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Using radio-frequency plasma enhanced chemical vapor deposition, based on the influences of discharge power on structural and photoelectric properties of μc-SiGe:H thin films, RF power profiling technique is developed during the deposition of μc-SiGe:H intrinsic layer. The optimized μc-SiGe:H intrinsic layer not only maintains homogeneity of the crystalline volume fraction along the depth profile, but also forms a band gap profiling configuration from wide to narrow in the direction of growth. By this method, the fill factor and the short-circuit current density of μc-SiGe:H solar cell are significantly improved, and an efficiency of 9.54% for the a-Si:H/μc-SiGe:H tandem solar cell is achieved.
[1] Yan B, Yue G, Sivec L, Yang J, Guha S, Jiang C S 2011 Appl. Phys. Lett. 99 113512
[2] Zhang X D, Zheng X X, Wang G H, Xu S Z, Yue Q, Lin Q, Wei C C, Sun J, Zhang D K, Xiong S Z, Geng X H, Zhao Y 2010 Acta Phys. Sin. 59 8231 (in Chinese) [张晓丹, 郑新霞, 王光红, 许盛之, 岳强, 林泉, 魏长春, 孙建, 张德坤, 熊绍珍, 耿新华, 赵颖 2010 物理学报 59 8231]
[3] Zheng X X, Zhang X D, Yang S S, Wang G H, Xu S Z, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2011 Acta Phys. Sin 60 068801 (in Chinese) [郑新霞, 张晓丹, 杨素素, 王光红, 许盛之, 魏长春, 孙建, 耿新华, 熊绍珍, 赵颖 2011 物理学报 60 068801]
[4] Saito K, Sano M, Okabe S, Sugiyama S, Ogawa K 2005 Sol. Energy Mater. Sol. Cells 86 565
[5] Hou G F, Xue J M, Yuan Y J, Zhang X D, Sun J, Chen X L, Geng X H, Zhao Y 2012 Acta Phys. Sin 61 058403 (in Chinese) [侯国付, 薛俊明, 袁育杰, 张晓丹, 孙建, 陈新亮, 耿新华, 赵颖 2011 物理学报 61 058403]
[6] Li G J, Hou G F, Han X Y, Yuan Y J, Wei C C, Sun J, Zhao Y, Geng X H 2009 Chin. Phys. B 18 1674
[7] Deng X, Cao X, Ishikawa Y, Du W, Yang X, Das C, Vijh A 2006 Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion Hawaii, U.S.A, May, 2006 p1461
[8] Matsui T, Jia H, Fujiwara H, Kondo M 2008 23rd European Photovoltaic Solar Energy Conference Valencia, Spain, September, 2008 p2113
[9] Ganguly G, Ikeda T, Nishimiya T, Saitoh K, Kondo M, Matsuda A 1996 Appl. Phys. Lett. 69 4224
[10] Zhang L P, Zhang J J, Zhang X, Shang Z R, Hu Z X, Zhang Y P, Geng X H, Zhao Y 2008 Acta Phys. Sin. 57 7338 (in Chinese) [张丽平, 张建军, 张鑫, 尚泽仁, 胡增鑫, 张亚萍, 耿新华, 赵颖 2008 物理学报 57 7338]
[11] Zhang L P, Zhang J J, Shang Z R, Hu Z X, Geng X H, Zhao Y 2008 Chin. Phys. B 17 3448
[12] Rath J K, Tichelaar F D, Schropp R E I 2002 Sol. Energy Mater. Sol. Cells 74 553
[13] Isomura M, Nakahata K, Shima M Taira S, Wakisaka K, Tanaka M, Kiyama S 2002 Sol. Energy Mater. Sol. Cells 74 519
[14] Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2009 Sol. Energy Mater Sol. Cells 93 1100
[15] Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2008 Appl. Phys. Express 1 031501
[16] Matsui T, Jia H, Kondo M, Mizuno K, Tsuruga S, Sakai S, Takeuchi Y 2010 2010 35th IEEE Photovoltaic Specialists Conference (PVSC), Hawaii, U.S.A, June, 2010 p000311
[17] Cao Y, Zhang J J, Ni J, Wang X B, Huang Z H, Sun J, Geng X H, Zhao Y 2010 the 11th China Solar PV Conference and Exhibition Nanjing, China, November, 2010 p600 (in Chinese) [曹宇, 张建军, 倪牮, 王先宝, 黄振华, 孙建, 耿新华, 赵颖 2010 第十一届中国太阳能光伏会议暨展会 南京 2010 第600页]
[18] Amanatides E, Stamou S, Mataras D 2001 J. Appl. Phys. 90 5786
[19] Luo Y 2005 Comprehensive Handbook of Chemical Bond Energies (Beijing: Science Press) p300 (in Chinese) [罗渝然 2005 化学键能数据手册 (北京: 科学出版社) 第300页]
[20] Han X Y, Hou G F, Zhang X D, Wei C C, Li G J, Zhang J J, Chen X L, Zhang D K, Sun J, Zhao Y, Geng X H 2010 Sol. Energy Mater. Sol. Cells 94 254
[21] Yan B, Yue G, Yang J, Guha S, Williamson D L, Han D, Jiang C S 2004 Appl. Phys. Lett. 85 1955
