-
As an emerging two-dimensional (2D) material, monolayer molybdenum disulfide films show excellent electrical and optical properties and have aroused great interest due to their potential applications in electronics and optoelectronics. In this paper, we review our works about molybdenum disulfide films in the past few years. Chemical vapor deposition (CVD) is a convenient and low-cost method to synthesize 2D materials. By oxygen-assisted CVD, the wafer-scale highly-oriented monolayer molybdenum disulfide films and large single-crystal monolayer molybdenum disulfide on various substrates have been prepared epitaxially. Preparation of high-quality monolayer molybdenum disulfide films is the key to measure its intrinsic properties and realize its large-scale applications. Besides the preparation of high-quality materials, the optimizing of transfer technique and fabrication technique are of equal importance for improving the properties of electronic and optoelectronic devices. Water-assisted lossless transfer, patterned peeling, structural change and local phase transition of monolayer molybdenum disulfide films pave the way for preparing and optimizing the functionalized devices. For example, water-assisted transfer and patterned peeling provide methods of preparing molybdenum disulfide samples with clean surfaces and interfaces. Phase transition in the contact area of field-effect transistor reduces the contact resistance effectively, which improves the electrical performance. In addition, the heterojunctions of molybdenum disulfide and other 2D materials show novel electrical and optical properties. As for the functional devices, ultrashort-channel field-effect transistors, integrated flexible thin film transistors, and humidity sensor array have been realized with monolayer molybdenum disulfide films. A grain boundary widening technique is developed to fabricate graphene electrodes for ultrashort-channel monolayer molybdenum disulfide transistors. Field-effect transistors with channel lengths scaling down to 4 nm can be realized reliably and exhibit superior performances, such as the nearly Ohmic contacts and excellent immunity to short channel effects. Furthermore, monolayer molybdenum disulfide films show excellent electrical properties in the measurement of integrated flexible thin film transistors. Under a uniaxial stain of 1%, the performance of the device shows no obvious change, revealing not only the high quality of CVD-grown molybdenum disulfide films, but also the stabilities of these flexible thin film transistor devices. Molybdenum disulfide humidity sensor array for noncontact sensation also shows high sensitivity and stability. Mobility and on/off ratio of the devices in the array decrease linearly with the relative humidity increasing, leading to a high sensitivity of more than 104. The study of monolayer molybdenum disulfide films is universal and instructive for other 2D transition metal dichalcogenides.
[1] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
