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SIMS ANALYSIS OF MIGRATION CHARACTERISTICS OF FLUORINE IN BF2+ IMPLANTED POLY-Si GATE UNDER CONVENTIONAL THERMAL ANNEALING

LIU JIA-LU ZHANG TING-QING LI JIAN-JUN ZHAO YUAN-FU

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SIMS ANALYSIS OF MIGRATION CHARACTERISTICS OF FLUORINE IN BF2+ IMPLANTED POLY-Si GATE UNDER CONVENTIONAL THERMAL ANNEALING

LIU JIA-LU, ZHANG TING-QING, LI JIAN-JUN, ZHAO YUAN-FU
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  • Received Date:  04 November 1996
  • Published Online:  05 April 1997

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