搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

沉积态铀薄膜表面氧化的X射线光电子能谱

杨蒙生 易泰民 郑凤成 唐永建 张林 杜凯 李宁 赵利平 柯博 邢丕峰

杨蒙生, 易泰民, 郑凤成, 唐永建, 张林, 杜凯, 李宁, 赵利平, 柯博, 邢丕峰. 沉积态铀薄膜表面氧化的X射线光电子能谱. 物理学报, 2018, 67(2): 027301. doi: 10.7498/aps.67.20172055
引用本文: 杨蒙生, 易泰民, 郑凤成, 唐永建, 张林, 杜凯, 李宁, 赵利平, 柯博, 邢丕峰. 沉积态铀薄膜表面氧化的X射线光电子能谱. 物理学报, 2018, 67(2): 027301. doi: 10.7498/aps.67.20172055
Yang Meng-Sheng, Yi Tai-Min, Zheng Feng-Cheng, Tang Yong-Jian, Zhang Lin, Du Kai, Li Ning, Zhao Li-Ping, Ke Bo, Xing Pi-Feng. Surface oxidation of as-deposit uranium film characterized by X-ray photoelectron spectroscopy. Acta Phys. Sin., 2018, 67(2): 027301. doi: 10.7498/aps.67.20172055
Citation: Yang Meng-Sheng, Yi Tai-Min, Zheng Feng-Cheng, Tang Yong-Jian, Zhang Lin, Du Kai, Li Ning, Zhao Li-Ping, Ke Bo, Xing Pi-Feng. Surface oxidation of as-deposit uranium film characterized by X-ray photoelectron spectroscopy. Acta Phys. Sin., 2018, 67(2): 027301. doi: 10.7498/aps.67.20172055

沉积态铀薄膜表面氧化的X射线光电子能谱

杨蒙生, 易泰民, 郑凤成, 唐永建, 张林, 杜凯, 李宁, 赵利平, 柯博, 邢丕峰

Surface oxidation of as-deposit uranium film characterized by X-ray photoelectron spectroscopy

Yang Meng-Sheng, Yi Tai-Min, Zheng Feng-Cheng, Tang Yong-Jian, Zhang Lin, Du Kai, Li Ning, Zhao Li-Ping, Ke Bo, Xing Pi-Feng
PDF
导出引用
  • 含铀(U)薄膜在激光惯性约束聚变的实验研究中有重要的用途.研究其在不同气氛下的氧化性能可以为微靶制备、储存及物理实验提供关键的实验数据.通过超高真空磁控溅射技术制备了纯U薄膜及金-铀(Au-U)复合平面膜,将其在大气、高纯氩(Ar)气及超高真空度环境中暴露一段时间后,利用X射线光电子能谱仪结合Ar+束深度剖析技术考察U层中氧(O)元素分布及价态,分析氧化产物及机理.结果显示,初始状态的U薄膜中未检测到O的存在.Au-U复合薄膜中的微观缺陷减弱了Au防护层的屏蔽效果,使其在3周左右时间内严重氧化,产物为U表面致密的氧化膜及缺陷周围的点状腐蚀物,主要成分均为二氧化铀(UO2).在高纯Ar气中纯U薄膜仅暴露6 h后表面即被严重氧化,生成厚度不均匀的UO2.在超高真空度环境下保存12 h后,纯U薄膜表面也发生明显氧化,生成厚度不足1 nm的UO2.Ar+束对铀氧化物的刻蚀会因择优溅射效应而使UO2被还原成非化学计量的UO2-x,但这种效应受O含量的影响.
    Uranium film is a main functional component to realize the high efficiency conversion of laser to X-ray in the study on laser inertial confinement fusion. It also has important applications in relevant physics experiments. Due to its active chemical properties, the metal uranium film is extremely difficult to preserve in the atmosphere. A variety of methods may help to avoid the oxidation of uranium film, such as coating protective layer, vacuum or inert atmosphere protection. But under these conditions, the oxidation property of uranium film still needs experimental investigation. In this paper, the oxidation processes of uranium films under different atmospheres are studied by X-ray photoelectron spectroscopy (XPS) and depth profiling. Firstly, uranium films and gold-uranium multilayer films are prepared by ultra-high vacuum magnetron sputtering deposition, and then they are exposed to atmosphere, high purity argon and ultrahigh vacuum for a period of time. Finally, the distributions and valence states of oxygen and uranium elements are investigated by XPS depth profiling. The oxidation mechanism is analyzed according to the oxidation products and the microstructure characteristics of samples. The results show that the oxygen element is undetectable in the initial films. In the Au-U multilayer film, the protective ability of Au layer is greatly weakened by the micro-defects. The defect is not only the micro channel of oxygen entering into the sample directly, but also the origin of the interlaminar cracks at the Au/U interface. In about three weeks, the uranium layer is severely oxidized and large area lamination occurs. The oxidation products consist of a dense oxide thin film on uranium surface and corrosion pitting around the defects, which are mainly UO2. For the pure uranium film, the surface of the film is completely oxidized when it is exposed to high purity argon only for 6 h. The UO2 layers with different thickness values are formed on their surface, which is due to the rapid diffusion of oxygen atoms at the columnar grain boundaries of the film. After the sample is exposed to the ultra-high vacuum for 12 h, UO2 layer with a thickness of less than 1 nm is generated on the surface of the pure uranium film. In the etching of oxide by argon ion beams, the preferential sputtering effect of O is produced, and UO2 is reduced into non-stoichiometric UO2-x. The effect of preferential sputtering is weakened with the decrease of oxide content. When the oxide content is less than 10%, the reduction of UO2 can hardly be detected.
      PACS:
      73.21.Ac(Multilayers)
      73.61.At(Metal and metallic alloys)
      81.40.Np(Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure)
      81.65.-b(Surface treatments)
      通信作者: 邢丕峰, fascist000@aliyun.com
    • 基金项目: 国家自然科学基金(批准号:51702303)资助的课题.
      Corresponding author: Xing Pi-Feng, fascist000@aliyun.com
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 51702303).
    [1]

