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受制于感应耦合等离子体(ICP)发生器内极高温度、有限空间以及电磁场与化学反应的复杂耦合, 实验方法在揭示发生器内电磁场与流场的相互作用及放电特性方面存在较大局限, 数值模拟因而成为研究该类问题的重要手段. 本研究以氩气ICP为研究对象, 利用COMSOL在平衡态(LTE)与非平衡态(NLTE)假设下建立二维模型, 比较两者在温度场与能量耦合特性上的差异. 结果表明, 在千帕级压力下, LTE下温度峰值约8200 K, 高温区范围更大且集中于线圈区域. 而NLTE最高温度仅约5990 K, 且分布偏移至下游; 同时, 轴心区域以基态氩为主, 线圈附近激发态与离子分数升高, 表明能量沉积与粒子转化主要集中在趋肤层. 进一步分析不同压力下中心线分布发现, 随压力降低, 电子与气体温度差值增大, 体系热非平衡特征显著增强. 研究揭示了千帕级压力下ICP放电过程中的电磁-热-流动耦合机制及其非平衡特征. 结果表明, 在千帕级压力模拟中, NLTE模型能更准确地捕捉能量耦合与温度分布的关键特征, 为高焓风洞等应用中的ICP数值模拟提供了模型选择依据.Inductively coupled plasma (ICP) generators involve complex interactions between electromagnetic, thermal, and chemical processes, which makes direct diagnostics difficult. To clarify these coupling mechanisms, a two-dimensional axisymmetric model of an argon ICP torch operating at kilopascal pressure is developed using COMSOL Multiphysics under local thermodynamic equilibrium (LTE) and non-equilibrium (NLTE) assumptions. A two-dimensional axisymmetric magnetohydrodynamic (MHD) model is established, which combines electromagnetic induction, convective-radiative heat transfer, and a seven-reaction argon plasma chemistry mechanism. The LTE model assumes that the temperature of all species is uniform, while the NLTE model independently solves for the electron temperature (Te) and gas temperature (Tg), thereby accounting for incomplete energy exchange between electrons and heavy particles. At a discharge power of 1000 W and a working pressure of 10 kPa, the LTE model predicts a peak temperature of approximately 8200 K, concentrated around the induction coils. In contrast, the NLTE model yields a maximum gas temperature of about 5990 K, with the hot zone shifted downstream. The NLTE model reveals a clear two-temperature structure: Te peaks near the coil wall (~0.93 eV), while Tg reaches its maximum downstream, indicating a pronounced thermal non-equilibrium state where electrons are preferentially heated by the induced field. The calculated skin depth (~11.3 mm) coincides with the region of strongest electromagnetic energy deposition. Species analysis shows that the plasma core is dominated by ground-state argon (Ar) (>99%), while excited argon (Ar*) and argon ions (Ar+) increase notably near the coil region, confirming that excitation and ionization processes are localized within the skin layer. Furthermore, comparison between the 5 kPa and 10 kPa cases shows that as pressure decreases, the difference between Te and Tg increases, indicating enhanced thermal non-equilibrium due to reduced collisional coupling. Overall, the results highlight that LTE and NLTE assumptions lead to markedly different predictions of temperature and energy coupling at kilopascal pressures. The NLTE model more realistically captures delayed energy transfer and spatial temperature decoupling, offering new insights into the electromagnetic-thermal-flow interactions of ICP discharges and providing a modeling reference for designing ICP-based high-enthalpy plasma wind tunnel and realizing related aerospace applications.
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图 1 感应耦合等离子体发生器结构示意图
Fig. 1. Schematic diagram of the structure of the inductively coupled plasma generator.
图 3 1000 W非平衡态与平衡态感应耦合等离子体放电温度云图 (a) 非平衡态; (b) 平衡态
Fig. 3. Temperature cloud diagram of 1000 W non-equilibrium and equilibrium inductively coupled plasma discharge: (a) Non-equilibrium state; (b) equilibrium state.
图 4 平衡模型和非平衡模型下中轴线上温度分布变化
Fig. 4. Variation of temperature distribution on the central axis under the equilibrium model and the unbalanced model.
图 5 氩气感应耦合等离子体放电过程的气体温度分布 (a) 2 ms; (b) 4 ms; (c) 6 ms; (d) 8 ms; (e) 9 ms; (f) 10 ms
Fig. 5. The gas temperature distribution in the argon gas induction coupled plasma discharge process: (a) 2 ms; (b) 4 ms; (c) 6 ms; (d) 8 ms; (e) 9 ms; (f) 10 ms.
图 6 放电初期(2 ms)1000 W放电管内磁场分布
Fig. 6. Magnetic field distribution in the 1000 W discharge tube at the initial stage of discharge (2 ms).
图 7 1000 W不同时刻中心轴线气体温度分布
Fig. 7. The gas temperature distribution along the central axis at different times of 1000 W.
图 8 稳态阶段1000 W放电管内分布云图 (a) 电子温度; (b) 气体温度
Fig. 8. Distribution cloud diagram of 1000 W discharge tube in the steady-state stage: (a) Electron temperature; (b) gas temperature.
图 9 稳态阶段1000 W放电管内气体速度分布云图
Fig. 9. Cloud diagram of gas velocity distribution in a 1000 W discharge tube during the steady-state stage.
图 10 稳态阶段1000 W放电管内中轴线上粒子摩尔分数分布
Fig. 10. The particle mole fraction distribution on the central axis of the 1000 W discharge tube during the steady-state stage.
图 11 稳态阶段1000 W放电管内z = 91.5 mm截线(线圈1, 2中间位置)粒子摩尔分数分布
Fig. 11. The particle mole fraction distribution of z = 91.5 mm cross-sectional wire (the middle position between coils 1 and 2) in the 1000 W discharge tube during the steady-state stage.
图 12 不同压力下中心线上气体温度和电子温度
Fig. 12. The gas temperature and electron temperature on the center line under different pressures.
表 1 氩气化学反应
Table 1. Argon chemical reaction.
反应 反应方程 反应类型 反应速率系数 Δε/eV 1 e+Ar→e+Ar 弹性碰撞 kel / 2 e+Ar→e+Ar* 激发 kex 11.56 3 e+Ar*→e+Ar 激发 ksc –11.56 4 e+Ar→2e+Ar+ 电离 ki 15.6 5 e+Ar*→2e+Ar+ 电离 ksi 4.14 6 Ar*+Ar*→
e+Ar+Ar+潘宁电离 kmp — 7 Ar+Ar*→Ar+Ar 亚稳猝灭 k2 p — 
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