[2] Radisavljevic B, Radenovic A, Brivio J, Giacometti V, Kis A 2011 Nat. Nanotechnol. 6 147
[3] Cui X, Lee G H, Kim Y D, Arefe G, Huang P Y, Lee C H, Chenet D A, Zhang X, Wang L, Ye F, Pizzocchero F, Jessen B S, Watanabe K, Taniguchi T, Muller D A, Low T, Kim P, Hone J 2015 Nat. Nanotechnol. 10 534
[4] Lopez-Sanchez O, Lembke D, Kayci M, Radenovic A, Kis A 2013 Nat. Nanotechnol. 8 497
[5] Pu J, Yomogida Y, Liu K K, Li L J, Iwasa Y, Takenobu T 2012 Nano Lett. 12 4013
[6] Wang H, Yu L L, Lee Y H, Shi Y M, Hsu A, Chin M L, Li L J, Dubey M, Kong J, Palacios T 2012 Nano Lett. 12 4674
[7] Tan L K, Liu B, Teng J H, Guo S H, Low H Y, Loh K P 2014 Nanoscale 6 10584
[8] Liu H J, Jiao L, Yang F, Cai Y, Wu X X, Ho W K, Gao C L, Jia J F, Wang N, Fan H, Yao W, Xie M H 2014 Phys. Rev. Lett. 113 066105
[9] Serna M I, Yoo S H, Moreno S, Xi Y, Oviedo J P, Choi H, Alshareef H N, Kim M J, Minary-Jolandan M, Quevedo-Lopez M A 2016 ACS Nano 10 6054
[10] Li H N, Li Y, Aljarb A, Shi Y M, Li L J 2017 Chem. Rev. 7b00212
[11] Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656
[12] Lin Y C, Zhang W J, Huang J K, Liu K K, Lee Y H, Liang C T, Chu C W, Li L J 2012 Nanoscale 4 6637
[13] Kang K, Lee K H, Han Y, Gao H, Xie S, Muller D A, Park J 2017 Nature 550 229
[14] Das S, Chen H Y, Penumatcha A V, Appenzeller J 2013 Nano Lett. 13 100
[15] Zheng J Y, Yan X X, Lu Z X, Qiu H L, Xu G C, Zhou X, Wang P, Pan X Q, Liu K H, Jiao L Y 2017 Adv. Mater. 29 1604540
[16] Kappera R, Voiry D, Yalcin S E, Branch B, Gupta G, Mohite A D, Chhowalla M 2014 Nat. Mater. 13 1128
[17] Zhang J, Yu H, Chen W, Tian X Z, Liu D H, Cheng M, Xie G B, Yang W, Yang R, Bai X D, Shi D X, Zhang G Y 2014 ACS Nano 8 6024
[18] Chen W, Zhao J, Zhang J, Gu L, Yang Z Z, Li X M, Yu H, Zhu X T, Yang R, Shi D X, Lin X C, Guo J D, Bai X D, Zhang G Y 2015 J. Am. Chem. Soc. 137 15632
[19] Yu H, Yang Z Z, Du L J, Zhang J, Shi J N, Chen W, Chen P, Liao M Z, Zhao J, Meng J L, Wang G L, Zhu J Q, Yang R, Shi D X, Gu L, Zhang G Y 2017 Small 13 1603005
[20] Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001
[21] Zhao J, Yu H, Chen W, Yang R, Zhu J Q, Liao M Z, Shi D X, Zhang G Y 2016 ACS Appl. Mater. Interfaces 8 16546
[22] Meng J L, Wang G L, Li X M, Lu X B, Zhang J, Yu H, Chen W, Du L J, Liao M Z, Zhao J, Chen P, Zhu J Q, Bai X D, Shi D X, Zhang G Y 2016 Small 12 3770
[23] Zhu J Q, Wang Z C, Yu H, Li N, Zhang J, Meng J L, Liao M Z, Zhao J, Lu X B, Du L J, Yang R, Shi D X, Jiang Y, Zhang G Y 2017 J. Am. Chem. Soc. 139 10216
[24] Xie L, Du L J, Lu X B, Yang R, Shi D X, Zhang G Y 2017 Chin. Phys. B 26 087306
[25] Chen P, Xiang J Y, Yu H, Zhang J, Xie G B, Wu S, Lu X B, Wang G L, Zhao J, Wen F S, Liu Z Y, Yang R, Shi D X, Zhang G Y 2015 2D Materials 2 034009
[26] Zhang J, Wang J H, Chen P, Sun Y, Wu S, Jia Z Y, Lu X B, Yu H, Chen W, Zhu J Q, Xie G B, Yang R, Shi D X, Xu X L, Xiang J Y, Liu K H, Zhang G Y 2016 Adv. Mater. 28 1950
[27] Du L J, Yu H, Liao M Z, Wang S P, Xie L, Lu X B, Zhu J Q, Li N, Shen C, Chen P, Yang R, Shi D X, Zhang G Y 2017 Appl. Phys. Lett. 111 263106
