搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

三阶分布反馈太赫兹量子级联激光器的远场分布特性

朱永浩 黎华 万文坚 周涛 曹俊诚

引用本文:
Citation:

三阶分布反馈太赫兹量子级联激光器的远场分布特性

朱永浩, 黎华, 万文坚, 周涛, 曹俊诚

Far-field analysis of third-order distributed feedback terahertz quantum cascade lasers

Zhu Yong-Hao, Li Hua, Wan Wen-Jian, Zhou Tao, Cao Jun-Cheng
PDF
导出引用
  • 研究了三阶分布反馈太赫兹量子级联激光器的设计、制作并分析了其纵模和横模特性.通过建立波导结构模型,利用有限元方法模拟激光器波导结构内的三维模场分布,通过本征模的损耗分析器件的纵模模式选择机理.同时,由本征模的近场通过近-远场傅里叶变换求得激光器的远场分布.采用半导体工艺制作了4.3 THz双面金属波导三阶分布反馈量子级联激光器,测量了不同器件的发射谱和远场光束质量,远场发散角为1213,实验结果和理论模拟符合.
    The single lobe far-field patterns produced from terahertz quantum cascade lasers (QCLs) are greatly demanded for various applications, such as imaging, data transmission, etc. However, for a ridge waveguide terahertz QCL, the far-field beam divergence is large due to the fact that the waveguide aperture is far smaller than the terahertz wavelength. This is the case typically for double-metal waveguide terahertz QCL which emits terahertz photons in almost every direction in the space. Even for a single plasmon waveguide terahertz QCL, the divergence angle is as large as 30 in both horizontal and vertical direction. Here, in this work we design and fabricate a double metal third-order distributed feedback terahertz QCL emitting around 4.3 THz, and investigate the characteristics of the longitudinal and transverse modes. This work aims to achieve high beam quality for terahertz QCL by exploiting the third-order distributed feedback geometry, and in the meantime to achieve single longitudinal mode operation. The electromagnetic field distribution in the waveguide is modelled by employing a finite element method. The mode selection mechanism is studied by using the eigen frequency analysis, and the far-field beam is simulated by applying the near-field to far-field Fourier transform technique. The QCL active region used in this work is based on the resonant-phonon design, which is grown by a molecular beam epitaxy (MBE) system on a semi-insulating GaAs (100) substrate. The wafer bonding and traditional semiconductor device fabrication technology, i.e., optical lithography, electron beam evaporation, lift-off, wet and dry etching, are used to process the MBE-growth wafer into the third-order distributed feedback geometry with double-metal waveguides. By carefully designing the grating structures and optimizing the fabrication process, we achieve third-order distributed feedback terahertz QCL with quasi-single-longitudinal mode operation and single lobe far-field beam pattern with low beam divergence in both vertical and horizontal directions. The effect of grating duty cycle on the far-field beam divergence is systematically studied theoretically and experimentally. By the simulation, we finally achieve the divergence angle of 1213 for a third-order distributed feedback laser with a grating duty cycle of 12% that results in an effective refractive index close to 3. The experimental results show good agreement with the simulation. There is still room to further reduce the beam divergence of third-order distributed feedback terahertz QCL by improve the accuracy of the simulation and the fabrication.
      通信作者: 黎华, hua.li@mail.sim.ac.cn;jccao@mail.sim.ac.cn ; 曹俊诚, hua.li@mail.sim.ac.cn;jccao@mail.sim.ac.cn
    • 基金项目: 中国科学院百人计划、国家重点基础研究发展计划(批准号:2014CB339803)、国家重大科学仪器设备开发专项(批准号:2011YQ150021)、国家自然科学基金(批准号:61575214,61404149,61404150,61604161)和上海市科学技术委员会(批准号:14530711300,15560722000,14ZR1447400,15YF1414400,15JC1403800)资助的课题.
      Corresponding author: Li Hua, hua.li@mail.sim.ac.cn;jccao@mail.sim.ac.cn ; Cao Jun-Cheng, hua.li@mail.sim.ac.cn;jccao@mail.sim.ac.cn
    • Funds: Project supported by the Hundred-Talent Program of Chinese Academy of Sciences, the National Basic Research Program of China (Grant No. 2014CB339803), the Major National Development Project of Scientific Instrument and Equipment of China (Grant No. 2011YQ150021), the National Natural Science Foundation of China (Grant Nos. 61575214, 61404149, 61404150, 61604161), and the Shanghai Municipal Commission of Science and Technology, China (Grant Nos. 14530711300, 15560722000, 14ZR1447400, 15YF1414400, 15JC1403800).
    [1]