[22] Lundszien D, Finger F, Wagner H 2002 Sol. Energy Mater. Sol. Cells 74 365
[23] Guha S, Yang J, Pawlikiewicz A, Glatfelter T, Ross R, Ovshinsky S R 1989 Appl. Phys. Lett. 54 2330
[24] Jiang Z X, Kim K, Lerma J, Corbett A, Sieloff D, Kottke M, Gregory R, Schauer S 2006 Appl. Surf. Sci. 252 7262
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[1] Yan B, Yue G, Sivec L, Yang J, Guha S, Jiang C S 2011 Appl. Phys. Lett. 99 113512
[2] Zhang X D, Zheng X X, Wang G H, Xu S Z, Yue Q, Lin Q, Wei C C, Sun J, Zhang D K, Xiong S Z, Geng X H, Zhao Y 2010 Acta Phys. Sin. 59 8231 (in Chinese) [张晓丹, 郑新霞, 王光红, 许盛之, 岳强, 林泉, 魏长春, 孙建, 张德坤, 熊绍珍, 耿新华, 赵颖 2010 物理学报 59 8231]
[3] Zheng X X, Zhang X D, Yang S S, Wang G H, Xu S Z, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2011 Acta Phys. Sin 60 068801 (in Chinese) [郑新霞, 张晓丹, 杨素素, 王光红, 许盛之, 魏长春, 孙建, 耿新华, 熊绍珍, 赵颖 2011 物理学报 60 068801]
[4] Saito K, Sano M, Okabe S, Sugiyama S, Ogawa K 2005 Sol. Energy Mater. Sol. Cells 86 565
[5] Hou G F, Xue J M, Yuan Y J, Zhang X D, Sun J, Chen X L, Geng X H, Zhao Y 2012 Acta Phys. Sin 61 058403 (in Chinese) [侯国付, 薛俊明, 袁育杰, 张晓丹, 孙建, 陈新亮, 耿新华, 赵颖 2011 物理学报 61 058403]
[6] Li G J, Hou G F, Han X Y, Yuan Y J, Wei C C, Sun J, Zhao Y, Geng X H 2009 Chin. Phys. B 18 1674
[7] Deng X, Cao X, Ishikawa Y, Du W, Yang X, Das C, Vijh A 2006 Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion Hawaii, U.S.A, May, 2006 p1461
[8] Matsui T, Jia H, Fujiwara H, Kondo M 2008 23rd European Photovoltaic Solar Energy Conference Valencia, Spain, September, 2008 p2113
[9] Ganguly G, Ikeda T, Nishimiya T, Saitoh K, Kondo M, Matsuda A 1996 Appl. Phys. Lett. 69 4224
[10] Zhang L P, Zhang J J, Zhang X, Shang Z R, Hu Z X, Zhang Y P, Geng X H, Zhao Y 2008 Acta Phys. Sin. 57 7338 (in Chinese) [张丽平, 张建军, 张鑫, 尚泽仁, 胡增鑫, 张亚萍, 耿新华, 赵颖 2008 物理学报 57 7338]
[11] Zhang L P, Zhang J J, Shang Z R, Hu Z X, Geng X H, Zhao Y 2008 Chin. Phys. B 17 3448
[12] Rath J K, Tichelaar F D, Schropp R E I 2002 Sol. Energy Mater. Sol. Cells 74 553
[13] Isomura M, Nakahata K, Shima M Taira S, Wakisaka K, Tanaka M, Kiyama S 2002 Sol. Energy Mater. Sol. Cells 74 519
[14] Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2009 Sol. Energy Mater Sol. Cells 93 1100
[15] Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2008 Appl. Phys. Express 1 031501
[16] Matsui T, Jia H, Kondo M, Mizuno K, Tsuruga S, Sakai S, Takeuchi Y 2010 2010 35th IEEE Photovoltaic Specialists Conference (PVSC), Hawaii, U.S.A, June, 2010 p000311
[17] Cao Y, Zhang J J, Ni J, Wang X B, Huang Z H, Sun J, Geng X H, Zhao Y 2010 the 11th China Solar PV Conference and Exhibition Nanjing, China, November, 2010 p600 (in Chinese) [曹宇, 张建军, 倪牮, 王先宝, 黄振华, 孙建, 耿新华, 赵颖 2010 第十一届中国太阳能光伏会议暨展会 南京 2010 第600页]
[18] Amanatides E, Stamou S, Mataras D 2001 J. Appl. Phys. 90 5786
[19] Luo Y 2005 Comprehensive Handbook of Chemical Bond Energies (Beijing: Science Press) p300 (in Chinese) [罗渝然 2005 化学键能数据手册 (北京: 科学出版社) 第300页]
[20] Han X Y, Hou G F, Zhang X D, Wei C C, Li G J, Zhang J J, Chen X L, Zhang D K, Sun J, Zhao Y, Geng X H 2010 Sol. Energy Mater. Sol. Cells 94 254
[21] Yan B, Yue G, Yang J, Guha S, Williamson D L, Han D, Jiang C S 2004 Appl. Phys. Lett. 85 1955
[22] Lundszien D, Finger F, Wagner H 2002 Sol. Energy Mater. Sol. Cells 74 365
[23] Guha S, Yang J, Pawlikiewicz A, Glatfelter T, Ross R, Ovshinsky S R 1989 Appl. Phys. Lett. 54 2330
[24] Jiang Z X, Kim K, Lerma J, Corbett A, Sieloff D, Kottke M, Gregory R, Schauer S 2006 Appl. Surf. Sci. 252 7262
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