[28] Xie L, Liao M Z, Wang S P, Yu H, Du L J, Tang J, Zhao J, Zhang J, Chen P, Lu X B, Wang G L, Xie G B, Yang R, Shi D X, Zhang G Y 2017 Adv. Mater. 29 1702522
[29] Zhao J, Chen W, Meng J L, Yu H, Liao M Z, Zhu J Q, Yang R, Shi D X, Zhang G Y 2016 Adv. Elec. Mater. 2 1500379
[30] Zhao J, Li N, Yu H, Wei Z, Liao M Z, Chen P, Wang S P, Shi D X, Sun Q J, Zhang G Y 2017 Adv. Mater. 29 1702076
[31] Desai S B, Madhvapathy S R, Sachid A B, Llinas J P, Wang Q X, Ahn G H, Pitner G, Kim M J, Bokor J, Hu C M, Wong H S P, Javey A 2016 Science 354 99
[32] Feng J D, Graf M, Liu K, Ovchinnikov D, Dumcenco D, Heiranian M, Nandigana V, Aluru N R, Kis A, Radenovic A 2016 Nature 536 197
[33] Sahoo P K, Memaran S, Xin Y, Balicas L, Gutirrez H R 2018 Nature 553 63
[34] Baker M A, Gilmore R, Lenardi C, Gissler W 1999 Appl. Surf. Sci. 150 255
[35] Yu Y F, Li C, Liu Y, Su L Q, Zhang Y, Cao L Y 2013 Sci. Rep. 3 1866
[36] Islam N R, Kang N, Bhanu U, Paudel H P, Erementchouk M, Tetard L, Leuenberger M N, Khondaker S I 2014 Nanoscale 6 10033
[37] Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792
[38] Geim A K, Grigorieva I V 2013 Nature 499 419
[39] Lee G H, Yu Y J, Cui X, Petrone N, Lee C H, Choi M S, Lee D Y, Lee C, Yoo W J, Watanabe K, Taniguchi T, Nuckolls C, Kim P, Hone J 2013 ACS Nano 7 7931
[40] Conley H J, Wang B, Ziegler J I, Haglund R F, Pantelides S T, Bolotin K I 2013 Nano Lett. 13 3626
[41] Lee Y H, Yu L L, Wang H, Fang W J, Ling X, Shi Y M, Lin C T, Huang J K, Chang M T, Chang C S, Dresselhaus M, Palacios T, Li L J, Kong J 2013 Nano Lett. 13 1852
[42] Gurarslan A, Yu Y F, Su L Q, Yu Y L, Suarez F, Yao S, Zhu Y, Ozturk M, Zhang Y, Cao L Y 2014 ACS Nano 8 11522
[43] Schneider G F, Calado V E, Zandbergen H, Vandersypen L M K, Dekker C 2010 Nano Lett. 10 1912
[44] Braga S F, Coluci V R, Legoas S B, Giro R, Galvo D S, Baughman R H 2004 Nano Lett. 4 881
[45] Chen Y, Lu J, Gao Z X 2007 J. Phys. Chem. C 111 1625
[46] Pan H, Feng Y, Lin J 2005 Phys. Rev. B 72 085415
[47] Lauret J S, Arenal R, Ducastelle F, Loiseau A, Cau M, Attal-Tretout B, Rosencher E, Goux-Capes L 2005 Phys. Rev. Lett. 94 037405
[48] Guo G Y, Lin J C 2005 Phys. Rev. B 71 165402
[49] Xiao J, Long M Q, Li X M, Xu H, Huang H, Gao Y L 2014 Sci. Rep. 4 4327
[50] Ghorbani-Asl M, Zibouche N, Wahiduzzaman M, Oliveira A F, Kuc A, Heine T 2013 Sci. Rep. 3 2961
[51] Chhowalla M, Shin H S, Eda G, Li L J, Loh K P, Zhang H 2013 Nat. Chem. 5 263
[52] Duerloo K A N, Li Y, Reed E J 2014 Nat. Commun. 5 4214
[53] Guo Y, Sun D, Ouyang B, Raja A, Song J, Heinz T F, Brus L E 2015 Nano Lett. 15 5081
[54] Eda G, Fujita T, Yamaguchi H, Voiry D, Chen M, Chhowalla M 2012 ACS Nano 6 7311
[55] Nayak A P, Pandey T, Voiry D, Liu J, Moran S T, Sharma A, Tan C, Chen C, Li L J, Chhowalla M U, Lin J F, Singh A K, Akinwande D 2015 Nano Lett. 15 346
[56] Liu Q, Li X, He Q, Khalil A, Liu D, Xiang T, Wu X, Song L 2015 Small 11 5556
[57] Splendiani A, Sun L, Zhang Y, Li T, Kim J, Chim C Y, Galli G, Wang F 2010 Nano Lett. 10 1271
[58] Eda G, Yamaguchi H, Voiry D, Fujita T, Chen M, Chhowalla M 2011 Nano Lett. 11 5111
