Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF4 plasma source

LI Jingze ZHAO Mingliang ZHANG Yuru GAO Fei WANG Younian

Citation:

Three-dimensional multi-physics simulation of dual-frequency capacitively coupled Ar/CF4 plasma source

LI Jingze, ZHAO Mingliang, ZHANG Yuru, GAO Fei, WANG Younian
Article Text (iFLYTEK Translation)
PDF
Get Citation
Metrics
  • Abstract views:  87
  • PDF Downloads:  1
  • Cited By: 0
Publishing process
  • Available Online:  30 September 2025
  • /

    返回文章
    返回