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Control of grain size during low-temperature growth of polycrystalline silicon films

Huang Rui Lin Xuan-Ying Yu Yun-Peng Lin Kui-Xun Yao Ruo-He Huang Wen-Yong Wei Jun-Hong Wang Zhao-Kui Yu Chu-Ying

Citation:

Control of grain size during low-temperature growth of polycrystalline silicon films

Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Yao Ruo-He, Huang Wen-Yong, Wei Jun-Hong, Wang Zhao-Kui, Yu Chu-Ying
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  • Abstract views:  8354
  • PDF Downloads:  1249
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Publishing process
  • Received Date:  15 January 2004
  • Accepted Date:  23 March 2004
  • Published Online:  16 November 2004

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