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Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Gao Peng Xu Jun Deng Xin-Lu Wang De-He Dong Chuang

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Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Gao Peng, Xu Jun, Deng Xin-Lu, Wang De-He, Dong Chuang
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  • Abstract views:  7029
  • PDF Downloads:  613
  • Cited By: 0
Publishing process
  • Received Date:  21 July 2004
  • Accepted Date:  17 September 2004
  • Published Online:  07 July 2005

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