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应变Si/(001)S1-xGex本征载流子浓度模型

宋建军 张鹤鸣 胡辉勇 戴显英 宣荣喜

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应变Si/(001)S1-xGex本征载流子浓度模型

宋建军, 张鹤鸣, 胡辉勇, 戴显英, 宣荣喜

Model of intrinsic carrier concentration of strained Si/(001)Si1-xGex

Song Jian-Jun, Zhang He-Ming, Hu Hui-Yong, Dai Xian-Ying, Xuan Rong-Xi
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  • 利用应变Si CMOS技术提高载流子迁移率是当前研究发展的重点,本征载流子浓度是应变Si材料的重要物理参数,也是决定应变Si器件电学特性的重要参量.本文基于K.P理论框架,从分析应变Si/(001)Si1-xGex材料能带结构出发,详细推导建立了300K时与Ge组分(x)相关的本征载流子浓度模型.该数据量化模型可为Si基应变器件物理的理解及器件的研究设计提供有价值的参考.
    There is great interest in using the strained Si CMOS technology lately for carrier mobility enhancement. Intrinsic carrier concentration is the important physical parameter for the characterization of strained Si materials and the determination of the electrical properties of strained Si-based devices. Starting from analyzing the band structure of strained Si/(001)Si1-xGex,the model of its intrinsic carrier concentration related to Ge fraction (x) at 300 K was established with the frame of K.P theory,which provides valuable reference to the understanding on the strained Si-based device physics and its design.
    • 基金项目: 国家部委(批准号:51308040203,9140A08060407DZ0103,6139801)资助的课题.
    [1]

    [1]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2008 Acta Phys. Sin. 57 5918 (in Chinese )[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 5918]

    [2]

    [2]Liu H H,Duan X F,Xu Q X 2009 Micron 40 274

    [3]

    [3]Guillaume T,Mouis M 2006 Solid-State Electronics 50 701

    [4]

    [4]Zhang W R,Zeng Zh,Luo J SH 1996 Research & Progress of SSE 16 314 (in Chinese)[张万荣、曾峥、罗晋生 1996 固体电子学研究与进展 16 314]

    [5]

    [5]Song J J,Zhang H M,Hu H Y,Dai X Y,Xuan R X 2007 Chin. Phys. 16 3827

    [6]

    [6]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2008 Acta Phys. Sin. 57 7228 (in Chinese)[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 7228]

    [7]

    [7]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2009 Research & Progress of SSE 29 14 (in Chinese)[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2009 固体电子学研究与进展 29 14]

    [8]

    [8]Liu E K,Zhu B Sh,Luo J Sh 1994 Semiconductor Physics (Beijing:Defense Industry Press) p367 (in Chinese)[刘恩科、朱秉升、罗晋生 1994 半导体物理学(北京:国防工业出版社)第367页]

  • [1]

    [1]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2008 Acta Phys. Sin. 57 5918 (in Chinese )[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 5918]

    [2]

    [2]Liu H H,Duan X F,Xu Q X 2009 Micron 40 274

    [3]

    [3]Guillaume T,Mouis M 2006 Solid-State Electronics 50 701

    [4]

    [4]Zhang W R,Zeng Zh,Luo J SH 1996 Research & Progress of SSE 16 314 (in Chinese)[张万荣、曾峥、罗晋生 1996 固体电子学研究与进展 16 314]

    [5]

    [5]Song J J,Zhang H M,Hu H Y,Dai X Y,Xuan R X 2007 Chin. Phys. 16 3827

    [6]

    [6]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2008 Acta Phys. Sin. 57 7228 (in Chinese)[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 7228]

    [7]

    [7]Song J J,Zhang H M,Dian X Y,Hu H Y,Xuan R X 2009 Research & Progress of SSE 29 14 (in Chinese)[宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2009 固体电子学研究与进展 29 14]

    [8]

    [8]Liu E K,Zhu B Sh,Luo J Sh 1994 Semiconductor Physics (Beijing:Defense Industry Press) p367 (in Chinese)[刘恩科、朱秉升、罗晋生 1994 半导体物理学(北京:国防工业出版社)第367页]

计量
  • 文章访问数:  11930
  • PDF下载量:  1412
  • 被引次数: 0
出版历程
  • 收稿日期:  2009-05-13
  • 修回日期:  2009-06-23
  • 刊出日期:  2010-03-15

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