Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma

Yuan Qiang-Hua Xin Yu Huang Xiao-Jiang Sun Kai Ning Zhao-Yuan

Citation:

Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma

Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  7682
  • PDF Downloads:  985
  • Cited By: 0
Publishing process
  • Received Date:  27 February 2008
  • Accepted Date:  11 April 2008
  • Published Online:  20 November 2008

/

返回文章
返回