[59] Cai L, He J, Liu Q, Yao T, Chen L, Yan W, Hu F, Jiang Y, Zhao Y, Hu T, Sun Z, Wei S 2015 J. Am. Chem. Soc. 137 2622
[60] Castellanos-Gomez A, Buscema M, Molenaar R, Singh V, Janssen L, Herre S J, van der Zant, Steele G A 2014 2D Materials 1 011002
[61] Wang L, Meric I, Huang P, Gao Q, Gao Y, Tran H, Taniguchi T, Watanabe K, Campos L, Muller D 2013 Science 342 614
[62] Kwak J Y, Hwang J, Calderon B, Alsalman H, Munoz N, Schutter B, Spencer M G 2014 Nano Lett. 14 4511
[63] Radisavljevic B, Whitwick M B, Kis A 2011 ACS Nano 5 9934
[64] Xu K, Chen D X, Yang F Y, Wang Z X, Yin L, Wang F, Cheng R Q, Liu K H, Xiong J, Liu Q, He J 2017 Nano Lett. 17 1065
[65] Lee S C, Pearson G L 1981 Solid State Electron. 24 563
[66] Lee C, Yan H, Brus L E, Heinz T F, Hone J, Ryu S 2010 Acs Nano 4 2695
[67] Liu H, Neal A T, Zhu Z, Luo Z, Xu X F, Tomanek D, Ye P D D 2014 ACS Nano 8 4033
[68] Mak K F, Lee C, Hone J, Shan J, Heinz T F 2010 Phys. Rev. Lett. 105 136805
[69] Tran V, Soklaski R, Liang Y, Yang L 2014 Phys. Rev. B 89 235319
[70] van der Zande A M, Huang P Y, Chenet D A, Berkelbach T C, You Y M, Lee G H, Heinz T F, Reichman D R, Muller D A, Hone J C 2013 Nat. Mater. 12 554
[71] Jin W, Yeh P C, Zaki N, Chenet D, Arefe G, Hao Y, Sala A, Mentes T O, Dadap J I, Locatelli A, Home J, Osgood Jr R M 2015 Phys. Rev. B 92 201409
[72] Zhu C R, Wang G, Liu B L, Marie X, Qiao X F, Zhang X, Wu X X, Fan H, Tan P H, Amand T, Urbaszek B 2013 Phys. Rev. B 88 121301
[73] Li L, Yu Y, Ye G J, Ge Q, Ou X, Wu H, Feng D, Chen X H, Zhang Y 2014 Nat. Nanotechnol. 9 372
[74] Buscema M, Groenendijk D J, Blanter S I, Steele G A, van der Zant H S, Castellanos-Gomez A 2014 Nano Lett. 14 3347
[75] Na J, Lee Y T, Lim J A, Hwang D K, Kim G T, Choi W K, Song Y W 2014 ACS Nano 8 11753
[76] Campbell P M, Tarasov A, Joiner C A, Tsai M Y, Pavlidis G, Graham S, Ready W J, Vogel E M 2016 Nanoscale 8 2268
[77] Chuang H J, Tan X, Ghimire N J, Perera M M, Chamlagain B, Cheng M M C, Yan J, Mandrus D, Tomnek D, Zhou Z 2014 Nano Lett. 14 3594
[78] Cao Y, Wei Z, Liu S, Gan L, Guo X, Xu W, Steigerwald M L, Liu Z, Zhu D 2010 Angew. Chem. 122 6463
[79] Cao Y, Liu S, Shen Q, Yan K, Li P, Xu J, Yu D, Steigerwald M L, Nuckolls C, Liu Z 2009 Adv. Funct. Mater. 19 2743
[80] Liu Y, Guo J, Wu Y C, Zhu E, Weiss N O, He Q, Wu H, Cheng H C, Xu Y, Shakir I 2016 Nano Lett. 16 6337
[81] Liu Y, Wu H, Cheng H C, Yang S, Zhu E, He Q, Ding M, Li D, Guo J, Weiss N O 2015 Nano Lett. 15 3030
[82] Miao J, Zhang S, Cai L, Scherr M, Wang C 2015 ACS Nano 9 9236
[83] Roy T, Tosun M, Kang J S, Sachid A B, Desai S B, Hettick M, Hu C M C, Javey A 2014 ACS Nano 8 6259
[84] Salvatore G A, Munzenrieder N, Barraud C, Petti L, Zysset C, Buthe L, Ensslin K, Troster G 2013 ACS Nano 7 8809
[85] Yoon J, Park W, Bae G Y, Kim Y, Jang H S, Hyun Y, Lim S K, Kahng Y H, Hong W K, Lee B H, Ko H C 2013 Small 9 3295
[86] Zhao J, Wang G L, Yang R, Lu X B, Cheng M, He C L, Xie G B, Meng J L, Shi D X, Zhang G Y 2015 ACS Nano 9 1622
[87] Powell M J 1989 IEEE Trans. Electron. Dev. 36 2753
[88] Dimitrakopoulos C D, Malenfant P R L 2002 Adv. Mater. 14 99
[89] Street R A 2009 Adv. Mater. 21 2007
