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氢等离子体由于其独特的物理和化学特性，是反应室清洗时的首选气体．为了更好地理解氢等离子体中的输运和扩散机理，本文通过COMSOL仿真软件构建了二维流体模型，系统地研究了在不同放电参数和几何参数下射频感应耦合远端氢等离子体源的特性．结果发现，输入功率的影响主要体现在电子密度上而非电子温度．这种现象可能是由于稳态放电中电离速率和损失速率之间的平衡机制造成的．气压对驱动区和空间后辉光区中的等离子体有着相反的影响。随着气压的升高，驱动区电子密度逐渐增加，但空间后辉光区电子密度逐渐减小。这是可能是由于随着气压的逐渐增加，非局域电子动理学向局域转变导致的．增加输入功率可以有效提高氢自由基密度和扩散通量，这表明高功率有利于氢自由基向空间后辉光区的输运．提高工作气压也可以产生相同的效果，但会降低空间后辉光区氢自由基密度．此外，在固定放电参数下，适当增加几何参数有利于在后辉光区产生较高密度且较为均匀的氢自由基．Due to its unique physical and chemical properties, hydrogen plasma is the preferred gas for cleaning reaction chambers. For better understanding of the transport and diffusion mechanism in hydrogen plasma, this paper presents a two-dimensional fluid model by COMSOL simulation software, and systematically investigates the characteristics of radio-frequency inductively coupled remote hydrogen plasma sources under varying discharge and geometric parameters. The results show that input power primarily affects electron density rather than electron temperature. This phenomenon may be due to the balancing mechanism between the ionisation rate and the loss rate in steady state discharges. The pressure has the opposite effect on the plasma in the driven and spatial afterglow regions. As the pressure rises, the electron density in the driven region increases gradually, while the electron density in the spatial afterglow region decreases gradually. This may be due to the shift from non-local to local electron kinetics as the pressure rises. Increasing input power effectively enhances hydrogen radical density and diffusion flux, suggesting that high power facilitates the transport of hydrogen radicals into the spatial afterglow region. However, elevating operating pressure has a similar effect while reducing hydrogen radical density in the spatial afterglow region. Furthermore, under fixed discharge conditions, increasing geometric parameters appropriately promotes the generation of higher and more uniform hydrogen radical densities within the afterglow region.
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