    Orzechowski T J, Rosen M D, Kornblum H N, Porter J L, Suter L J, Thiessen A R, Wallace R J 1996 Phys. Rev. Lett. 77 3545

    [2]

    Jones O S, Schein J, Rosen M D, Suter L J, Wallace R J, Dewald E L, Glenzer S H, Campbell K M, Gunther J, Hammel B A, Landen O L, Sorce C M, Olson R E, Rochau G A, Wilkens H L, Kaae J L, Kilkenny J D, Nikroo A, Regan S P 2007 Phys. Plasmas 14 056311

    [3]

    Winer K, Colmenares C A, Smith R L 1986 Surf. Sci. 177 484

    [4]

    Younes C M, Allen G C, Embong Z 2007 Surf. Sci. 601 3207

    [5]

    Shamir N, Tiferet E, Zalkind S, Mintz M H 2006 Surf. Sci. 600 657

    [6]

    McLean W, Colmenares C A, Smith R L, Somorjai G A 1982 Phys. Rev. B 25 8

    [7]

    Ritchie A G 1984 J. Nucl. Mater. 120 143

    [8]

    Wang X L, Fu Y B, Xie R S 1999 At. Energ. Sci. Technol. 33 1 (in Chinese)[汪小琳, 傅依备, 谢仁寿 1999 原子能科学技术 33 1]

    [9]

    Lu L, Bai B, Zou J S, Tang S H. Xiao H 2003 Mater. Mach. Eng. 29 16 (in Chinese)[陆雷, 白彬, 邹觉生, 唐世红, 肖红 2003 机械工程材料 29 16]

    [10]

    Hein N A, Wilkens H L, Nikroo A, Chen H B, Streckert H H, Quan K, Wall J R, Fuller T A, Jackson M R, Giraldez E M, Price S J, Sohn R J, Stadermann M 2013 Fusion Sci. Technol. 63 218

    [11]

    Geng H Y, Song H X, Wu Q 2012 Phys. Rev. B 85 1279

    [12]

    Gouder T, Colmenares C A, Naegele J R 1995 Surf. Sci. 342 299

    [13]