    Song H J, Ajito K, Mumoto Y, Wakatsuki A, Nagatsua T, Kukutsu N 2012 Electron. Lett. 48 953

    [2]

    Asada M, Suzuki S, Kishimoto N 2008 Jpn. J. Appl. Phys. 47 4375

    [3]

    Ropagnol X, Khorasaninejad M, Raeiszadeh M, Safavi-Naeini S, Bouvier N, Côté C Y, Laramée A, Reid M, Gauthier M A, Ozaki T 2016 Opt. Express 24 11299

    [4]

    Köhler R, Tredicucci A, Beltram F, Beere H E, Linfield E H, Davies A G, Ritchie D A, Lotti R C, Rossi F 2002 Nature 417 156

    [5]

    Borri S, Patimisco P, Sampaolo A, Beere H E, Ritchie D A, Vitiello M S, Scamarcio G, Spagnolo V 2013 Appl. Phys. Lett. 103 021105

    [6]

    Vitiello M S, Consolino L, Bartalini S, Taschin A, Tredicucci A, Inguscio M, Natale P D 2012 Nat. Photon. 6 525

    [7]

    Kumar S 2011 IEEE J. Sel. Top. Quant. 17 38

    [8]

    Wienold M, Röben B, Schrottke L, Sharma R, Tahraoui A, Biermann K, Grahn H T 2014 Opt. Express 22 3334

    [9]

    Williams B S, Kumar S, Callebaut H, Hu Q, Reno J L 2003 Appl. Phys. Lett. 83 2124

    [10]

    Li H, Cao J C, Tan Z Y, Feng S L 2008 J. Appl. Phys. 104 103101

    [11]

    Wienold M, Tahraoui A, Schrottke L, Sharma R, L X, Biermann K, Hey R, Grahn H T 2012 Opt. Express 20 11207

    [12]

    Kumar S, Williams B S, Qin Q, Lee A W M, Hu Q 2007 Opt. Express 15 113

    [13]

    Li H, Manceau J M, Andronico A, Jagtap V, Sirtori C, Li L H, Linfield E H, Davies A G, Barbieri S 2014 Appl. Phys. Lett. 104 241102

    [14]

    Benz A, Fasching G, Deutsch C, Andrews A M, Unterrainer K, Klang P, Schrenk W, Strasser G 2007 Opt. Express 15 12418

    [15]

    Liang G Z, Liang H K, Zhang Y, Khanna S P, Li L H, Davies A G, Linfield E, Lim D F, Tan C S, Yu S F, Liu H C, Wang Q J 2013 Appl. Phys. Lett. 102 031119

    [16]

    Xu G Y, Colombelli R, Khanna S P, Belarouci A, Letartre X, Li L H, Linfield E H, Davies A G, Beere H E, Ritchie D A 2012 Nat. Commun. 3 952

    [17]

    Amanti M I, Fischer M, Scalari G, Beck M, Faist J 2009 Nat. Photon. 3 586

    [18]

    Cui M, Hovenier J N, Ren Y, Vercruyssen N, Gao J R, Kao T Y, Hu Q, Reno J L 2013 Appl. Phys. Lett. 102 111113

    [19]

    Amanti M I 2010 Ph. D. Dissertation (Napoli: Universitá degli Studi di Napoli Federico II)

    [20]

    Williams B S, Kumar S, Hu Q, Reno J L 2006 Electron. Lett. 42 89

    [21]

    Xu T H, Yao C, Wan W J, Zhu Y H, Cao J C 2015 Acta Phys. Sin. 64 224212 (in Chinese) [徐天鸿, 姚辰, 万文坚, 朱永浩, 曹俊诚 2015 物理学报 64 224212]

    [22]

    Wan W J, Yin R, Tan Z Y, Wang F, Han Y J, Cao J C 2013 Acta Phys. Sin. 62 210701 (in Chinese) [万文坚, 尹嵘, 谭智勇, 王丰, 韩英军, 曹俊诚 2013 物理学报 62 210701]

  • [1]

    Song H J, Ajito K, Mumoto Y, Wakatsuki A, Nagatsua T, Kukutsu N 2012 Electron. Lett. 48 953

    [2]

    Asada M, Suzuki S, Kishimoto N 2008 Jpn. J. Appl. Phys. 47 4375

    [3]

    Ropagnol X, Khorasaninejad M, Raeiszadeh M, Safavi-Naeini S, Bouvier N, Côté C Y, Laramée A, Reid M, Gauthier M A, Ozaki T 2016 Opt. Express 24 11299

    [4]

    Köhler R, Tredicucci A, Beltram F, Beere H E, Linfield E H, Davies A G, Ritchie D A, Lotti R C, Rossi F 2002 Nature 417 156

