具有大光电导增益的氧化镓薄膜基深紫外探测器阵列

刘增; 李磊; 支钰崧; 都灵; 方君鹏; 李山; 余建刚; 张茂林; 杨莉莉; 张少辉; 郭宇锋; 唐为华

doi:10.7498/aps.71.20220859

摘要

氧化镓在深紫外探测方面具有天然的材料优势, 鉴于探测器阵列在光学成像等领域有着十分重要的用途, 本文主要介绍了一个五叉指电极结构的4×4氧化镓基深紫外探测器阵列. 氧化镓薄膜由金属有机化学气相沉积技术生长得到, 器件的加工通过紫外光刻、剥离和离子束溅射技术完成. 由此得到的氧化镓薄膜结晶度高且表面均匀. 探测器具有优异的深紫外光响应特性, 光响应度可达2.65×10³ A/W, 探测度达2.76×10¹⁶ Jones, 同时还具有(1.29×10⁶)%的外量子效率, 光电导增益高达12900; 16个探测器单元的暗电流和光电流均具有良好的均匀性. 本文从光电性能和应用前景的角度说明了氧化镓深紫外探测器阵列的巨大应用潜力.

关键词:

Abstract

Gallium oxide (Ga₂O₃) has the natural advantages in deep ultraviolet absorbance for performing deep ultraviolet photodetection. Owing to the vital application of photodetector array in optical imaging, in this work, we introduce a 4×4 Ga₂O₃-based photodetector array with five-finger interdigital electrodes, in which the high-quality and uniform Ga₂O₃ thin film is grown by using metal-organic chemical vapor deposition technique, and the device is fabricated by using the following methods: ultraviolet photolithography, lift-off, and ion beam sputtering . The photodetector cell possesses a responsivity of 2.65×10³ A/W, a detectivity of 2.76×10¹⁶ Jones, an external quantum efficiency of (1.29×10⁶)%, and a photoconductive gain as high as 12900. The 16-cells in this array show good uniformity. In this work the great application potential of gallium oxide deep ultraviolet detector array is illustrated from the perspective of optoelectronic performance and application prospect.

Keywords:

作者及机构信息

1.
南京邮电大学集成电路科学与工程学院, 南京　210023

2.
南京邮电大学射频集成与微组装技术国家地方联合工程实验室, 南京　210023

3.
中国运载火箭技术研究院, 北京　100076

4.
金陵科技学院电子信息工程学院, 南京　211169

5.
清华大学集成电路学院, 北京　100084

6.
中北大学仪器与电子学院, 动态测试技术国家重点实验室, 太原　030051

7.
深圳大学物理与光电工程学院, 微纳光电子学研究院, 深圳　518060

通信作者: 刘增, zengliu@njupt.edu.cn ; 郭宇锋, yfguo@njupt.edu.cn ; 唐为华, whtang@njupt.edu.cn

基金项目: 南京邮电大学引进人才科研启动基金项目(自然科学)(批准号: XK1060921115, XK1060921002)、国家自然科学基金(批准号: 61774019)和山西省基础研究计划(批准号: 202103021223185)资助的课题.

Authors and contacts

1.
College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China

2.
National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing 210023, China

3.
China Academy of Launch Vehicle Technology, Beijing 100076, China

4.
School of Electronic and Information Engineering, Jinling Institute of Technology, Nanjing 211169, China

5.
School of Integrated Circuits, Tsinghua University, Beijing 100084, China

6.
State Key Laboratory of Dynamic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan 030051, China

7.
Institute of Microscale Optoelectronics, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

Corresponding author: Liu Zeng, zengliu@njupt.edu.cn ; Guo Yu-Feng, yfguo@njupt.edu.cn ; Tang Wei-Hua, whtang@njupt.edu.cn

Funds: Project supported by the Natural Science Research Start-up Foundation of Recruiting Talents of Nanjing University of Posts and Telecommunications (Grant Nos. XK1060921115, XK1060921002), the National Natural Science Foundation of China (Grant No. 61774019), and the Fundamental Research Program of Shanxi Province, China (Grant No. 202103021223185).

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参考文献

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施引文献

图 1 MOCVD生长的Ga₂O₃薄膜　(a) XRD图; (b) 表面SEM图; (c) 表面AFM图; (d) 紫外-可见光吸收光谱, 内插图为(αhv)²和hv的函数曲线

Fig. 1. The MOCVD-grown Ga₂O₃ thin film: (a) The XRD pattern; (b) surface SEM image; (c) AFM image; (d) UV-vis absorbance spectrum, The inset is the relationship of (αhv)² and hv.

