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Thermal stability of structure and properties of CHx doped SiCOH low dielectric constant films

Du Jie Ye Chao Yu Xiao-Zhu Zhang Hai-Yan Ning Zhao-Yuan

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Thermal stability of structure and properties of CHx doped SiCOH low dielectric constant films

Du Jie, Ye Chao, Yu Xiao-Zhu, Zhang Hai-Yan, Ning Zhao-Yuan
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  • Abstract views:  8262
  • PDF Downloads:  935
  • Cited By: 0
Publishing process
  • Received Date:  07 January 2008
  • Accepted Date:  23 June 2008
  • Published Online:  20 January 2009

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