[90] Zhao J, He C L, Yang R, Shi Z W, Cheng M, Yang W, Xie G B, Wang D M, Shi D X, Zhang G Y 2012 Appl. Phys. Lett. 101 063112
[91] Late D J, Liu B, Matte H S S R, Dravid V P, Rao C N R 2012 ACS Nano 6 5635
[92] Zhang S L, Choi H H, Yue H Y, Yang W C 2014 Curr. Appl. Phys. 14 264
[93] Late D J, HuangY K, Liu B, Acharya J, Shirodkar S N, Luo J J, Yan A M, Charles D, Waghmare U V, Dravid V P, Rao C N R 2013 ACS Nano 7 4879
[94] Wang Y L, Cong C X, Qiu C Y, Yu T 2013 Small 9 2857
[95] Horzum S, Sahin H, Cahangirov S, Cudazzo P, Rubio A, Serin T, Peeters F M 2013 Phys. Rev. B 87 125415
[96] Tongay S, Zhou J, Ataca C, Liu J, Kang J S, Matthews T S, You L, Li J B, Grossman J C, Wu J Q 2013 Nano Lett. 13 2831
[97] Varghese J O, Agbo P, Sutherland A M, Brar V W, Rossman G R, Gray H B, Heath J R 2015 Adv. Mater. 27 2734
期刊类型引用(8)
1. 刘春泉,熊芬,马佳仪,周锦添,梁泽巽,黄建平. 中低温退火对MoS_2纳米薄膜形貌、结构及电性能的影响. 金属热处理. 2024(07): 186-194 . 百度学术
2. 潘苏敏,黄玲琴,陶化文. 基于FET结构的MoS_2器件的研究进展. 微纳电子技术. 2022(03): 210-217 . 百度学术
3. 黄坤,王腾飞,姚激. 单层MoS_2的热弹耦合非线性板模型. 物理学报. 2021(13): 369-375 . 百度学术
4. 马春阳,杨德威,杜凯翔,常晓萌,杨培志. 少层二硫化钼薄膜的制备及其光谱特性. 半导体技术. 2020(09): 713-717+736 . 百度学术
5. 陶化文,黄玲琴,朱靖. 不同衬底上层状MoS_2薄膜制备及应用的研究进展. 半导体技术. 2020(10): 737-747+759 . 百度学术
6. 韦贤露,巩晨阳,肖剑荣. 射频反应磁控溅射制备MoS_2薄膜结构及光学性能. 真空. 2020(05): 11-13 . 百度学术
7. 石侃,张敏,祝祖送. 生长时间对二硫化钼的化学气相生长及其光电性能的影响. 中国照明电器. 2019(12): 7-11 . 百度学术
8. 冯明,郝一影,程伟琴,王泽涛,王运熙,高青环,霍二福. 高纯二硫化钼的制备方法及应用研究进展. 河南化工. 2018(10): 3-8 . 百度学术
其他类型引用(21)
-
[1] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
[2] Radisavljevic B, Radenovic A, Brivio J, Giacometti V, Kis A 2011 Nat. Nanotechnol. 6 147
[3] Cui X, Lee G H, Kim Y D, Arefe G, Huang P Y, Lee C H, Chenet D A, Zhang X, Wang L, Ye F, Pizzocchero F, Jessen B S, Watanabe K, Taniguchi T, Muller D A, Low T, Kim P, Hone J 2015 Nat. Nanotechnol. 10 534
[4] Lopez-Sanchez O, Lembke D, Kayci M, Radenovic A, Kis A 2013 Nat. Nanotechnol. 8 497
[5] Pu J, Yomogida Y, Liu K K, Li L J, Iwasa Y, Takenobu T 2012 Nano Lett. 12 4013
[6] Wang H, Yu L L, Lee Y H, Shi Y M, Hsu A, Chin M L, Li L J, Dubey M, Kong J, Palacios T 2012 Nano Lett. 12 4674
[7] Tan L K, Liu B, Teng J H, Guo S H, Low H Y, Loh K P 2014 Nanoscale 6 10584
[8] Liu H J, Jiao L, Yang F, Cai Y, Wu X X, Ho W K, Gao C L, Jia J F, Wang N, Fan H, Yao W, Xie M H 2014 Phys. Rev. Lett. 113 066105
[9] Serna M I, Yoo S H, Moreno S, Xi Y, Oviedo J P, Choi H, Alshareef H N, Kim M J, Minary-Jolandan M, Quevedo-Lopez M A 2016 ACS Nano 10 6054
[10] Li H N, Li Y, Aljarb A, Shi Y M, Li L J 2017 Chem. Rev. 7b00212
[11] Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656
[12] Lin Y C, Zhang W J, Huang J K, Liu K K, Lee Y H, Liang C T, Chu C W, Li L J 2012 Nanoscale 4 6637
[13] Kang K, Lee K H, Han Y, Gao H, Xie S, Muller D A, Park J 2017 Nature 550 229
[14] Das S, Chen H Y, Penumatcha A V, Appenzeller J 2013 Nano Lett. 13 100
[15] Zheng J Y, Yan X X, Lu Z X, Qiu H L, Xu G C, Zhou X, Wang P, Pan X Q, Liu K H, Jiao L Y 2017 Adv. Mater. 29 1604540
[16] Kappera R, Voiry D, Yalcin S E, Branch B, Gupta G, Mohite A D, Chhowalla M 2014 Nat. Mater. 13 1128