    Yi T M, Xing P F, Du K, Zheng F C, Yang M S, Xie J, Li C Y 2012 Acta Phys. Sin. 61 088103 (in Chinese)[易泰民, 邢丕峰, 杜凯, 郑凤成, 杨蒙生, 谢军, 李朝阳 2012 物理学报 61 088103]

    [14]

    Mirkarimi P B, Stearns D G 2000 Appl. Phys. Lett. 77 2243

    [15]

    Shan Y G, He H B, Wei C Y, Li S H, Zhou M, Li D W, Zhao Y A 2010 Appl. Opt. 49 4290

    [16]

    Dillard J G, Moera H, Klewe-Nebenius H, Kirch G, Pfennig G, Ache H J 1984 Surf. Sci. 145 62

    [17]

    Winer K, Colmenares C A, Smith R L, Wooten F 1987 Surf. Sci. 183 67

    [18]

    Shan Y G, Liu X F, He H B, Fan Z X 2011 High Power Laser and Particle Beams 23 1421 (in Chinese)[单永光, 刘晓凤, 贺洪波, 范正修 2011 强激光与粒子束 23 1421]

    [19]

    Idriss H 2010 Surf. Sci. Rep. 65 67

    [20]

    Chong S V, Griffiths T R, Idriss H 2000 Surf. Sci. 444 187

    [21]

    Hedhili M N, Yakshinskiy B V, Madey T E 2000 Surf. Sci. 445 512

    [22]

    Allen G C, Tucker P M, Tyler J W 1982 J. Phys. Chem. 86 224

    [23]

    Chary K V R, Seela K K, Sagar G V, Sreedhar B 2004 J. Phys. Chem. B 108 658

    [24]

    Jesus J C, Pereira P, Carrazza J, Zaera F 1996 Surf. Sci. 369 217

    [25]

    Krishna M G, Debauge Y, Bhattacharya A K 1998 Thin Solid Films 312 116

    期刊类型引用(2)

    1. 高健,吴伟,沙雨燕,钟祥,史志新. 钒渣焙烧过程钒元素价态变化特征探讨. 湿法冶金. 2024(02): 147-152 . 百度学术
    2. 柳钰,徐忠锋,王兴,胡鹏飞,张小安. 光子碰撞Au靶产生L系特征X射线角分布. 物理学报. 2020(12): 237-242 . 百度学术

    其他类型引用(0)

  • [1]

    Orzechowski T J, Rosen M D, Kornblum H N, Porter J L, Suter L J, Thiessen A R, Wallace R J 1996 Phys. Rev. Lett. 77 3545

    [2]

    Jones O S, Schein J, Rosen M D, Suter L J, Wallace R J, Dewald E L, Glenzer S H, Campbell K M, Gunther J, Hammel B A, Landen O L, Sorce C M, Olson R E, Rochau G A, Wilkens H L, Kaae J L, Kilkenny J D, Nikroo A, Regan S P 2007 Phys. Plasmas 14 056311

    [3]

    Winer K, Colmenares C A, Smith R L 1986 Surf. Sci. 177 484

    [4]

    Younes C M, Allen G C, Embong Z 2007 Surf. Sci. 601 3207

    [5]

    Shamir N, Tiferet E, Zalkind S, Mintz M H 2006 Surf. Sci. 600 657

    [6]

    McLean W, Colmenares C A, Smith R L, Somorjai G A 1982 Phys. Rev. B 25 8

    [7]

    Ritchie A G 1984 J. Nucl. Mater. 120 143

    [8]

    Wang X L, Fu Y B, Xie R S 1999 At. Energ. Sci. Technol. 33 1 (in Chinese)[汪小琳, 傅依备, 谢仁寿 1999 原子能科学技术 33 1]

    [9]

    Lu L, Bai B, Zou J S, Tang S H. Xiao H 2003 Mater. Mach. Eng. 29 16 (in Chinese)[陆雷, 白彬, 邹觉生, 唐世红, 肖红 2003 机械工程材料 29 16]

    [10]

    Hein N A, Wilkens H L, Nikroo A, Chen H B, Streckert H H, Quan K, Wall J R, Fuller T A, Jackson M R, Giraldez E M, Price S J, Sohn R J, Stadermann M 2013 Fusion Sci. Technol. 63 218

