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Structural characteristics of HfO2 films grown by e-beam evaporation

Yan Zhi-Jun Wang Yin-Yue Xu Run Jiang Zui-Min

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Structural characteristics of HfO2 films grown by e-beam evaporation

Yan Zhi-Jun, Wang Yin-Yue, Xu Run, Jiang Zui-Min
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  • Abstract views:  8558
  • PDF Downloads:  1518
  • Cited By: 0
Publishing process
  • Received Date:  15 August 2003
  • Accepted Date:  09 December 2003
  • Published Online:  05 April 2004

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