[17] Zhang J, Yu H, Chen W, Tian X Z, Liu D H, Cheng M, Xie G B, Yang W, Yang R, Bai X D, Shi D X, Zhang G Y 2014 ACS Nano 8 6024
[18] Chen W, Zhao J, Zhang J, Gu L, Yang Z Z, Li X M, Yu H, Zhu X T, Yang R, Shi D X, Lin X C, Guo J D, Bai X D, Zhang G Y 2015 J. Am. Chem. Soc. 137 15632
[19] Yu H, Yang Z Z, Du L J, Zhang J, Shi J N, Chen W, Chen P, Liao M Z, Zhao J, Meng J L, Wang G L, Zhu J Q, Yang R, Shi D X, Gu L, Zhang G Y 2017 Small 13 1603005
[20] Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001
[21] Zhao J, Yu H, Chen W, Yang R, Zhu J Q, Liao M Z, Shi D X, Zhang G Y 2016 ACS Appl. Mater. Interfaces 8 16546
[22] Meng J L, Wang G L, Li X M, Lu X B, Zhang J, Yu H, Chen W, Du L J, Liao M Z, Zhao J, Chen P, Zhu J Q, Bai X D, Shi D X, Zhang G Y 2016 Small 12 3770
[23] Zhu J Q, Wang Z C, Yu H, Li N, Zhang J, Meng J L, Liao M Z, Zhao J, Lu X B, Du L J, Yang R, Shi D X, Jiang Y, Zhang G Y 2017 J. Am. Chem. Soc. 139 10216
[24] Xie L, Du L J, Lu X B, Yang R, Shi D X, Zhang G Y 2017 Chin. Phys. B 26 087306
[25] Chen P, Xiang J Y, Yu H, Zhang J, Xie G B, Wu S, Lu X B, Wang G L, Zhao J, Wen F S, Liu Z Y, Yang R, Shi D X, Zhang G Y 2015 2D Materials 2 034009
[26] Zhang J, Wang J H, Chen P, Sun Y, Wu S, Jia Z Y, Lu X B, Yu H, Chen W, Zhu J Q, Xie G B, Yang R, Shi D X, Xu X L, Xiang J Y, Liu K H, Zhang G Y 2016 Adv. Mater. 28 1950
[27] Du L J, Yu H, Liao M Z, Wang S P, Xie L, Lu X B, Zhu J Q, Li N, Shen C, Chen P, Yang R, Shi D X, Zhang G Y 2017 Appl. Phys. Lett. 111 263106
[28] Xie L, Liao M Z, Wang S P, Yu H, Du L J, Tang J, Zhao J, Zhang J, Chen P, Lu X B, Wang G L, Xie G B, Yang R, Shi D X, Zhang G Y 2017 Adv. Mater. 29 1702522
[29] Zhao J, Chen W, Meng J L, Yu H, Liao M Z, Zhu J Q, Yang R, Shi D X, Zhang G Y 2016 Adv. Elec. Mater. 2 1500379
[30] Zhao J, Li N, Yu H, Wei Z, Liao M Z, Chen P, Wang S P, Shi D X, Sun Q J, Zhang G Y 2017 Adv. Mater. 29 1702076
[31] Desai S B, Madhvapathy S R, Sachid A B, Llinas J P, Wang Q X, Ahn G H, Pitner G, Kim M J, Bokor J, Hu C M, Wong H S P, Javey A 2016 Science 354 99
[32] Feng J D, Graf M, Liu K, Ovchinnikov D, Dumcenco D, Heiranian M, Nandigana V, Aluru N R, Kis A, Radenovic A 2016 Nature 536 197
[33] Sahoo P K, Memaran S, Xin Y, Balicas L, Gutirrez H R 2018 Nature 553 63
[34] Baker M A, Gilmore R, Lenardi C, Gissler W 1999 Appl. Surf. Sci. 150 255
[35] Yu Y F, Li C, Liu Y, Su L Q, Zhang Y, Cao L Y 2013 Sci. Rep. 3 1866
[36] Islam N R, Kang N, Bhanu U, Paudel H P, Erementchouk M, Tetard L, Leuenberger M N, Khondaker S I 2014 Nanoscale 6 10033
[37] Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792
[38] Geim A K, Grigorieva I V 2013 Nature 499 419
[39] Lee G H, Yu Y J, Cui X, Petrone N, Lee C H, Choi M S, Lee D Y, Lee C, Yoo W J, Watanabe K, Taniguchi T, Nuckolls C, Kim P, Hone J 2013 ACS Nano 7 7931
[40] Conley H J, Wang B, Ziegler J I, Haglund R F, Pantelides S T, Bolotin K I 2013 Nano Lett. 13 3626
[41] Lee Y H, Yu L L, Wang H, Fang W J, Ling X, Shi Y M, Lin C T, Huang J K, Chang M T, Chang C S, Dresselhaus M, Palacios T, Li L J, Kong J 2013 Nano Lett. 13 1852
