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中国物理学会期刊
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Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian. Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2012, 61(1): 015204. DOI: 10.7498/aps.61.015204
Citation: Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian. Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2012, 61(1): 015204. DOI: 10.7498/aps.61.015204
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Radial density uniformity of dual frequency capacitively coupled plasma

Acta Phys. Sin., 2012, 61(1): 015204.
DOI: 10.7498/aps.61.015204
CSTR: 32037.14.aps.61.015204
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