原子台阶调控二维单晶材料生长

常超; 寇金宗; 徐小志

doi:10.7498/aps.72.20230887

摘要

自2004年成功实现石墨烯的机械剥离制备以来, 二维材料凭借其独特的结构和物理化学性质, 在电子、光电和能源等领域引起了广泛的研究和发展. 在合成方法方面, 科研人员在传统的机械剥离、液相剥离、气相沉积、湿化学合成以及纳米材料相工程等基础上, 进一步推进了原子台阶方法, 用于制备高质量、大尺寸二维单晶材料(2DSCM). 本文详细介绍了近几年关于原子台阶调控2DSCM生长的代表性工作. 首先, 对研究背景进行了简要介绍; 然后, 讨论了2DSCM的主要合成方法, 并分析了外延制备非中心对称材料的困难及原因; 之后, 介绍了通过原子台阶辅助制备2DSCM的生长机制和最新进展, 分析了原子台阶调控2DSCM成核的理论基础及通用性, 并对未来实现大尺寸、方向可控的2DSCM的挑战和发展方向进行了预测; 最后, 系统展望了台阶方法制备大尺寸2DSCM在未来规模化芯片器件方向的潜在应用.

关键词:

Abstract

Since the successful mechanical exfoliation of graphene in 2004, two-dimensional materials have aroused extensive research and fast developed in various fields such as electronics, optoelectronics and energy, owing to their unique structural and physicochemical properties. In terms of synthesis methods, researchers have made further advancements in the atomic step method, building upon traditional techniques such as mechanical exfoliation, liquid-phase exfoliation, vapor-phase deposition, wet chemical synthesis, and nanomaterial self-assembly. These efforts aim to achieve high-quality large-scale two-dimensional single crystal materials. In this article, the representative research on the growth of two-dimensional single crystal materials controlled by atomic steps in recent years is reviewed in detail. To begin with, the research background is briefly introduced, then the main synthesis methods of two-dimensional single crystal materials are discussed and the challenges and reasons for the difficulty in epitaxially preparing non-centrosymmetric materials are analyzed. Subsequently, the growth mechanisms and recent advances in the preparation of two-dimensional single crystal materials assisted by atomic steps are presented. The theoretical basis and universality of atomic step-controlled nucleation in two-dimensional single crystal material are analyzed. Furthermore, the challenges and future directions for achieving large-scale, directionally controllable two-dimensional single crystal materials are predicted. Finally, potential applications of the step method in the future scalable chip device fabrication are systematically discussed.

Keywords:

two-dimensional single crystal materials /
atomic steps /
non-centrosymmetry /
epitaxial growth

作者及机构信息

1.
华南师范大学物理学院, 广东省量子调控工程与材料重点实验室, 广州　510006

2.
华南师范大学物理前沿科学研究院, 粤港量子物质联合实验室, 广州　510006

通信作者: 寇金宗, jinzongkou@scnu.edu.cn ; 徐小志, xiaozhixu@scnu.edu.cn

基金项目: 广东省自然科学基金杰出青年项目(批准号: 2020B1515020043)、广东省基础与应用基础研究基金(批准号: 2019A1515110302)和国家自然科学基金(批准号: 52102043)资助的课题.

Authors and contacts

1.
Guangdong Provincial Key Laboratory of Quantum Engineering and Quantum Materials, School of Physics, South China Normal University, Guangzhou 510006, China

2.
Guangdong-Hong Kong Joint Laboratory of Quantum Matter, Frontier Research Institutefor Physics, South China Normal University, Guangzhou 510006, China

Corresponding author: Kou Jin-Zong, jinzongkou@scnu.edu.cn ; Xu Xiao-Zhi, xiaozhixu@scnu.edu.cn

Funds: Project supported by the Guangdong Basic and Applied Basic Research Foundation (Grant Nos. 2020B1515020043, 2019A1515110302) and the National Natural Science Foundation of China (Grant No. 52102043).