    [11]

    Geng H Y, Song H X, Wu Q 2012 Phys. Rev. B 85 1279

    [12]

    Gouder T, Colmenares C A, Naegele J R 1995 Surf. Sci. 342 299

    [13]

    Yi T M, Xing P F, Du K, Zheng F C, Yang M S, Xie J, Li C Y 2012 Acta Phys. Sin. 61 088103 (in Chinese)[易泰民, 邢丕峰, 杜凯, 郑凤成, 杨蒙生, 谢军, 李朝阳 2012 物理学报 61 088103]

    [14]

    Mirkarimi P B, Stearns D G 2000 Appl. Phys. Lett. 77 2243

    [15]

    Shan Y G, He H B, Wei C Y, Li S H, Zhou M, Li D W, Zhao Y A 2010 Appl. Opt. 49 4290

    [16]

    Dillard J G, Moera H, Klewe-Nebenius H, Kirch G, Pfennig G, Ache H J 1984 Surf. Sci. 145 62

    [17]

    Winer K, Colmenares C A, Smith R L, Wooten F 1987 Surf. Sci. 183 67

    [18]

    Shan Y G, Liu X F, He H B, Fan Z X 2011 High Power Laser and Particle Beams 23 1421 (in Chinese)[单永光, 刘晓凤, 贺洪波, 范正修 2011 强激光与粒子束 23 1421]

    [19]

    Idriss H 2010 Surf. Sci. Rep. 65 67

    [20]

    Chong S V, Griffiths T R, Idriss H 2000 Surf. Sci. 444 187

    [21]

    Hedhili M N, Yakshinskiy B V, Madey T E 2000 Surf. Sci. 445 512

    [22]

    Allen G C, Tucker P M, Tyler J W 1982 J. Phys. Chem. 86 224

    [23]

    Chary K V R, Seela K K, Sagar G V, Sreedhar B 2004 J. Phys. Chem. B 108 658

    [24]

    Jesus J C, Pereira P, Carrazza J, Zaera F 1996 Surf. Sci. 369 217

    [25]

