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Magnetic sensors are widely used in the fields of navigation, transportation, robotics, automation, and medical equipment, and the performance requirements of sensors are getting higher and higher. In this work, a bimodal magnetic sensor with two operating modes, which has the advantages of large range and low noise, is proposed. The sensor consists of a 640 μH core-wound inductor in series with a 100 pF capacitor. When the external magnetic field changes, the magnetization state of the iron core in the inductor will change, the inductance value will change accordingly. The resonant frequency and impedance value of the sensor will also change with the magnetic field. In this work, the giant magnetic impedance characteristics of an RLC series circuit are analyzed, and the relationship between magnetic permeability, inductance value, and external magnetic field is established, and the series resonant frequency of the circuit is simulated to calculate the characteristics of the circuit with respect to the inductance variation.Then, two testing systems are set up to test the relationship between resonance frequency and magnetic field, as well as the noise characteristics of the sensor. In the impedance mode, the effects of capacitance, drive signal frequency, and static bias magnetic field on the sensor noise floor are first analyzed to determine the optimal parameters of the sensor. When the series capacitance of the sensor is 100 pF, the drive signal frequency will be 1 MHz and the static bias magnetic field will be 7.66 Oe. The sensor has the optimal performance with an equivalent noise floor of about $ {200}\;{\text{pT/}}\sqrt {{\text{Hz}}} @1 {\text{Hz}} $, an impedance rate of change sensitivity of 160.6%/Oe, and a linear range of about 2 Oe. In the frequency mode, the sensor operates linearly up to 25 Oe. A logistic regression model is used to fit the resonant frequency to the magnetic field variation, and the fitted value reaches 0.9974. When the static bias magnetic field is about 7.66 Oe, the sensor sensitivity will be about 47 kHz/Oe. Moreover, compared with other common types of magnetic sensors on the market, this sensor has the commercial component cost of only ¥10, and excellent performance, and huge market potential.
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Keywords:
- magnetic sensor /
- bimodal /
- low noise /
- wide-range
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图 1 电感与电容串联后的等效电路模型
Figure 1. Equivalent circuit model of inductor and capacitor in series.
图 2 等效电路串联谐振仿真 (a) RLC串联等效电路模型仿真结果; (a) 串联谐振频率随电感的变化
Figure 2. Equivalent circuit series resonance simulation: (a) Simulation results obtained by RLC series equivalent circuit model; (b) variation of series resonance frequency with inductance.
图 3 电感元件特征 (a) 电感实物图; (b) 电感值随磁场的变化
Figure 3. Inductor characteristic: (a) Physical drawings of inductors; (b) variation of inductance value with magnetic field.
图 4 谐振频率-磁场传感器测试平台
Figure 4. Resonant frequency-magnetic field sensor test platform.
图 5 阻抗-磁场传感器测试平台
Figure 5. Impedance-magnetic field sensor test platform.
图 6 不同条件下的最小等效磁噪声与激励信号频率关系 (a) 电容为91 pF; (b) 电容为100 pF; (c) 电容为110 pF; (d) 电容为120 pF
Figure 6. Relationship between minimum equivalent magnetic noise and frequency of excitation signal under different conditions: (a) The capacitance is 91 pF; (b) the capacitance is 100 pF; (c) the capacitance is 110 pF; (d) the capacitance is 120 pF.
图 7 GMI传感器特性 (a)不同频率激励信号时GMI传感器的阻抗随磁场的变化; (b) 不同频率激励信号时GMI传感器阻抗变化率随磁场的变化; (c) 不同频率激励信号时GMI传感器阻抗变化率灵敏度随磁场的变化; (d) 在施加3 nT和300 pT的微弱磁信号时GMI传感器的等效磁噪声幅度谱; (e) 传感器阻抗随外加磁场的变化以及线性拟合曲线; (f) 施加1 Hz正弦交流磁信号时传感器的阻抗变化量随磁场强度的变化
Figure 7. GMI sensor characteristics: (a) The impedance of GMI sensor vs. magnetic field for different frequency excitation signals; (b) the impedance variation of GMI sensor vs. magnetic field for different frequency excitation signals; (c) impedance change rate sensitivity of GMI sensor vs. magnetic field for different frequency excitation signals; (d) the equivalent magnetic noise amplitude spectrum of the GMI sensor when a weak magnetic signal of 3 nT or 300 pT is applied; (e) sensor impedance vs. applied magnetic field and corresponding linear fitting curve; (f) sensor impedance variation vs. magnetic field intensity when 1 Hz sinusoidal AC magnetic signal is applied.
图 8 磁传感器谐振频率随磁场强度的变化及拟合曲线
Figure 8. Resonance frequency of magnetic sensor vs. magnetic field intensity curve and corresponding fitting curve.
图 9 谐振频率-磁场数值拟合曲线及灵敏度曲线
Figure 9. Resonance frequency vs. magnetic field fitting curve and sensitivity curve.
表 1 最小等效磁噪声及其对应参数
Table 1. Minimum equivalent magnetic noise and its corresponding parameters.
电容值/pF 最小等效磁
噪声/nT激励信号
频率/MHz偏置磁场/Oe 91 0.55 0.8 7.66 100 0.49 1 7.66 110 0.75 1 5.9 120 0.59 1 7.66 
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表 2 双模态磁传感器与商用磁传感器对比
Table 2. Comparison of dual-mode magnetic sensor and commercial magnetic sensor.
类型 型号 厂家 本底噪声/
(nT@1 Hz)量程/
±Oe灵敏度 截止频率 价格
￥AMR MMC5983 MA 美新半导体 40 8 — 1 kHz ~34 AMR HMC1001 霍尼韦尔 0.5 5 3.2 mV/(V·Oe) 5 MHz ~100 GMR AA002 NVE 2 15 36 mV/(V·Oe) 1 MHz ~150 TMR TMR2901 多维 2 8 25 mV/(V·Oe) — ~350 TMR TLI5590 - A6 W 英飞凌 — 50 1.85 mV/(V·Oe) 5 kHz ~20 TMR CT815 X Allegro — 80 5 mV/(V·Oe) 100 Hz ~10 Microfluxgate DRV425 德州仪器 4 20 1.22 mA/Oe 32 kHz ~30 Fluxgate Mag651 Bartington ~0.02 0.6 5 V/Oe 5 Hz >35000 Hall DRV5055
A1/Z1德州仪器 130 210 10 mV/Oe 20 kHz ~10 GMI MI-CB-1 DJ Aichi ~0.1 0.02 500 V/Oe 10 kHz ~10000 GMI GC-CC-101 A 国创智能 ~0.06 0.6 — 2 kHz ~5000 LC串联磁传感器 阻抗模式 — ~0.2 6—8 Oe 160.6%/Oe — ~10 频率模式 — — 5—30 Oe 47 kHz/Oe(max) — ~10
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