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基于室温原子的超外差太赫兹电场探测，场强灵敏度可达5.76 μV cm-1Hz-1/2，线性动态范围优于60 dB。原子超外差太赫兹探测具有极高的灵敏度，可用于精确测量材料的透射率，实现对材料厚度的高精度测量。本文实验测量了蓝宝石晶体材料和聚四氟乙烯有机材料的厚度，而且由太赫兹透射信号可以清晰的分辨出单层石墨烯与少层石墨烯。甚至对于厚度达到1 μm的超导金属铌薄膜也可以探测到微弱的太赫兹透射信号，这都得益于原子超外差太赫兹探测器的高灵敏度。总之，本文采用的基于原子超外差探测太赫兹测厚技术，在有机材料缺陷检测、涂层材料测厚及二维材料参数测量等方面都具有重要的应用价值。Terahertz thickness measurement is of great important in materials research and industrial test. And it’s can be applied in materials measurement including wood, paper, ceramics, plastics, and composite materials. Atomic superheterodyne terahertz detector has extremely high sensitivity. The sensitivity of terahertz electric field strength measurement can reach 5.76 μV cm-1 Hz-1/2. Simultaneously, the linear dynamic range is better than 60 dB. So, it can be applied to realize precise thickness measurement of materials through the terahertz transmission efficiency. The experiments in this paper demonstrated the thickness measurement of sapphire crystal and organic materials PTFE. The terahertz signal is shown in Figure A1(a,b). The thickness can be calculated from the transmittance, which is consistent with the result measured directly with a vernier caliper. Furthermore, single-layer graphene and few-layer graphene can be clearly distinguished from terahertz transmission signals, as shown in Figure A1(c). Even for niobium meta thin films with thickness 1 μm, very weak terahertz signal can be well distinguished due to the high sensitivity of atomic superheterodyne terahertz detector. In summary, the technology developed for terahertz thickness measurement based on atomic superheterodyne detection is very important for defect detection, coating check, and parameter measurement of materials.
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