文章全文 : translate this paragraph

参考文献

[1]	Novoselov K S, Geim A K, Morozov S V, Jiang D E, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666 Google Scholar
[2]	Manzeli S, Ovchinnikov D, Pasquier D, Yazyev O V, Kis A 2017 Nat. Rev. Mater. 2 17033 Google Scholar
[3]	Huang H, Zha J, Li S, Tan C 2022 Chinese Chem. Lett. 33 163 Google Scholar
[4]	Zhang J, Tan B, Zhang X, Gao F, Hu Y, Wang L, Duan X, Yang Z, Hu P 2021 Adv. Mater. 33 2000769 Google Scholar
[5]	Caldwell J D, Aharonovich I, Cassabois G, Edgar J H, Gil B, Basov D N 2019 Nat. Rev. Mater. 4 552 Google Scholar
[6]	Miró P, Ghorbani-Asl M, Heine T 2014 Angew. Chem. Int. Edit. 53 3015 Google Scholar
[7]	Pi L, Li L, Liu K, Zhang Q, Li H, Zhai T 2019 Adv. Funct. Mater. 29 1904932 Google Scholar
[8]	Si J, Yu J, Shen Y, Zeng M, Fu L 2021 Small Struct. 2 2000101 Google Scholar
[9]	Lin Z, Wang C, Chai Y 2020 Small 16 2003319 Google Scholar
[10]	Mannix A J, Zhang Z, Guisinger N P, Yakobson B I, Hersam M C 2018 Nat. Nanotechnol. 13 444 Google Scholar
[11]	Tan C, Cao X, Wu X J, He Q, Yang J, Zhang X, Chen J, Zhao W, Han S, Nam G H 2017 Chem. Rev. 117 6225 Google Scholar
[12]	Koman V B, Liu P, Kozawa D, Liu A T, Cottrill A L, Son Y, Lebron J A, Strano M S 2018 Nat. Nanotechnol. 13 819 Google Scholar
[13]	Zhao C, Tan C, Lien D-H, Song X, Amani M, Hettick M, Nyein H Y Y, Yuan Z, Li L, Scott M C, Javey A 2020 Nat. Nanotechnol. 15 53 Google Scholar
[14]	Zhu W, Low T, Wang H, Ye P, Duan X 2019 2D Mater. 6 032004 Google Scholar
[15]	Conti S, Pimpolari L, Calabrese G, Worsley R, Majee S, Polyushkin D K, Paur M, Pace S, Keum D H, Fabbri F, Iannaccone G, Macucci M, Coletti C, Mueller T, Casiraghi C, Fiori G 2020 Nat. Commun. 11 3566 Google Scholar
[16]	Li T, Guo W, Ma L, Li W, Yu Z, Han Z, Gao S, Liu L, Fan D, Wang Z, Yang Y, Lin W, Luo Z, Chen X, Dai N, Tu X, Pan D, Yao Y, Wang P, Nie Y, Wang J, Shi Y, Wang X 2021 Nat. Nanotechnol. 16 1201 Google Scholar
[17]	Kim K S, Lee D, Chang C S, Seo S, Hu Y, Cha S, Kim H, Shin J, Lee J H, Lee S 2023 Nature 614 88 Google Scholar
[18]	Wang J, Huang C, You Y, Guo Q, Xue G, Hong H, Jiao Q, Yu D, Du L, Zhao Y, Liu K 2022 J. Phys. Chem. C 126 3797 Google Scholar
[19]	Akinwande D, Huyghebaert C, Wang C H, Serna M I, Goossens S, Li L J, Wong H S P, Koppens F H 2019 Nature 573 507 Google Scholar
[20]	Kim K, Choi J Y, Kim T, Cho S H, Chung H J 2011 Nature 479 338 Google Scholar
[21]	Wang M, Huang M, Luo D, Li Y, Choe M, Seong W K, Kim M, Jin S, Wang M, Chatterjee S 2021 Nature 596 519 Google Scholar
[22]	Chen Z, Xie C, Wang W, Zhao J, Liu B, Shan J, Wang X, Hong M, Lin L, Huang L 2021 Sci. Adv. 7 eabk0115 Google Scholar
[23]	Shi Z, Wang X, Li Q, Yang P, Lu G, Jiang R, Wang H, Zhang C, Cong C, Liu Z, Wu T, Wang H, Yu Q, Xie X 2020 Nat. Commun. 11 849 Google Scholar
[24]	Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548 Google Scholar
[25]	Wang H, Xue X, Jiang Q, Wang Y, Geng D, Cai L, Wang L, Xu Z, Yu G 2019 J. Am. Chem. Soc. 141 11004 Google Scholar
[26]	Yazyev O V, Louie S G 2010 Nat. Mater. 9 806 Google Scholar
[27]	Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720 Google Scholar
[28]	Banszerus L, Schmitz M, Engels S, Dauber J, Oellers M, Haupt F, Watanabe K, Taniguchi T, Beschoten B, Stampfer C 2015 Sci. Adv. 1 e1500222 Google Scholar
[29]	Cheng Z, Cao R, Wei K, Yao Y, Liu X, Kang J, Dong J, Shi Z, Zhang H, Zhang X 2021 Adv. Sci. 8 2003834 Google Scholar
[30]	Mak K F, Shan J 2016 Nat. Photonics 10 216 Google Scholar
[31]	Lv L, Zhuge F, Xie F, Xiong X, Zhang Q, Zhang N, Huang Y, Zhai T 2019 Nat. Commun. 10 3331 Google Scholar
[32]	Li J, Ding Y, Zhang D W, Zhou P 2019 Acta Phys. -Chim. Sin. 35 1058 Google Scholar
[33]	Yin J, Tan Z, Hong H, Wu J, Yuan H, Liu Y, Chen C, Tan C, Yao F, Li T, Chen Y, Liu Z, Liu K, Peng H 2018 Nat. Commun. 9 3311 Google Scholar
[34]	Zhou X, Cheng J, Zhou Y, Cao T, Hong H, Liao Z, Wu S, Peng H, Liu K, Yu D 2015 J. Am. Chem. Soc. 137 7994 Google Scholar
[35]	Zuo Y, Yu W, Liu C, Cheng X, Qiao R, Liang J, Zhou X, Wang J, Wu M, Zhao Y, Gao P, Wu S, Sun Z, Liu K, Bai X, Liu Z 2020 Nat. Nanotechnol. 15 987 Google Scholar
[36]	Chen K, Zhou X, Cheng X, Qiao R, Cheng Y, Liu C, Xie Y, Yu W, Yao F, Sun Z, Wang F, Liu K, Liu Z 2019 Nat. Photonics 13 754 Google Scholar
[37]	Hong H, Wu C, Zhao Z, Zuo Y, Wang J, Liu C, Zhang J, Wang F, Feng J, Shen H, Yin J, Wu Y, Zhao Y, Liu K, Gao P, Meng S, Wu S, Sun Z, Liu K, Xiong J 2021 Nat. Photonics 15 510 Google Scholar
[38]	Flöry N, Ma P, Salamin Y, Emboras A, Taniguchi T, Watanabe K, Leuthold J, Novotny L 2020 Nat. Nanotechnol. 15 118 Google Scholar
[39]	Dean C R, Young A F, Meric I, Lee C, Wang L, Sorgenfrei S, Watanabe K, Taniguchi T, Kim P, Shepard K L 2010 Nat. Nanotechnol. 5 722 Google Scholar
[40]	El-Kady M F, Shao Y, Kaner R B 2016 Nat. Rev. Mater. 1 16033 Google Scholar
[41]	Xia J, Chen F, Li J, Tao N 2009 Nat. Nanotechnol. 4 505 Google Scholar
[42]	Li H, Tsai C, Koh A L, Cai L, Contryman A W, Fragapane A H, Zhao J, Han H S, Manoharan H C, Abild-Pedersen F 2016 Nat. Mater. 15 48 Google Scholar
[43]	Qin B, Wang D, Hong T, Wang Y, Liu D, Wang Z, Gao X, Ge Z H, Zhao L D 2023 Nat. Commun. 14 1366 Google Scholar