    [5]

    Borri S, Patimisco P, Sampaolo A, Beere H E, Ritchie D A, Vitiello M S, Scamarcio G, Spagnolo V 2013 Appl. Phys. Lett. 103 021105

    [6]

    Vitiello M S, Consolino L, Bartalini S, Taschin A, Tredicucci A, Inguscio M, Natale P D 2012 Nat. Photon. 6 525

    [7]

    Kumar S 2011 IEEE J. Sel. Top. Quant. 17 38

    [8]

    Wienold M, Röben B, Schrottke L, Sharma R, Tahraoui A, Biermann K, Grahn H T 2014 Opt. Express 22 3334

    [9]

    Williams B S, Kumar S, Callebaut H, Hu Q, Reno J L 2003 Appl. Phys. Lett. 83 2124

    [10]

    Li H, Cao J C, Tan Z Y, Feng S L 2008 J. Appl. Phys. 104 103101

    [11]

    Wienold M, Tahraoui A, Schrottke L, Sharma R, L X, Biermann K, Hey R, Grahn H T 2012 Opt. Express 20 11207

    [12]

    Kumar S, Williams B S, Qin Q, Lee A W M, Hu Q 2007 Opt. Express 15 113

    [13]

    Li H, Manceau J M, Andronico A, Jagtap V, Sirtori C, Li L H, Linfield E H, Davies A G, Barbieri S 2014 Appl. Phys. Lett. 104 241102

    [14]

    Benz A, Fasching G, Deutsch C, Andrews A M, Unterrainer K, Klang P, Schrenk W, Strasser G 2007 Opt. Express 15 12418

    [15]

    Liang G Z, Liang H K, Zhang Y, Khanna S P, Li L H, Davies A G, Linfield E, Lim D F, Tan C S, Yu S F, Liu H C, Wang Q J 2013 Appl. Phys. Lett. 102 031119

    [16]

    Xu G Y, Colombelli R, Khanna S P, Belarouci A, Letartre X, Li L H, Linfield E H, Davies A G, Beere H E, Ritchie D A 2012 Nat. Commun. 3 952

    [17]

    Amanti M I, Fischer M, Scalari G, Beck M, Faist J 2009 Nat. Photon. 3 586

    [18]

    Cui M, Hovenier J N, Ren Y, Vercruyssen N, Gao J R, Kao T Y, Hu Q, Reno J L 2013 Appl. Phys. Lett. 102 111113

    [19]

    Amanti M I 2010 Ph. D. Dissertation (Napoli: Universitá degli Studi di Napoli Federico II)

    [20]

    Williams B S, Kumar S, Hu Q, Reno J L 2006 Electron. Lett. 42 89

    [21]

    Xu T H, Yao C, Wan W J, Zhu Y H, Cao J C 2015 Acta Phys. Sin. 64 224212 (in Chinese) [徐天鸿, 姚辰, 万文坚, 朱永浩, 曹俊诚 2015 物理学报 64 224212]

    [22]

    Wan W J, Yin R, Tan Z Y, Wang F, Han Y J, Cao J C 2013 Acta Phys. Sin. 62 210701 (in Chinese) [万文坚, 尹嵘, 谭智勇, 王丰, 韩英军, 曹俊诚 2013 物理学报 62 210701]

