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In the recent years，more and more light-emitting diodes use indium tin oxide (ITO) as the current spreading layer. But if there is not any treatment, the electrical properties of light emitting diode are very poor. So to get excellent electrical properties of light emitting diode, annealing is an effective method to improve the electrical properties of light emitting diode using indium tin oxide as the current spreading layer. However, the annealing time and temperature can affect the electrical property of light emitting diode individually. In order to investigate this problem，we measured the series resistance and ideality factor of the light emitting diode got under different annealing time and annealing temperature. According to the model proposed by Jay M. Shah，we can inferred the characteristics of indium tin oxide and P-type GaN contact. The results showed that: the electrical properties of the light-emitting diode can reach an excellent value with increasing annealing temperature and time, and if continuing to increase in temperature or time, it can lead to a decline in light-emitting diode electrical properties. It is very helpful to optimize the annealing temperature and time and manufacture excellent electrical properties of devices.
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Keywords:
- ITO /
- annealed /
- ideality factors /
- series resistance
[1] Liu J B, Li P X, Hao Y 2005 Chinese Journal of Quantum Electronics22 673 (in Chinese) [刘坚斌, 李培咸, 郝跃 2005 量子电子学报 22 673]
[2] Wang S J, Chen S L, Uang K M, Lee W C, Chen T M, Chen C H,Liou B W 2006 Photonics Technology Letters 18 1146
[3] Margalith T, Buchinsky O, Cohen D A, Abare A C, Hansen M1999 Appl. Phys. lett. 74 3930
[4] Lo H M, Shei S C, Zeng X F, Chang S J, Lin H Y 2011 J. Electrochem.Soc. 158 506
[5] Kim D W, Sung Y J, Park J W, Yeom G Y 2011 Thin Solid Films398–399 87
[6] Shah J M, Li Y L, Gessmann T, Schubert E F 2003 J. Appl. Phys.94 2627
[7] Li J, Fan G H, Yang H, Yao G R2008 Chinese Journal of QuantumElectronics 25 615 (in Chinese) [李军, 范广涵, 杨昊,姚光锐 2008 量子电子学报 25 615]
[8] Schubert E F 2006 Light-Emitting Diode (2nd Ed.) (New York:Cambridge University Press) pp63–69
[9] Xue S, Han Y J, Luo Y 2006 Semiconductor Opt. Electronics 27164 (in Chinese) [薛松, 韩彦军, 罗毅 2006 半导体光电 27 164]
[10] Zhao D S, Zhang S M, Zhu J J, Zhao D G, Duan L H, Zhang B S,Yang H 2007 J. Semiconductors 28 545 (in Chinese) [赵德胜, 张书明,朱建军,赵德刚,段俐宏,张宝顺,杨辉 2007 半导体学报 28 545]
[11] Guo D B, Liang M, Fan M N, Shi H W, Liu Z Q, Wang G H,Wang L C 2007 Chinese Journal of Semiconductors 28 1811 (inChinese) [郭德博,梁萌, 范曼宁,师宏伟,刘志强,王国宏,王良臣 2007半导体学报 28 1811]
[12] Chang K M, Chu J Y, Cheng C C 2005 Solid-State Electronics 491381
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[1] Liu J B, Li P X, Hao Y 2005 Chinese Journal of Quantum Electronics22 673 (in Chinese) [刘坚斌, 李培咸, 郝跃 2005 量子电子学报 22 673]
[2] Wang S J, Chen S L, Uang K M, Lee W C, Chen T M, Chen C H,Liou B W 2006 Photonics Technology Letters 18 1146
[3] Margalith T, Buchinsky O, Cohen D A, Abare A C, Hansen M1999 Appl. Phys. lett. 74 3930
[4] Lo H M, Shei S C, Zeng X F, Chang S J, Lin H Y 2011 J. Electrochem.Soc. 158 506
[5] Kim D W, Sung Y J, Park J W, Yeom G Y 2011 Thin Solid Films398–399 87
[6] Shah J M, Li Y L, Gessmann T, Schubert E F 2003 J. Appl. Phys.94 2627
[7] Li J, Fan G H, Yang H, Yao G R2008 Chinese Journal of QuantumElectronics 25 615 (in Chinese) [李军, 范广涵, 杨昊,姚光锐 2008 量子电子学报 25 615]
[8] Schubert E F 2006 Light-Emitting Diode (2nd Ed.) (New York:Cambridge University Press) pp63–69
[9] Xue S, Han Y J, Luo Y 2006 Semiconductor Opt. Electronics 27164 (in Chinese) [薛松, 韩彦军, 罗毅 2006 半导体光电 27 164]
[10] Zhao D S, Zhang S M, Zhu J J, Zhao D G, Duan L H, Zhang B S,Yang H 2007 J. Semiconductors 28 545 (in Chinese) [赵德胜, 张书明,朱建军,赵德刚,段俐宏,张宝顺,杨辉 2007 半导体学报 28 545]
[11] Guo D B, Liang M, Fan M N, Shi H W, Liu Z Q, Wang G H,Wang L C 2007 Chinese Journal of Semiconductors 28 1811 (inChinese) [郭德博,梁萌, 范曼宁,师宏伟,刘志强,王国宏,王良臣 2007半导体学报 28 1811]
[12] Chang K M, Chu J Y, Cheng C C 2005 Solid-State Electronics 491381
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