[44]	Kotakoski J, Meyer J C 2012 Phys. Rev. B 85 195447 Google Scholar
[45]	Lee M, Renshof J R, van Zeggeren K J, Houmes M J, Lesne E, Šiškins M, van Thiel T C, Guis R H, van Blankenstein M R, Verbiest G J 2022 Adv. Mater. 34 2204630 Google Scholar
[46]	Liu Z, Ma L, Shi G, Zhou W, Gong Y, Lei S, Yang X, Zhang J, Yu J, Hackenberg K P 2013 Nat. Nanotechnol. 8 119 Google Scholar
[47]	Ye F, Lee J, Feng P X L 2018 Nano Lett. 18 1678 Google Scholar
[48]	Mehmood A, Mubarak N, Khalid M, Walvekar R, Abdullah E, Siddiqui M, Baloch H A, Nizamuddin S, Mazari S 2020 J. Environ. Chem. Eng. 8 103743 Google Scholar
[49]	Jiang H, Zheng L, Liu Z, Wang X 2020 InfoMat 2 1077 Google Scholar
[50]	Liang J, Wang J, Zhang Z, Su Y, Guo Y, Qiao R, Song P, Gao P, Zhao Y, Jiao Q, Wu S, Sun Z, Yu D, Liu K 2019 Adv. Mater. 31 1808160 Google Scholar
[51]	Liu T, Cui Z, Li X, Cui H, Liu Y 2020 ACS Omega 6 988 Google Scholar
[52]	Jiang F, Zhao W S, Zhang J 2020 Microelectron. Eng. 225 111279 Google Scholar
[53]	徐小志, 张晓闻, 王然, 曾凡凯, 周涛 2021 华南师范大学学报(自然科学版) 53 1 Xu X Z, Zhang X W, Wang R, Zeng F K, Zhou T 2021 J. South China Normal Univ. (Natural Science Edition) 53 1
[54]	Xu X, Liu K 2022 Sci. Bull. 67 1410 Google Scholar
[55]	Liu C, Wang L, Qi J, Liu K 2020 Adv. Mater. 32 2000046 Google Scholar
[56]	刘天瑶, 刘灿, 刘开辉 2022 物理学报 71 108103 Google Scholar Liu T Y, Liu C, Liu K H 2022 Acta Phys. Sin. 71 108103 Google Scholar
[57]	Zhang Z, Forti S, Meng W, Pezzini S, Hu Z, Coletti C, Wang X, Liu K 2023 2D Mater. 10 032001 Google Scholar
[58]	Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110 Google Scholar
[59]	Luo Z, Lu Y, Singer D W, Berck M E, Somers L A, Goldsmith B R, Johnson A C 2011 Chem. Mater. 23 1441 Google Scholar
[60]	Han G H, Gunes F, Bae J J, Kim E S, Chae S J, Shin H J, Choi J Y, Pribat D, Lee Y H 2011 Nano Lett. 11 4144 Google Scholar
[61]	Wu T, Zhang X, Yuan Q, Xue J, Lu G, Liu Z, Wang H, Wang H, Ding F, Yu Q, Xie X, Jiang M 2016 Nat. Mater. 15 43 Google Scholar
[62]	Safron N S, Kim M, Gopalan P, Arnold M S 2012 Adv. Mater. 24 1041 Google Scholar
[63]	Kim H, Mattevi C, Calvo M R, Oberg J C, Artiglia L, Agnoli S, Hirjibehedin C F, Chhowalla M, Saiz E 2012 ACS Nano 6 3614 Google Scholar
[64]	Liu C, Xu X, Qiu L, Wu M, Qiao R, Wang L, Wang J, Niu J, Liang J, Zhou X, Zhang Z, Peng M, Gao P, Wang W, Bai X, Ma D, Jiang Y, Wu X, Yu D, Wang E, Xiong J, Ding F, Liu K 2019 Nat. Chem. 11 730 Google Scholar
[65]	Xu X, Zhang Z, Qiu L, Zhuang J, Zhang L, Wang H, Liao C, Song H, Qiao R, Gao P, Hu Z, Liao L, Yu D, Wang E, Ding F, Peng H, Liu K 2016 Nat. Nanotechnol. 11 930 Google Scholar
[66]	Xu X, Qiao R, Liang Z, Zhang Z, Wang R, Zeng F, Cui G, Zhang X, Zou D, Guo Y, Liu C, Fu Y, Zhou X, Wu M, Wang Z J, Zhao Y, Wang E, Tang Z, Yu D, Liu K 2022 Nano Res. 15 919 Google Scholar
[67]	Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 P. Natl. A. Sci. 109 7992 Google Scholar
[68]	Zang X, Zhou Q, Chang J, Teh K S, Wei M, Zettl A, Lin L 2017 Adv. Mater. Interfaces 4 1600783 Google Scholar
[69]	Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096 Google Scholar
[70]	Vlassiouk I V, Stehle Y, Pudasaini P R, Unocic R R, Rack P D, Baddorf A P, Ivanov I N, Lavrik N V, List F, Gupta N, Bets K V, Yakobson B I, Smirnov S N 2018 Nat. Mater. 17 318 Google Scholar
[71]	Chung J W, Dai Z R, Ohuchi F S 1998 J. Cryst. Growth 186 137 Google Scholar
[72]	Cun H, Macha M, Kim H, Liu K, Zhao Y, LaGrange T, Kis A, Radenovic A 2019 Nano Res. 12 2646 Google Scholar
[73]	Ishihara S, Hibino Y, Sawamoto N, Machida H, Wakabayashi H, Ogura A 2018 MRS Adv. 3 379 Google Scholar
[74]	Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano 9 2080 Google Scholar
[75]	Song X, Gao J, Nie Y, Gao T, Sun J, Ma D, Li Q, Chen Y, Jin C, Bachmatiuk A, Rümmeli M H, Ding F, Zhang Y, Liu Z 2015 Nano Res. 8 3164 Google Scholar
[76]	Zhang Z, Yang X, Liu K, Wang R 2022 Adv. Sci. 9 2105201 Google Scholar
[77]	Young E P, Park J, Bai T, Choi C, DeBlock R H, Lange M, Poust S, Tice J, Cheung C, Dunn B S 2018 ACS Appl. Nano Mater. 1 4737 Google Scholar
[78]	Tao L, Cinquanta E, Chiappe D, Grazianetti C, Fanciulli M, Dubey M, Molle A, Akinwande D 2015 Nat. Nanotechnol. 10 227 Google Scholar
[79]	Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656 Google Scholar
[80]	Shi J, Chen X, Zhao L, Gong Y, Hong M, Huan Y, Zhang Z, Yang P, Li Y, Zhang Q 2018 Adv. Mater. 30 1804616 Google Scholar
[81]	Jiao L, Jie W, Yang Z, Wang Y, Chen Z, Zhang X, Tang W, Wu Z, Hao J 2019 J. Mater. Chem. C 7 2522 Google Scholar
[82]	Seo S, Choi H, Kim S Y, Lee J, Kim K, Yoon S, Lee B H, Lee S 2018 Adv. Mater. Interfaces 5 1800524 Google Scholar
[83]	Keller B D, Bertuch A, Provine J, Sundaram G, Ferralis N, Grossman J C 2017 Chem. Mater. 29 2024 Google Scholar
[84]	Zhou W, Zou X, Najmaei S, Liu Z, Shi Y, Kong J, Lou J, Ajayan P M, Yakobson B I, Idrobo J C 2013 Nano letters 13 2615 Google Scholar
[85]	Shu H, Tao X M, Ding F 2015 Nanoscale 7 1627 Google Scholar
[86]	Metin O, Mazumder V, Ozkar S, Sun S 2010 J. Am. Chem. Soc. 132 1468 Google Scholar
[87]	Liu S, Van Duin A C, Van Duin D M, Liu B, Edgar J H 2017 ACS Nano 11 3585 Google Scholar
