stephen M. Kuebler 2014 Optics Communications. 315 176
[14] S. Chakraborty，S.C. Bera;，A.K. Chakraborty Optik - International Journal for Light and Electron Optics 122(6) 549
[15] (in Chinese) [王吉明，赫崇军，刘友文，杨凤，田威，吴彤 2016 物理学报 65(4) 044202
Wang J M，He C J，Liu Y W，Yang F，Tian Wei，Wu T 2016 Acta Phys. Sin. 65(4) 044202
[16] Liu S，Qi S X，Li Y K，Wei B Y，Li P，Zhao L 2023 Light: Science & Applications 11(1) 219
[17] Ding H P, Li Q H, Zou W Y 2004 Acta Optica Sinica 24(9) 1177 (in Chinese) [丁洪萍, 李庆辉, 邹文艺 2004 光学学报 24(9) 1177]
[18] Toshiyuki HORIUCHI，Katsuhiro HARADA，Seitaro MTSUO 2019 Denki Kagaku oyobi Kogyo Butsuri Kagaku 63(6) 536
[19] Zhao L N 2018 Ph. D. Dissertation (Chengdu: University of Electronic Science and Technology of China) (in Chinese) [赵丽娜 2018 博士学位论文 (成都：电子科技大学) ]
[20] Liu T 2013 Ph. D. Dissertation (Harbin: Harbin Institute of Technology) (in Chinese) [刘涛 2013 博士学位论文 (哈尔滨: 哈尔滨工业大学) ]
[21] Chen J L，Mo D F，Jiang M D，Zhu H Y 2024 Chinese Journal of Lasers 51(13) 1310001 (in Chinese) [陈俊林, 莫德锋, 蒋梦蝶, 朱海勇等 2024 中国激光 51(13) 1310001]
Metrics
- Abstract views: 171
- PDF Downloads: 10
- Cited By: 0
下载:
