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The light-stability of polycrystalline silicon films deposited at low temperatures from SiCl4/H2 mixture

Zhu Zu-Song Lin Xuan-Ying Yu Yun-Peng Lin Kui-Xun Qiu Gui-Ming Huang Rui Yu Chu-Ying

Citation:

The light-stability of polycrystalline silicon films deposited at low temperatures from SiCl4/H2 mixture

Zhu Zu-Song, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Qiu Gui-Ming, Huang Rui, Yu Chu-Ying
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  • Abstract views:  7395
  • PDF Downloads:  903
  • Cited By: 0
Publishing process
  • Received Date:  03 December 2004
  • Accepted Date:  03 March 2005
  • Published Online:  05 April 2005

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