[88]	Liu S, Comer J, Van Duin A C, Van Duin D M, Liu B, Edgar J H 2019 Nanoscale 11 5607 Google Scholar
[89]	Zhang X, Xu Z, Hui L, Xin J, Ding F 2012 J. Phys. Chem. Lett. 3 2822 Google Scholar
[90]	Dong J, Zhang L, Dai X, Ding F 2020 Nat. Commun. 11 5862 Google Scholar
[91]	Wang Z J, Dong J, Li L, Dong G, Cui Y, Yang Y, Wei W, Blume R, Li Q, Wang L, Xu X, Liu K, Barroo C, Frenken J W M, Fu Q, Bao X, Schlögl R, Ding F, Willinger M G 2020 ACS Nano 14 1902 Google Scholar
[92]	Dong J, Geng D, Liu F, Ding F 2019 Angew. Chem. Int. Edit. 58 7723 Google Scholar
[93]	Zuo Y, Liu C, Ding L, Qiao R, Tian J, Liu C, Wang Q, Xue G, You Y, Guo Q, Wang J, Fu Y, Liu K, Zhou X, Hong H, Wu M, Lu X, Yang R, Zhang G, Yu D, Wang E, Bai X, Ding F, Liu K 2022 Nat. Commun. 13 1007 Google Scholar
[94]	Zhao R, Zhao X, Liu Z, Ding F, Liu Z 2017 Nanoscale 9 3561 Google Scholar
[95]	Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H j 2009 Adv. Mater. 21 2777 Google Scholar
[96]	Hu B, Ago H, Ito Y, Kawahara K, Tsuji M, Magome E, Sumitani K, Mizuta N, Ikeda K I, Mizuno S 2012 Carbon 50 57 Google Scholar
[97]	Zhang X, Wu T, Jiang Q, Wang H, Zhu H, Chen Z, Jiang R, Niu T, Li Z, Zhang Y 2019 Small 15 1805395 Google Scholar
[98]	Braeuninger-Weimer P, Brennan B, Pollard A J, Hofmann S 2016 Chem. Mater. 28 8905 Google Scholar
[99]	Wang Z J, Liang Z, Kong X, Zhang X, Qiao R, Wang J, Zhang S, Zhang Z, Xue C, Cui G, Zhang Z, Zou D, Liu Z, Li Q, Wei W, Zhou X, Tang Z, Yu D, Wang E, Liu K, Ding F, Xu X 2022 Nano Lett. 22 4661 Google Scholar
[100]	Zhang Z, Xu X, Qiu L, Wang S, Wu T, Ding F, Peng H, Liu K 2017 Adv. Sci. 4 1700087 Google Scholar
[101]	Zhan Y, Liu Z, Najmaei S, Ajayan P M, Lou J 2012 Small 8 966 Google Scholar
[102]	Graf D, Molitor F, Ensslin K, Stampfer C, Jungen A, Hierold C, Wirtz L 2007 Nano Lett. 7 238 Google Scholar
[103]	Xu X, Lin C, Fu R, Wang S, Pan R, Chen G, Shen Q, Liu C, Guo X, Wang Y, Zhao R, Liu K, Luo Z, Hu Z, Li H 2016 AIP Adv. 6 025026 Google Scholar
[104]	Liu L, Li T, Ma L, Li W, Gao S, Sun W, Dong R, Zou X, Fan D, Shao L, Gu C, Dai N, Yu Z, Chen X, Tu X, Nie Y, Wang P, Wang J, Shi Y, Wang X 2022 Nature 605 69 Google Scholar
[105]	Chen L, Liu B, Ge M, Ma Y, Abbas A N, Zhou C 2015 ACS Nano 9 8368 Google Scholar
[106]	Deshpande S, Heo J, Das A, Bhattacharya P 2013 Nat. Commun. 4 1675 Google Scholar
[107]	Kim I H, Park H S, Park Y J, Kim T 1998 Appl. Phys. Lett. 73 1634 Google Scholar
[108]	Wang R, Koch N, Martin J, Sadofev S 2023 Phys. Status. Solidi-R 17 2200476 Google Scholar
[109]	Zhang Z, Ding M, Cheng T, Qiao R, Zhao M, Luo M, Wang E, Sun Y, Zhang S, Li X, Zhang Z, Mao H, Liu F, Fu Y, Liu K, Zou D, Liu C, Wu M, Fan C, Zhu Q, Wang X, Gao P, Li Q, Liu K, Zhang Y, Bai X, Yu D, Ding F, Wang E, Liu K 2022 Nat. Nanotechnol. 17 1258 Google Scholar
[110]	Lin Y C, Komsa H P, Yeh C H, Bjorkman T, Liang Z Y, Ho C H, Huang Y S, Chiu P W, Krasheninnikov A V, Suenaga K 2015 ACS Nano 9 11249 Google Scholar
[111]	Jiang S, Hong M, Wei W, Zhao L, Zhang N, Zhang Z, Yang P, Gao N, Zhou X, Xie C 2018 Commun. Chem. 1 17 Google Scholar
[112]	Wu K, Chen B, Yang S, Wang G, Kong W, Cai H, Aoki T, Soignard E, Marie X, Yano A 2016 Nano Lett. 16 5888 Google Scholar
[113]	Meng J, Zhang X, Wang Y, Yin Z, Liu H, Xia J, Wang H, You J, Jin P, Wang D 2017 Small 13 1604179 Google Scholar
[114]	Mannix A J, Zhou X F, Kiraly B, Wood J D, Alducin D, Myers B D, Liu X, Fisher B L, Santiago U, Guest J R 2015 Science 350 1513 Google Scholar
[115]	Wang X, He J, Zhou B, Zhang Y, Wu J, Hu R, Liu L, Song J, Qu J 2018 Angew. Chem. Ger. Edit 130 8804 Google Scholar
[116]	Yuhara J, Shimazu H, Ito K, Ohta A, Araidai M, Kurosawa M, Nakatake M, Le Lay G 2018 ACS Nano 12 11632 Google Scholar
[117]	Yuhara J, He B, Matsunami N, Nakatake M, Le Lay G 2019 Adv. Mater. 31 1901017 Google Scholar
[118]	Zhou J, Chen J, Chen M, Wang J, Liu X, Wei B, Wang Z, Li J, Gu L, Zhang Q 2019 Adv. Mater. 31 1807874 Google Scholar
[119]	Gao J, Yip J, Zhao J, Yakobson B I, Ding F 2011 J. Am. Chem. Soc. 133 5009 Google Scholar
[120]	Yuan Q, Yakobson B I, Ding F 2014 J. Phys. Chem. Lett. 5 3093 Google Scholar
[121]	Li X, Dong J, Idrobo J C, Puretzky A A, Rouleau C M, Geohegan D B, Ding F, Xiao K 2017 J. Am. Chem. Soc. 139 482 Google Scholar
[122]	Li J, Li Y, Yin J, Ren X, Liu X, Jin C, Guo W 2016 Small 12 3645 Google Scholar
[123]	Wang S, Dearle A E, Maruyama M, Ogawa Y, Okada S, Hibino H, Taniyasu Y 2019 Adv. Mater. 31 1900880 Google Scholar
[124]	Li P, Wei W, Zhang M, Mei Y, Chu P K, Xie X, Yuan Q, Di Z 2020 Nano Today 34 100908 Google Scholar
[125]	Nie S, Wofford J M, Bartelt N C, Dubon O D, McCarty K F 2011 Phys. Rev. B 84 155425 Google Scholar
[126]	Griep M H, Sandoz-Rosado E, Tumlin T M, Wetzel E 2016 Nano Lett. 16 1657 Google Scholar
[127]	Dai J, Wang D, Zhang M, Niu T, Li A, Ye M, Qiao S, Ding G, Xie X, Wang Y 2016 Nano Lett. 16 3160 Google Scholar
[128]	Driver S, Toomes R, Woodruff D 2016 Surf. Sci. 646 114 Google Scholar
[129]	Bets K V, Gupta N, Yakobson B I 2019 Nano Lett. 19 2027 Google Scholar
[130]	Chen T A, Chuu C P, Tseng C C, Wen C K, Wong H S P, Pan S, Li R, Chao T A, Chueh W C, Zhang Y 2020 Nature 579 219 Google Scholar