    Krishna M G, Debauge Y, Bhattacharya A K 1998 Thin Solid Films 312 116

  • [1] 朱孟龙, 杨俊, 董玉兰, 周源, 邵岩, 侯海良, 陈智慧, 何军. Cu(111)衬底上单层铁电GeS薄膜的原子和电子结构研究. 物理学报, 2024, 73(1): 010701. doi: 10.7498/aps.73.20231246
    [2] 许思维, 王训四, 沈祥. 结合高分辨率X射线光电子能谱和拉曼散射研究GexGa8S92–x玻璃结构. 物理学报, 2023, 72(1): 017101. doi: 10.7498/aps.72.20221653
    [3] 李明阳, 张雷敏, 吕沙沙, 李正操. 离子辐照和氧化对IG-110核级石墨中的点缺陷的影响. 物理学报, 2019, 68(12): 128102. doi: 10.7498/aps.68.20190371
    [4] 陈隆, 陈成克, 李晓, 胡晓君. 氧化对单颗粒层纳米金刚石薄膜硅空位发光和微结构的影响. 物理学报, 2019, 68(16): 168101. doi: 10.7498/aps.68.20190422
    [5] 许思维, 王丽, 沈祥. GexSb20Se80-x玻璃的拉曼光谱和X射线光电子能谱. 物理学报, 2015, 64(22): 223302. doi: 10.7498/aps.64.223302
    [6] 李晓娜, 郑月红, 李震, 王苗, 张坤, 董闯. 基于团簇模型设计的Cu-Cu12-[Mx/(12+x)Ni12/(12+x)]5 (M=Si, Cr, Cr+Fe) 合金抗高温氧化研究. 物理学报, 2014, 63(2): 028102. doi: 10.7498/aps.63.028102
    [7] 张锐, 张代贤, 张帆, 何振, 吴建军. 脉冲等离子体推力器羽流沉积薄膜的结构与光学性质研究. 物理学报, 2013, 62(2): 025207. doi: 10.7498/aps.62.025207
    [8] 韩亮, 邵鸿翔, 何亮, 陈仙, 赵玉清. 氮离子轰击能量对ta-C:N薄膜结构的影响. 物理学报, 2012, 61(10): 106803. doi: 10.7498/aps.61.106803
    [9] 胡美娇, 李成, 徐剑芳, 赖虹凯, 陈松岩. 循环氧化/退火制备GeOI薄膜材料及其性质研究. 物理学报, 2011, 60(7): 078102. doi: 10.7498/aps.60.078102
    [10] 张旺, 徐法强, 王国栋, 张文华, 李宗木, 王立武, 陈铁锌. Fe/ZnO (0001)体系界面相互作用中薄膜厚度效应的光电子能谱研究. 物理学报, 2011, 60(1): 017104. doi: 10.7498/aps.60.017104
    [11] 韩录会, 张崇宏, 张丽卿, 杨义涛, 宋银, 孙友梅. 低速高电荷态重离子辐照的GaN晶体表面X射线光电子能谱研究. 物理学报, 2010, 59(7): 4584-4590. doi: 10.7498/aps.59.4584
    [12] 李永华, 刘常升, 孟繁玲, 王煜明, 郑伟涛. NiTi合金薄膜厚度对相变温度影响的X射线光电子能谱分析. 物理学报, 2009, 58(4): 2742-2745. doi: 10.7498/aps.58.2742
    [13] 何丽静, 林晓娉, 王铁宝, 刘春阳. 单晶Si表面离子束溅射沉积Co纳米薄膜的研究. 物理学报, 2007, 56(12): 7158-7164. doi: 10.7498/aps.56.7158
    [14] 张 辉, 刘应书, 刘文海, 王宝义, 魏 龙. 基片温度与氧分压对磁控溅射制备氧化钒薄膜的影响. 物理学报, 2007, 56(12): 7255-7261. doi: 10.7498/aps.56.7255
    [15] 谢自力, 张 荣, 修向前, 刘 斌, 朱顺明, 赵 红, 濮 林, 韩 平, 江若琏, 施 毅, 郑有炓. InN薄膜的氧化特性研究. 物理学报, 2007, 56(2): 1032-1035. doi: 10.7498/aps.56.1032
    [16] 王晓雄, 李宏年. Sm富勒烯的芯态光电子能谱. 物理学报, 2006, 55(8): 4259-4264. doi: 10.7498/aps.55.4259
    [17] 欧谷平, 宋 珍, 桂文明, 张福甲. 原子力显微镜与x射线光电子能谱对LiBq4/ITO和LiBq4/CuPc/ITO的表面分析. 物理学报, 2005, 54(12): 5717-5722. doi: 10.7498/aps.54.5717
    [18] 冯玉清, 赵 昆, 朱 涛, 詹文山. 磁性隧道结热稳定性的x射线光电子能谱研究. 物理学报, 2005, 54(11): 5372-5376. doi: 10.7498/aps.54.5372
    [19] 李刘合, 张海泉, 崔旭明, 张彦华, 夏立芳, 马欣新, 孙跃. X射线光电子能谱辅助Raman光谱分析类金刚石碳膜的结构细节. 物理学报, 2001, 50(8): 1549-1554. doi: 10.7498/aps.50.1549
    [20] 苑进社, 陈光德, 齐鸣, 李爱珍, 徐卓. 分子束外延GaN薄膜的X射线光电子能谱和俄歇电子能谱研究. 物理学报, 2001, 50(12): 2429-2433. doi: 10.7498/aps.50.2429
  • 期刊类型引用(2)

    1. 高健,吴伟,沙雨燕,钟祥,史志新. 钒渣焙烧过程钒元素价态变化特征探讨. 湿法冶金. 2024(02): 147-152 . 百度学术
    2. 柳钰,徐忠锋,王兴,胡鹏飞,张小安. 光子碰撞Au靶产生L系特征X射线角分布. 物理学报. 2020(12): 237-242 . 百度学术

    其他类型引用(0)

计量
  • 文章访问数:  6533
  • PDF下载量:  169
  • 被引次数: 2
出版历程
  • 收稿日期:  2017-09-17
  • 修回日期:  2017-10-15
  • 刊出日期:  2019-01-20

/

返回文章
返回