[42] Gurarslan A, Yu Y F, Su L Q, Yu Y L, Suarez F, Yao S, Zhu Y, Ozturk M, Zhang Y, Cao L Y 2014 ACS Nano 8 11522
[43] Schneider G F, Calado V E, Zandbergen H, Vandersypen L M K, Dekker C 2010 Nano Lett. 10 1912
[44] Braga S F, Coluci V R, Legoas S B, Giro R, Galvo D S, Baughman R H 2004 Nano Lett. 4 881
[45] Chen Y, Lu J, Gao Z X 2007 J. Phys. Chem. C 111 1625
[46] Pan H, Feng Y, Lin J 2005 Phys. Rev. B 72 085415
[47] Lauret J S, Arenal R, Ducastelle F, Loiseau A, Cau M, Attal-Tretout B, Rosencher E, Goux-Capes L 2005 Phys. Rev. Lett. 94 037405
[48] Guo G Y, Lin J C 2005 Phys. Rev. B 71 165402
[49] Xiao J, Long M Q, Li X M, Xu H, Huang H, Gao Y L 2014 Sci. Rep. 4 4327
[50] Ghorbani-Asl M, Zibouche N, Wahiduzzaman M, Oliveira A F, Kuc A, Heine T 2013 Sci. Rep. 3 2961
[51] Chhowalla M, Shin H S, Eda G, Li L J, Loh K P, Zhang H 2013 Nat. Chem. 5 263
[52] Duerloo K A N, Li Y, Reed E J 2014 Nat. Commun. 5 4214
[53] Guo Y, Sun D, Ouyang B, Raja A, Song J, Heinz T F, Brus L E 2015 Nano Lett. 15 5081
[54] Eda G, Fujita T, Yamaguchi H, Voiry D, Chen M, Chhowalla M 2012 ACS Nano 6 7311
[55] Nayak A P, Pandey T, Voiry D, Liu J, Moran S T, Sharma A, Tan C, Chen C, Li L J, Chhowalla M U, Lin J F, Singh A K, Akinwande D 2015 Nano Lett. 15 346
[56] Liu Q, Li X, He Q, Khalil A, Liu D, Xiang T, Wu X, Song L 2015 Small 11 5556
[57] Splendiani A, Sun L, Zhang Y, Li T, Kim J, Chim C Y, Galli G, Wang F 2010 Nano Lett. 10 1271
[58] Eda G, Yamaguchi H, Voiry D, Fujita T, Chen M, Chhowalla M 2011 Nano Lett. 11 5111
[59] Cai L, He J, Liu Q, Yao T, Chen L, Yan W, Hu F, Jiang Y, Zhao Y, Hu T, Sun Z, Wei S 2015 J. Am. Chem. Soc. 137 2622
[60] Castellanos-Gomez A, Buscema M, Molenaar R, Singh V, Janssen L, Herre S J, van der Zant, Steele G A 2014 2D Materials 1 011002
[61] Wang L, Meric I, Huang P, Gao Q, Gao Y, Tran H, Taniguchi T, Watanabe K, Campos L, Muller D 2013 Science 342 614
[62] Kwak J Y, Hwang J, Calderon B, Alsalman H, Munoz N, Schutter B, Spencer M G 2014 Nano Lett. 14 4511
[63] Radisavljevic B, Whitwick M B, Kis A 2011 ACS Nano 5 9934
[64] Xu K, Chen D X, Yang F Y, Wang Z X, Yin L, Wang F, Cheng R Q, Liu K H, Xiong J, Liu Q, He J 2017 Nano Lett. 17 1065
[65] Lee S C, Pearson G L 1981 Solid State Electron. 24 563
[66] Lee C, Yan H, Brus L E, Heinz T F, Hone J, Ryu S 2010 Acs Nano 4 2695
[67] Liu H, Neal A T, Zhu Z, Luo Z, Xu X F, Tomanek D, Ye P D D 2014 ACS Nano 8 4033
[68] Mak K F, Lee C, Hone J, Shan J, Heinz T F 2010 Phys. Rev. Lett. 105 136805
[69] Tran V, Soklaski R, Liang Y, Yang L 2014 Phys. Rev. B 89 235319
[70] van der Zande A M, Huang P Y, Chenet D A, Berkelbach T C, You Y M, Lee G H, Heinz T F, Reichman D R, Muller D A, Hone J C 2013 Nat. Mater. 12 554
[71] Jin W, Yeh P C, Zaki N, Chenet D, Arefe G, Hao Y, Sala A, Mentes T O, Dadap J I, Locatelli A, Home J, Osgood Jr R M 2015 Phys. Rev. B 92 201409
[72] Zhu C R, Wang G, Liu B L, Marie X, Qiao X F, Zhang X, Wu X X, Fan H, Tan P H, Amand T, Urbaszek B 2013 Phys. Rev. B 88 121301
[73] Li L, Yu Y, Ye G J, Ge Q, Ou X, Wu H, Feng D, Chen X H, Zhang Y 2014 Nat. Nanotechnol. 9 372