[131]	Ohta T, Bostwick A, Seyller T, Horn K, Rotenberg E 2006 Science 313 951 Google Scholar
[132]	Berger C, Song Z, Li X, Wu X, Brown N, Naud C, Mayou D, Li T, Hass J, Marchenkov A N, Conrad E H, First P N, de Heer W A 2006 Science 312 1191 Google Scholar
[133]	Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, Ruoff R S 2009 Science 324 1312 Google Scholar
[134]	Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706 Google Scholar
[135]	Xu X, Zhang Z, Dong J, Yi D, Niu J, Wu M, Lin L, Yin R, Li M, Zhou J, Wang S, Sun J, Duan X, Gao P, Jiang Y, Wu X, Peng H, Ruoff R S, Liu Z, Yu D, Wang E, Ding F, Liu K 2017 Sci. Bull. 62 1074 Google Scholar
[136]	Hou Y, Wang B, Zhan L, Qing F, Wang X, Niu X, Li X 2020 Mater. Today 36 10 Google Scholar
[137]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung T F, Peng P, Guisinger N P, Stach E A, Bao J, Pei S S, Chen Y P 2011 Nat. Mater. 10 443 Google Scholar
[138]	Wu M, Zhang Z, Xu X, Zhang Z, Duan Y, Dong J, Qiao R, You S, Wang L, Qi J, Zou D, Shang N, Yang Y, Li H, Zhu L, Sun J, Yu H, Gao P, Bai X, Jiang Y, Wang Z J, Ding F, Yu D, Wang E, Liu K 2020 Nature 581 406 Google Scholar
[139]	Li Y, Sun L, Chang Z, Liu H, Wang Y, Liang Y, Chen B, Ding Q, Zhao Z, Wang R, Wei Y, Peng H, Lin L, Liu Z 2020 Adv. Mater. 32 2002034 Google Scholar
[140]	Li L, Ma T, Yu W, Zhu M, Li J, Chen Z, Li H, Zhao M, Teng J, Tian B, Su C, Loh K P 2021 2D Mater. 8 035019 Google Scholar
[141]	Wan Y, Fu J H, Chuu C P, Tung V, Shi Y, Li L J 2022 Chem. Soc. Rev. 51 803 Google Scholar
[142]	Lee J H, Lee E K, Joo W J, Jang Y, Kim B S, Lim J Y, Choi S H, Ahn S J, Ahn J R, Park M H, Yang C W, Choi B L, Hwang S W, Whang D 2014 Science 344 286 Google Scholar
[143]	Zhang Z, Penev E S, Yakobson B I 2016 Nat. Chem. 8 525 Google Scholar
[144]	Sun X, Liu X, Yin J, Yu J, Li Y, Hang Y, Zhou X, Yu M, Li J, Tai G, Guo W 2017 Adv. Funct. Mater. 27 1603300 Google Scholar
[145]	Liu Y, Penev E S, Yakobson B I 2013 Angew. Chem. Int. Edit. 52 3156 Google Scholar
[146]	Feng B, Zhang J, Zhong Q, Li W, Li S, Li H, Cheng P, Meng S, Chen L, Wu K 2016 Nat. Chem. 8 563 Google Scholar
[147]	Kiraly B, Liu X, Wang L, Zhang Z, Mannix A J, Fisher B L, Yakobson B I, Hersam M C, Guisinger N P 2019 ACS Nano 13 3816 Google Scholar
[148]	Liu H, Gao J, Zhao J 2013 Sci. Rep. -UK 3 3238 Google Scholar
[149]	Li W, Kong L, Chen C, Gou J, Sheng S, Zhang W, Li H, Chen L, Cheng P, Wu K 2018 Sci. Bull. 63 282 Google Scholar
[150]	Zhong Q, Kong L, Gou J, Li W, Sheng S, Yang S, Cheng P, Li H, Wu K, Chen L 2017 Phys. Rev. Mater. 1 021001 Google Scholar
[151]	Wu R, Drozdov I K, Eltinge S, Zahl P, Ismail-Beigi S, Božović I, Gozar A 2019 Nat. Nanotechnol. 14 44 Google Scholar
[152]	Wu R, Eltinge S, Drozdov I K, Gozar A, Zahl P, Sadowski J T, Ismail-Beigi S, Božović I 2022 Nat. Chem. 14 377 Google Scholar
[153]	Yang W, Berthou S, Lu X, Wilmart Q, Denis A, Rosticher M, Taniguchi T, Watanabe K, Fève G, Berroir J M, Zhang G, Voisin C, Baudin E, Plaçais B 2018 Nat. Nanotechnol. 13 47 Google Scholar
[154]	Yankowitz M, Ma Q, Jarillo-Herrero P, LeRoy B J 2019 Nat. Rev. Phys. 1 112 Google Scholar
[155]	Hu S, Lozada-Hidalgo M, Wang F, Mishchenko A, Schedin F, Nair R R, Hill E, Boukhvalov D, Katsnelson M, Dryfe R A 2014 Nature 516 227 Google Scholar
[156]	Wang L, Meric I, Huang P, Gao Q, Gao Y, Tran H, Taniguchi T, Watanabe K, Campos L, Muller D 2013 Science 342 614 Google Scholar
[157]	Lu G, Wu T, Yuan Q, Wang H, Wang H, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6160 Google Scholar
[158]	Liu L, Park J, Siegel D A, McCarty K F, Clark K W, Deng W, Basile L, Idrobo J C, Li A-P, Gu G 2014 Science 343 163 Google Scholar
[159]	Wang L, Xu X, Zhang L, Qiao R, Wu M, Wang Z, Zhang S, Liang J, Zhang Z, Zhang Z, Chen W, Xie X, Zong J, Shan Y, Guo Y, Willinger M, Wu H, Li Q, Wang W, Gao P, Wu S, Zhang Y, Jiang Y, Yu D, Wang E, Bai X, Wang Z J, Ding F, Liu K 2019 Nature 570 91 Google Scholar
[160]	Ma K Y, Zhang L, Jin S, Wang Y, Yoon S I, Hwang H, Oh J, Jeong D S, Wang M, Chatterjee S, Kim G, Jang A R, Yang J, Ryu S, Jeong H Y, Ruoff R S, Chhowalla M, Ding F, Shin H S 2022 Nature 606 88 Google Scholar
[161]	Liu Z, Gong Y, Zhou W, Ma L, Yu J, Idrobo J C, Jung J, MacDonald A H, Vajtai R, Lou J, Ajayan P M 2013 Nat. Commun. 4 2541 Google Scholar
[162]	Caneva S, Weatherup R S, Bayer B C, Blume R, Cabrero-Vilatela A, Braeuninger-Weimer P, Martin M-B, Wang R, Baehtz C, Schloegl R, Meyer J C, Hofmann S 2016 Nano Lett. 16 1250 Google Scholar
[163]	Liu D, Chen X, Yan Y, Zhang Z, Jin Z, Yi K, Zhang C, Zheng Y, Wang Y, Yang J, Xu X, Chen J, Lu Y, Wei D, Wee A T S, Wei D 2019 Nat. Commun. 10 1188 Google Scholar
[164]	Jang A R, Hong S, Hyun C, Yoon S I, Kim G, Jeong H Y, Shin T J, Park S O, Wong K, Kwak S K, Park N, Yu K, Choi E, Mishchenko A, Withers F, Novoselov K S, Lim H, Shin H S 2016 Nano Lett. 16 3360 Google Scholar
[165]	Biswas A, Ruan Q, Lee F, Li C, Iyengar S A, Puthirath A B, Zhang X, Kannan H, Gray T, Birdwell A G, Neupane M R, Shah P B, Ruzmetov D A, Ivanov T G, Vajtai R, Tripathi M, Dalton A, Yakobson B I, Ajayan P M 2023 Appl. Mater. Today 30 101734 Google Scholar