下载: 全尺寸图片幻灯片

图 2 (a) 2 in薄膜上制备的6只Ga₂O₃探测器阵列的平面结构示意图; (b) 图(a)蓝色框内探测器阵列的结构示意图; (c) 图(b)中红色框局部放大图

Fig. 2. (a) The schematic diagrams of the six Ga₂O₃ photodetector arrays; (b) the enlarged portion of blue mark in figure (a); (c) the enlarged portion of red mark in Fig. (b).

下载: 全尺寸图片幻灯片

图 3 Ga₂O₃探测器阵列　(a)线性I-V特性曲线; (b) 对数I-V特性曲线; (c)光电流与光强的关系图; (d)动态响应图

Fig. 3. (a) The linear I-V; (b) semi-log I-V; (c) the relationship of photocurrent and light intensity; (d) the time-resolved transient photo response of the Ga₂O₃ photodetector array.

下载: 全尺寸图片幻灯片

图 4 10 V偏压下, 16个探测器单元在不同光强的入射光照射下暗电流与光电流的统计数值

Fig. 4. The statistic photo and dark current of the 16 photodetector cells at 10 V, under the illuminations with various light intensities.

下载: 全尺寸图片幻灯片

[1]	McClintock R, Mayes K, Yasan A, Shiell D, Kung P, Razeghi M 2005 Appl. Phys. Lett. 86 011117 Google Scholar
[2]	葛浩楠, 谢润章, 郭家祥, 李庆, 余羿叶, 何家乐, 王芳, 王鹏, 胡伟达 2022 物理学报 71 110703 Google Scholar Ge H N, Xie R Z, Guo J X, Li Q, Yu Y Y, He J L, Wang F, Wang P, Hu W D 2022 Acta Phys. Sin. 71 110703 Google Scholar
[3]	Li L, Ye S, Qu J, Zhou F, Song J, Shen G 2021 Small 17 2005606 Google Scholar
[4]	Zhang Z, Lin C, Yang X, Tian Y, Gao C, Li K, Zang J, Yang X, Dong L, Shan C 2021 Carbon 173 427 Google Scholar
[5]	Konstantatos G, Sargent E H 2010 Nat. Nanotechnol. 5 391 Google Scholar
[6]	郭道友, 李培刚, 陈政委, 吴真平, 唐为华 2019 物理学报 68 078501 Google Scholar Guo D Y, Li P G, Chen Z W, Wu Z P, Tang W H 2019 Acta Phys. Sin. 68 078501 Google Scholar
[7]	Chen X, Ren F, Gu S, Ye J 2019 Photon. Res. 7 381 Google Scholar
[8]	Xu J, Zheng W, Huang F 2019 J. Mater. Chem. C 7 8753 Google Scholar
[9]	刘增 2021 博士学位论文 (北京: 北京邮电大学) Liu Z 2021 Ph. D. Dissertation (Beijing: Beijing University of Posts and Telecommunications) (in Chinese)
[10]	Liu Z, Li P G, Zhi Y S, Wang X L, Chu X L, Tang W H 2019 Chin. Phys. B 28 017105 Google Scholar
[11]	Yuan Y, Hao W, Mu W, Wang Z, Chen X, Liu Q, Xu G, Wang C, Zhou H, Zou Y, Zhao X, Jia Z, Ye J, Zhang J, Long S, Tao X, Zhang R, Hao Y 2021 Fundam. Res. 1 697 Google Scholar
[12]	陆海, 张荣 2021 宽禁带半导体紫外光电探测器 (西安: 西安电子科技大学出版社) 第164页 Lu H, Zhang R 2021 Wide Band Gap Semiconductor UV Photodetector (Xi’an: Xidian University Press) p164 (in Chinese)
[13]	Peng Y, Zhang Y, Chen Z, Guo D, Zhang X, Li P, Wu Z, Tang W 2018 IEEE Photon. Technol. Lett. 30 993 Google Scholar
[14]	Zhi Y S, Liu Z, Zhang S H, Li S, Yan Z Y, Li P G, Tang W H 2021 IEEE Trans. Electron Devices 68 3435 Google Scholar
[15]	Tak B R, Singh R 2021 ACS Appl. Electron. Mater. 3 2145 Google Scholar
[16]	Liu Z, Zhi Y S, Zhang M L, Yang L L, Li S, Yan Z Y, Zhang S H, Guo D Y, Li P G, Guo Y F, Tang W H 2022 Chin. Phys. B 31 088503 Google Scholar
[17]	Pratiyush A S, Muazzam U U, Kumar S, Vijayakumar P, Ganesamoorthy S, Subramanian N, Muralidharan R, Nath D N 2019 IEEE Photon. Technol. Lett. 31 923 Google Scholar