  • [1] 葛宏义, 李丽, 蒋玉英, 李广明, 王飞, 吕明, 张元, 李智. 基于双开口金属环的太赫兹超材料吸波体传感器. 物理学报, 2022, 71(10): 108701. doi: 10.7498/aps.71.20212303
    [2] 朱照照, 冯正, 蔡建旺. 基于IrMn/Fe/Pt交换偏置结构的无场自旋太赫兹源. 物理学报, 2022, 71(4): 048703. doi: 10.7498/aps.71.20211831
    [3] 庞慧中, 王鑫, 王俊林, 王宗利, 刘苏雅拉图, 田虎强. 双频带太赫兹超材料吸波体传感器传感特性. 物理学报, 2021, 70(16): 168101. doi: 10.7498/aps.70.20210062
    [4] 惠战强. 低损耗大带宽双芯负曲率太赫兹光纤偏振分束器. 物理学报, 2021, (): . doi: 10.7498/aps.70.20211650
    [5] 朱照照, 冯正, 蔡建旺. 基于IrMn/Fe/Pt交换偏置结构的无场自旋太赫兹源. 物理学报, 2021, (): . doi: 10.7498/aps.70.20211831
    [6] 高强, 李小秋, 周志鹏, 孙磊. 基于分形谐振器的远场超分辨率扫描成像. 物理学报, 2019, 68(24): 244102. doi: 10.7498/aps.68.20190620
    [7] 李金锋, 万婷, 王腾飞, 周文辉, 莘杰, 陈长水. 太赫兹量子级联激光器中有源区上激发态电子向高能级泄漏的研究. 物理学报, 2019, 68(2): 021101. doi: 10.7498/aps.68.20181882
    [8] 周康, 黎华, 万文坚, 李子平, 曹俊诚. 太赫兹量子级联激光器频率梳的色散. 物理学报, 2019, 68(10): 109501. doi: 10.7498/aps.68.20190217
    [9] 魏相飞, 何锐, 张刚, 刘向远. InAs/GaSb量子阱中太赫兹光电导特性. 物理学报, 2018, 67(18): 187301. doi: 10.7498/aps.67.20180769
    [10] 张真真, 黎华, 曹俊诚. 高速太赫兹探测器. 物理学报, 2018, 67(9): 090702. doi: 10.7498/aps.67.20180226
    [11] 魏伟华, 李木天, 刘墨南. 基于飞秒激光直写的单向单模耦合微腔. 物理学报, 2018, 67(6): 064203. doi: 10.7498/aps.67.20172395
    [12] 杨磊, 范飞, 陈猛, 张选洲, 常胜江. 多功能太赫兹超表面偏振控制器. 物理学报, 2016, 65(8): 080702. doi: 10.7498/aps.65.080702
    [13] 姜子伟, 白晋军, 侯宇, 王湘晖, 常胜江. 太赫兹双空芯光纤定向耦合器. 物理学报, 2013, 62(2): 028702. doi: 10.7498/aps.62.028702
    [14] 万文坚, 尹嵘, 谭智勇, 王丰, 韩英军, 曹俊诚. 2.9THz束缚态向连续态跃迁量子级联激光器研制. 物理学报, 2013, 62(21): 210701. doi: 10.7498/aps.62.210701
    [15] 白晋军, 王昌辉, 侯宇, 范飞, 常胜江. 太赫兹双芯光子带隙光纤定向耦合器. 物理学报, 2012, 61(10): 108701. doi: 10.7498/aps.61.108701
    [16] 谭智勇, 陈镇, 韩英军, 张戎, 黎华, 郭旭光, 曹俊诚. 基于太赫兹量子级联激光器的无线信号传输的实现. 物理学报, 2012, 61(9): 098701. doi: 10.7498/aps.61.098701
    [17] 黎华, 韩英军, 谭智勇, 张戎, 曹俊诚. 半绝缘等离子体波导太赫兹量子级联激光器工艺研究. 物理学报, 2010, 59(3): 2169-2172. doi: 10.7498/aps.59.2169
    [18] 常俊, 黎华, 韩英军, 谭智勇, 曹俊诚. 太赫兹量子级联激光器材料生长及表征. 物理学报, 2009, 58(10): 7083-7087. doi: 10.7498/aps.58.7083
    [19] 丁 莉, 刘代中, 高妍琦, 朱宝强, 朱 俭, 彭增云, 朱健强, 俞立钧. 高功率激光装置光束准直系统新型远场监测技术. 物理学报, 2008, 57(9): 5713-5717. doi: 10.7498/aps.57.5713
    [20] 王忠纯. 介观耗散传输线的量子化. 物理学报, 2003, 52(11): 2870-2874. doi: 10.7498/aps.52.2870
计量
  • 文章访问数:  3260
  • PDF下载量:  170
  • 被引次数: 0
出版历程
  • 收稿日期:  2017-02-20
  • 修回日期:  2017-02-24
  • 刊出日期:  2017-05-05

三阶分布反馈太赫兹量子级联激光器的远场分布特性

    基金项目: 中国科学院百人计划、国家重点基础研究发展计划(批准号:2014CB339803)、国家重大科学仪器设备开发专项(批准号:2011YQ150021)、国家自然科学基金(批准号:61575214,61404149,61404150,61604161)和上海市科学技术委员会(批准号:14530711300,15560722000,14ZR1447400,15YF1414400,15JC1403800)资助的课题.

摘要: 研究了三阶分布反馈太赫兹量子级联激光器的设计、制作并分析了其纵模和横模特性.通过建立波导结构模型,利用有限元方法模拟激光器波导结构内的三维模场分布,通过本征模的损耗分析器件的纵模模式选择机理.同时,由本征模的近场通过近-远场傅里叶变换求得激光器的远场分布.采用半导体工艺制作了4.3 THz双面金属波导三阶分布反馈量子级联激光器,测量了不同器件的发射谱和远场光束质量,远场发散角为1213,实验结果和理论模拟符合.

English Abstract

参考文献 (22)

目录

    /

    返回文章
    返回