[166]	Lee Y H, Yu L, Wang H, Fang W, Ling X, Shi Y, Lin C T, Huang J K, Chang M T, Chang C S 2013 Nano Lett. 13 1852 Google Scholar
[167]	Zhang Y, Zhang Y, Ji Q, Ju J, Yuan H, Shi J, Gao T, Ma D, Liu M, Chen Y 2013 ACS Nano 7 8963 Google Scholar
[168]	Van Der Zande A M, Huang P Y, Chenet D A, Berkelbach T C, You Y, Lee G H, Heinz T F, Reichman D R, Muller D A, Hone J C 2013 Nat. Mater. 12 554 Google Scholar
[169]	Najmaei S, Liu Z, Zhou W, Zou X, Shi G, Lei S, Yakobson B I, Idrobo J-C, Ajayan P M, Lou J 2013 Nat. Mater. 12 754 Google Scholar
[170]	Yang P, Zhang S, Pan S, Tang B, Liang Y, Zhao X, Zhang Z, Shi J, Huan Y, Shi Y, Pennycook S J, Ren Z, Zhang G, Chen Q, Zou X, Liu Z, Zhang Y 2020 ACS Nano 14 5036 Google Scholar
[171]	Hu J, Quan W, Yang P, Cui F, Liu F, Zhu L, Pan S, Huan Y, Zhou F, Fu J, Zhang G, Gao P, Zhang Y 2023 ACS Nano 17 312 Google Scholar
[172]	Yang P, Wang D, Zhao X, Quan W, Jiang Q, Li X, Tang B, Hu J, Zhu L, Pan S, Shi Y, Huan Y, Cui F, Qiao S, Chen Q, Liu Z, Zou X, Zhang Y 2022 Nat. Commun. 13 3238 Google Scholar
[173]	Aljarb A, Fu J H, Hsu C C, Chuu C P, Wan Y, Hakami M, Naphade D R, Yengel E, Lee C J, Brems S, Chen T A, Li M Y, Bae S H, Hsu W T, Cao Z, Albaridy R, Lopatin S, Chang W H, Anthopoulos T D, Kim J, Li L J, Tung V 2020 Nat. Mater. 19 1300 Google Scholar
[174]	Aljarb A, Cao Z, Tang H L, Huang J K, Li M, Hu W, Cavallo L, Li L J 2017 ACS Nano 11 9215 Google Scholar
[175]	Wang J, Xu X, Cheng T, Gu L, Qiao R, Liang Z, Ding D, Hong H, Zheng P, Zhang Z, Zhang Z, Zhang S, Cui G, Chang C, Huang C, Qi J, Liang J, Liu C, Zuo Y, Xue G, Fang X, Tian J, Wu M, Guo Y, Yao Z, Jiao Q, Liu L, Gao P, Li Q, Yang R, Zhang G, Tang Z, Yu D, Wang E, Lu J, Zhao Y, Wu S, Ding F, Liu K 2022 Nat. Nanotechnol. 17 33 Google Scholar
[176]	Mounet N, Gibertini M, Schwaller P, Campi D, Merkys A, Marrazzo A, Sohier T, Castelli I E, Cepellotti A, Pizzi G 2018 Nat. Nanotechnol. 13 246 Google Scholar
[177]	Dumcenco D, Ovchinnikov D, Marinov K, Lazić P, Gibertini M, Marzari N, Sanchez O L, Kung Y C, Krasnozhon D, Chen M W, Bertolazzi S, Gillet P, Fontcuberta i Morral A, Radenovic A, Kis A 2015 ACS Nano 9 4611 Google Scholar
[178]	Li N, Wang Q, Shen C, Wei Z, Yu H, Zhao J, Lu X, Wang G, He C, Xie L, Zhu J, Du L, Yang R, Shi D, Zhang G 2020 Nat. Electron. 3 711 Google Scholar
[179]	Wang Q, Li N, Tang J, Zhu J, Zhang Q, Jia Q, Lu Y, Wei Z, Yu H, Zhao Y, Guo Y, Gu L, Sun G, Yang W, Yang R, Shi D, Zhang G 2020 Nano Lett. 20 7193 Google Scholar
[180]	Yin J, Liu X, Lu W, Li J, Cao Y, Li Y, Xu Y, Li X, Zhou J, Jin C, Guo W 2015 Small 11 5375 Google Scholar
[181]	Zheng P, Wei W, Liang Z, Qin B, Tian J, Wang J, Qiao R, Ren Y, Chen J, Huang C, Zhou X, Zhang G, Tang Z, Yu D, Ding F, Liu K, Xu X 2023 Nat. Commun. 14 592 Google Scholar
[182]	Ma Z, Wang S, Deng Q, Hou Z, Zhou X, Li X, Cui F, Si H, Zhai T, Xu H 2020 Small 16 2000596 Google Scholar
[183]	Chubarov M, Choudhury T H, Hickey D R, Bachu S, Zhang T, Sebastian A, Bansal A, Zhu H, Trainor N, Das S, Terrones M, Alem N, Redwing J M 2021 ACS Nano 15 2532 Google Scholar
[184]	Choi S H, Kim H J, Song B, Kim Y I, Han G, Nguyen H T T, Ko H, Boandoh S, Choi J H, Oh C S, Cho H J, Jin J W, Won Y S, Lee B H, Yun S J, Shin B G, Jeong H Y, Kim Y M, Han Y K, Lee Y H, Kim S M, Kim K K 2021 Adv. Mater. 33 2006601 Google Scholar
[185]	Li J, Wang S, Jiang Q, Qian H, Hu S, Kang H, Chen C, Zhan X, Yu A, Zhao S, Zhang Y, Chen Z, Sui Y, Qiao S, Yu G, Peng S, Jin Z, Liu X 2021 Small 17 2100743 Google Scholar
[186]	Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J-A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001 Google Scholar
[187]	Grønborg S S, Ulstrup S, Bianchi M, Dendzik M, Sanders C E, Lauritsen J V, Hofmann P, Miwa J A 2015 Langmuir 31 9700 Google Scholar
[188]	Pan S, Yang P, Zhu L, Hong M, Xie C, Zhou F, Shi Y, Huan Y, Cui F, Zhang Y 2021 Nanotechnology 32 095601 Google Scholar
[189]	Tumino F, Grazianetti C, Martella C, Ruggeri M, Russo V, Li Bassi A, Molle A, Casari C S 2021 J. Phys. Chem. C 125 9479 Google Scholar
[190]	Tay R Y, Park H J, Ryu G H, Tan D, Tsang S H, Li H, Liu W, Teo E H T, Lee Z, Lifshitz Y, Ruoff R S 2016 Nanoscale 8 2434 Google Scholar
[191]	Uchida Y, Iwaizako T, Mizuno S, Tsuji M, Ago H 2017 Phys. Chem. Chem. Phys. 19 8230 Google Scholar
[192]	Taslim A B, Nakajima H, Lin Y C, Uchida Y, Kawahara K, Okazaki T, Suenaga K, Hibino H, Ago H 2019 Nanoscale 11 14668 Google Scholar
[193]	Butashin A V, Vlasov V P, Kanevskii V M, Muslimov A E, Fedorov V A 2012 Crystallogr. Rep.+ 57 824 Google Scholar
[194]	Zhang X, Nan H, Xiao S, Wan X, Gu X, Du A, Ni Z, Ostrikov K 2019 Nat. Commun. 10 598 Google Scholar
[195]	Li X, Shi X, Marian D, Soriano D, Cusati T, Iannaccone G, Fiori G, Guo Q, Zhao W, Wu Y 2023 Sci. Adv. 9 eade5706 Google Scholar
[196]	Liu F, Wu W, Bai Y, Chae S H, Li Q, Wang J, Hone J, Zhu X Y 2020 Science 367 903 Google Scholar
[197]	Chen C, Lv H, Zhang P, Zhuo Z, Wang Y, Ma C, Li W, Wang X, Feng B, Cheng P 2022 Nat. Chem. 14 25 Google Scholar
[198]	Zhang X, Huangfu L, Gu Z, Xiao S, Zhou J, Nan H, Gu X, Ostrikov K 2021 Small 17 2007312 Google Scholar