[18]	Chen Y, Lu Y, Liao M, Tian Y, Liu Q, Gao C, Yang C, Shan C 2019 Adv. Funct. Mater. 29 1906040 Google Scholar
[19]	Chen Y C, Lu Y J, Liu Q, Lin C N, Guo J, Zang J H, Tian Y Z, Shan C X 2019 J. Mater. Chem. C 7 2557 Google Scholar
[20]	Qin Y, Li L H, Yu Z, Wu F, Dong D, Guo W, Zhang Z, Yuan J H, Xue K H, Miao X, Long S 2021 Adv. Sci. 80 2101106 Google Scholar
[21]	Qin Y, Long S, He Q, Dong H, Jian G, Zhang Y, Hou X, Tan P, Zhang Z, Lu Y, Shan C, Wang J, Hu W, Lv H, Liu Q, Liu M 2019 Adv. Electron. Mater. 5 1900389 Google Scholar
[22]	Hou X, Zhao X, Zhang Y, Zhang Z, Liu Y, Qin Y, Tan P, Chen C, Yu S, Ding M, Xu G, Hu Q, Long S 2022 Adv. Mater. 34 2106923 Google Scholar
[23]	Tong L, Huang X, Wang P, Ye L, Peng M, An L, Sun Q, Zhang Y, Yang G, Li Z, Zhong F, Wang F, Wang Y, Motlag M, Wu W, Cheng G J, Hu W 2020 Nat. Commun. 11 2308 Google Scholar
[24]	Liu Z, Zhi Y, Li S, Liu Y, Tang X, Yan Z, Li P, Li X, Guo D, Wu Z, Tang W 2020 J. Phys. D: Appl. Phys. 53 085105 Google Scholar
[25]	Liu Z, Li S, Yan Z, Liu Y, Zhi Y, Wang X, Wu Z, Li P, Tang W 2020 J. Mater. Chem. C 8 5071 Google Scholar
[26]	Li Z, Jiao T, Hu D, Lv Y, Li W, Dong X, Zhang Y, Feng Z, Zhang B 2019 Coatings 9 281 Google Scholar
[27]	马海林, 苏庆 2014 物理学报 63 116701 Google Scholar Ma H L, Su Q 2014 Acta Phys. Sin. 63 116701 Google Scholar
[28]	冯秋菊, 李芳, 李彤彤, 李昀铮, 石博, 李梦轲, 梁红伟 2018 物理学报 67 218101 Google Scholar Feng Q J, Li F, Li T T, Li Y Z, Shi B, Li M K, Liang H W 2018 Acta Phys. Sin. 67 218101 Google Scholar
[29]	Wager J F 2003 Science 300 1245 Google Scholar
[30]	周树仁, 张红, 莫慧兰, 刘浩文, 熊元强, 李泓霖, 孔春阳, 叶利娟, 李万俊 2021 物理学报 70 178503 Google Scholar Zhou S R, Zhang H, Mo H L, Liu H W, Xiong Y Q, Li H L, Kong C Y, Ye L J, Li W J 2021 Acta Phys. Sin. 70 178503 Google Scholar
[31]	李秀华, 张敏, 杨佳, 邢爽, 高悦, 李亚泽, 李思雨, 王崇杰 2022 物理学报 71 048501 Google Scholar Li X H, Zhang M, Yang J, Xing S, Gao Y, Li Y Z, Li S Y, Wang C J 2022 Acta Phys. Sin. 71 048501 Google Scholar
[32]	欧阳晓平, 王兰, 范如玉, 张忠兵, 王伟, 吕反修, 唐伟忠, 陈广超 2006 物理学报 55 2170 Google Scholar Ouyang X P, Wang L, Fan R Y, Zhang Z B, Wang W, Lv F X, Tang W Z, Chen G C 2006 Acta Phys. Sin. 55 2170 Google Scholar
[33]	Li S, Guo D, Li P, Wang X, Wang Y, Yan Z, Liu Z, Zhi Y, Huang Y, Wu Z, Tang W 2019 ACS Appl. Mater. Interfaces 11 35105 Google Scholar
[34]	Liu Z, Wang X, Liu Y, Guo D, Li S, Yan Z, Tan C K, Li W, Li P, Tang W 2019 J. Mater. Chem. C 7 13920 Google Scholar
[35]	Li S, Yan Z Y, Tang J C, Yue J Y, Liu Z, Li P G, Guo Y F, Tang W H 2022 IEEE Trans. Electron Devices 69 2443 Google Scholar
[36]	Qiao B, Zhang Z, Xie X, Li B, Chen X, Zhao H, Liu K, Liu L, Shen D 2021 J. Mater. Chem. C 9 4039 Google Scholar

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具有大光电导增益的氧化镓薄膜基深紫外探测器阵列