[74] Buscema M, Groenendijk D J, Blanter S I, Steele G A, van der Zant H S, Castellanos-Gomez A 2014 Nano Lett. 14 3347
[75] Na J, Lee Y T, Lim J A, Hwang D K, Kim G T, Choi W K, Song Y W 2014 ACS Nano 8 11753
[76] Campbell P M, Tarasov A, Joiner C A, Tsai M Y, Pavlidis G, Graham S, Ready W J, Vogel E M 2016 Nanoscale 8 2268
[77] Chuang H J, Tan X, Ghimire N J, Perera M M, Chamlagain B, Cheng M M C, Yan J, Mandrus D, Tomnek D, Zhou Z 2014 Nano Lett. 14 3594
[78] Cao Y, Wei Z, Liu S, Gan L, Guo X, Xu W, Steigerwald M L, Liu Z, Zhu D 2010 Angew. Chem. 122 6463
[79] Cao Y, Liu S, Shen Q, Yan K, Li P, Xu J, Yu D, Steigerwald M L, Nuckolls C, Liu Z 2009 Adv. Funct. Mater. 19 2743
[80] Liu Y, Guo J, Wu Y C, Zhu E, Weiss N O, He Q, Wu H, Cheng H C, Xu Y, Shakir I 2016 Nano Lett. 16 6337
[81] Liu Y, Wu H, Cheng H C, Yang S, Zhu E, He Q, Ding M, Li D, Guo J, Weiss N O 2015 Nano Lett. 15 3030
[82] Miao J, Zhang S, Cai L, Scherr M, Wang C 2015 ACS Nano 9 9236
[83] Roy T, Tosun M, Kang J S, Sachid A B, Desai S B, Hettick M, Hu C M C, Javey A 2014 ACS Nano 8 6259
[84] Salvatore G A, Munzenrieder N, Barraud C, Petti L, Zysset C, Buthe L, Ensslin K, Troster G 2013 ACS Nano 7 8809
[85] Yoon J, Park W, Bae G Y, Kim Y, Jang H S, Hyun Y, Lim S K, Kahng Y H, Hong W K, Lee B H, Ko H C 2013 Small 9 3295
[86] Zhao J, Wang G L, Yang R, Lu X B, Cheng M, He C L, Xie G B, Meng J L, Shi D X, Zhang G Y 2015 ACS Nano 9 1622
[87] Powell M J 1989 IEEE Trans. Electron. Dev. 36 2753
[88] Dimitrakopoulos C D, Malenfant P R L 2002 Adv. Mater. 14 99
[89] Street R A 2009 Adv. Mater. 21 2007
[90] Zhao J, He C L, Yang R, Shi Z W, Cheng M, Yang W, Xie G B, Wang D M, Shi D X, Zhang G Y 2012 Appl. Phys. Lett. 101 063112
[91] Late D J, Liu B, Matte H S S R, Dravid V P, Rao C N R 2012 ACS Nano 6 5635
[92] Zhang S L, Choi H H, Yue H Y, Yang W C 2014 Curr. Appl. Phys. 14 264
[93] Late D J, HuangY K, Liu B, Acharya J, Shirodkar S N, Luo J J, Yan A M, Charles D, Waghmare U V, Dravid V P, Rao C N R 2013 ACS Nano 7 4879
[94] Wang Y L, Cong C X, Qiu C Y, Yu T 2013 Small 9 2857
[95] Horzum S, Sahin H, Cahangirov S, Cudazzo P, Rubio A, Serin T, Peeters F M 2013 Phys. Rev. B 87 125415
[96] Tongay S, Zhou J, Ataca C, Liu J, Kang J S, Matthews T S, You L, Li J B, Grossman J C, Wu J Q 2013 Nano Lett. 13 2831
[97] Varghese J O, Agbo P, Sutherland A M, Brar V W, Rossman G R, Gray H B, Heath J R 2015 Adv. Mater. 27 2734
期刊类型引用(8)
1. 刘春泉,熊芬,马佳仪,周锦添,梁泽巽,黄建平. 中低温退火对MoS_2纳米薄膜形貌、结构及电性能的影响. 金属热处理. 2024(07): 186-194 . 百度学术
2. 潘苏敏,黄玲琴,陶化文. 基于FET结构的MoS_2器件的研究进展. 微纳电子技术. 2022(03): 210-217 . 百度学术
3. 黄坤,王腾飞,姚激. 单层MoS_2的热弹耦合非线性板模型. 物理学报. 2021(13): 369-375 . 百度学术
4. 马春阳,杨德威,杜凯翔,常晓萌,杨培志. 少层二硫化钼薄膜的制备及其光谱特性. 半导体技术. 2020(09): 713-717+736 . 百度学术
5. 陶化文,黄玲琴,朱靖. 不同衬底上层状MoS_2薄膜制备及应用的研究进展. 半导体技术. 2020(10): 737-747+759 . 百度学术
6. 韦贤露,巩晨阳,肖剑荣. 射频反应磁控溅射制备MoS_2薄膜结构及光学性能. 真空. 2020(05): 11-13 . 百度学术
7. 石侃,张敏,祝祖送. 生长时间对二硫化钼的化学气相生长及其光电性能的影响. 中国照明电器. 2019(12): 7-11 . 百度学术
8. 冯明,郝一影,程伟琴,王泽涛,王运熙,高青环,霍二福. 高纯二硫化钼的制备方法及应用研究进展. 河南化工. 2018(10): 3-8 . 百度学术
其他类型引用(21)
Catalog
Metrics
- Abstract views: 13219
- PDF Downloads: 1019
- Cited By: 29