施引文献

图 1 (a)单核生长和(b)外延生长原理示意图

Fig. 1. Schematic diagrams of (a) single nuclei growth and (b) epitaxial growth.

下载: 全尺寸图片幻灯片

图 2 (a)中心对称和(b)非中心对称二维材料的原子结构示意图. 图(a)中灰色圆球对应同种元素原子; 图(b)中橙色圆球和蓝色圆球分别对应2种元素原子. 中心对称的结构翻转180°后可以复原, 非中心对称的结构翻转180°后无法复原

Fig. 2. Schematic diagrams of atomic structure of (a) centrosymmetric and (b) non-centrosymmetric 2D materials. Gray balls in Fig. (a) correspond to the same kind of atoms, orange and blue balls in Fig. (b) correspond to two kinds of atoms, respectively. A centrosymmetric structure can be restored after being turned over 180°, and a non-centrosymmetric structure cannot be restored after being turned over 180°.

下载: 全尺寸图片幻灯片

图 3 在Cu (a) (112), (b) (113), (c) (133)和(d) (223)晶面上制备的单向排列石墨烯SEM图^[138]

Fig. 3. SEM images of unidirectionally aligned graphene domains on (a) (112), (b) (113), (c) (133) and (d) (223) facets of Cu^[138].

下载: 全尺寸图片幻灯片

图 4 (a) Ge (110)面单向排列石墨烯SEM图^[142]; (b)单晶单层石墨烯的HRTEM图^[142]; (c)石墨烯种子沿Ge (110)面的[$ \overline 1 10 $]方向单向排列的AFM图^[127]; (d), (e)石墨烯成核与台阶边缘对接的单向排列示意图^[127]

Fig. 4. (a) SEM image of unidirectional graphene grown on Ge (110) surface^[142]; (b) HRTEM image of single crystal monolayer graphene^[142]; (c) AFM image of graphene seeds aligned along [$ \overline 1 10 $] direction of Ge (110) surface^[127]; (d), (e) schematic illustration of graphene nucleation docking with the step edge for unidirectional alignment^[127].

下载: 全尺寸图片幻灯片

图 5 (a) Cu (110)面单向排列的hBN SEM图; (b) hBN晶畴拼接处的TEM图, 插图为低倍TEM图; (c), (d) H₂在1000 ℃下经30 min刻蚀Cu(110)和Cu(111)上hBN的SEM图; (e) hBN晶格之字形边缘与Cu(110)表面的Cu$ \langle {211} \rangle $方向台阶结合原子示意图; (f)不同hBN边缘与Cu (110)表面的Cu $ \langle {211} \rangle $方向台阶形成能^[158]

Fig. 5. (a) SEM image of as-grown unidirectionally aligned hBN domains on Cu (110) substrate; (b) TEM images of neighboring merged hBN domains, inset shows the same image at a lower magnification; (c), (d) SEM images of hBN film as-grown on Cu(110) and Cu(111) surfaces after H₂ etching at 1, 000 ℃ for 30 min; (e) atomic configuration of a zigzag edge of hBN lattice attaching to the Cu$ \left\langle {211} \right\rangle $ atomic step edge on the vicinal Cu (110) surface; (f) formation energies of various hBN edges attached to a Cu $\langle {211}\rangle $ step edge of vicinal Cu(110) substrate^[158].

下载: 全尺寸图片幻灯片

图 6 (a), (b)制备单晶Au (111)的示意图及CVD法在其表面生长MoS₂的SEM图^[169]; (c)—(e) Au (607) , Au (2 1 11) 面的MoS₂ SEM以及拉曼图^[170]; (f), (h)MoS₂形态变化示意图; (g), (i)不同S/Mo比例下制备的2D MoS₂三角形、1D MoS₂纳米带SEM图^[171]

Fig. 6. (a), (b) Schematic illustration of processes of single crystal Au(111) formation and SEM image of MoS₂ grown on its surface by CVD method^[169]; (c)–(e) SEM images and Raman spectra of MoS₂ on Au (607), Au (2 1 11)facets^[170]; (f), (h) schematic illustration of the morphological evolution of MoS₂; (g), (i) SEM images of 2D monolayer MoS₂ triangles and 1D MoS₂ nanoribbons at different S/Mo ratios^[171].

下载: 全尺寸图片幻灯片

图 7 (a) O₂刻蚀WS₂薄膜后的SEM图; (b)对齐WS₂岛拼接区域STEM图; (c) WS₂晶格STEM图; (d) 2 inch单层WS₂薄膜光学图; (e) a-Al₂O₃独立WS₂晶畴光学图; (f), (g)WS₂晶畴AFM图, 台阶方向$\langle 1\bar 1 01 \rangle$^[174]

Fig. 7. (a) SEM image of WS₂ films after O₂ etching; (b) STEM image of merged area of aligned WS₂ islands; (c) STEM image of WS₂ lattice; (d) photograph of 2 inch WS₂ monolayer thin film; (e) optical image of individual WS₂ islands on a-Al₂O₃; (f), (g) AFM image of a WS₂ island, the direction of the steps is $ \langle1\bar 1 01 \rangle$^[174].

下载: 全尺寸图片幻灯片

图 8 不同成核位置导致不同生长结果的原理示意图　(a)同时在台阶边缘和台阶平面处成核会导致正反取向;　(b)只在台阶边缘处成核会导致单一取向

Fig. 8. Schematic diagrams of different growth results at different nucleation positions: (a) Positive and negative orientation when nucleation occur on both step edges and terrace; (b) single orientation when nucleation only occurs on step edges.

下载: 全尺寸图片幻灯片

图 9 (a)退火前c-Al₂O₃表面; (b)退火中c-Al₂O₃表面; (c)长时间退火后c-Al₂O₃表面; (d)MoS₂边缘同氧空位缺陷台阶与无氧空位平行台阶结合能; (e)反平行MoS₂晶畴跨不同台阶(Ⅰ, Ⅱ和Ⅲ)能量; (f)3种台阶边缘处MoS₂边缘^[180]

Fig. 9. (a) Original c-Al₂O₃ surface before annealing; (b) original c-Al₂O₃ surface during annealing; (c) original c-Al₂O₃ surface after a long annealing time; (d) binding energy of a MoS₂ grain on a straight parallel step with O vacancy and on a defective step without O vacancy; (e) energy difference between antiparallel MoS₂ grains that cross different types of step edges (Ⅰ, Ⅱ and Ⅲ); (f) MoS₂ grain on three types of step edges^[180].

下载: 全尺寸图片幻灯片

图 10 (a), (b)穿过c-Al₂O₃台阶边缘的2个反平行WS₂晶粒示意图; (c) 2个反平行WS₂晶粒之间的能量差; (d), (e)穿过a-Al₂O₃台阶边缘的2个反平行WS₂(MoS₂)晶粒示意图; (f) 2个反平行WS₂(MoS₂)晶粒之间的能量差, 沿着不同方向的台阶都是为了打破反平行线^[180]

Fig. 10. (a), (b) Schematic diagrams of two antiparallel WS₂ grains that across a step edge of c-Al₂O₃; (c) energy difference between two antiparallel WS₂ grains; (d), (e) schematic diagrams of two antiparallel WS₂ (MoS₂) grains that across a step edge of a-Al₂O₃; (f) energy difference between two antiparallel WS₂ (MoS₂) grains. Steps along different directions all work for breaking of antiparallel alignments^[180].

下载: 全尺寸图片幻灯片

表 1 二维材料的应用领域及其挑战

Table 1. Applications and future challenges of two-dimensional materials.

领域	应用方向	优势	挑战
电子	晶体管、传感器、存储设备、互连、柔性电子产品、透明导电薄膜	高载流子迁移率、可调带隙、优异的机械和化学稳定性	可扩展性、可重复性、接口工程、设备集成、环境稳定性
光电子	LEDs、太阳能电池、光电探测、光调制器、吸收器	高载流子迁移率、可调带隙、优异的光吸收和发射	可重复性、环境稳定性、界面能源、设备集成、成本
催化	水分解、CO₂还原、析氢反应、氧化还原反应	高比表面积、可调电子和化学性能、催化活性	可扩展性、反应稳定性、优异的选择性、成本
储能	电池、超级电容器、燃料电池、电催化、储氢	高表面积、可调的电子和化学性能、优异的电化学性能	可扩展性、反应稳定性、选择性、成本、毒性
传感器	气体、生物、应变传感器	灵敏度高、选择性好、电子和化学性能可调、稳定性好	可扩展性、环境稳定性、选择性、设备集成
生物医学	药物输送、生物传感、组织工程、生物成像	生物相容性、高表面积、可调的电子和化学性质、稳定性	选择性、可扩展性、毒性、生物环境稳定性、监管批准
环境	水处理、空气净化、能量收集	高表面积、电子和化学性能可调、优异的光催化和电催化	可扩展性、环境稳定性、选择性、成本

下载: 导出CSV

表 2 衬底台阶调控TMDs生长^[180]

Table 2. Controversial growth behaviours of TMDs on substrates with steps^[180].

Substrate	TMDs	Alignment/%	Symmetry breaking	Ref.
a-Al₂O₃	WS₂	99	√	[174]
a-Al₂O₃	MoS₂	86	√	[181]
c-Al₂O₃	MoS₂	99	√	[16]
c-Al₂O₃	WS₂	>90	√	[182]
c-Al₂O₃	WSe₂	92	√	[105]
Au(533)	WS₂	>90	√	[183]
Au(111)	MoS₂	99	√	[184]
Au(111)	MoS₂	98	√	[169]
β-Ga₂O₃	MoS₂	>90	√	[172]
c-Al₂O₃	MoS₂	50	×	[177]
c-Al₂O₃	MoS₂	50	×	[178]
c-Al₂O₃	MoS₂	60	×	[173]
c-Al₂O₃	MoS₂	50	×	[185]
c-Al₂O₃	MoS₂	56	×	[176]
Au(111)	MoS₂	50	×	[186]
Au(111)	MoS₂	50	×	[187]
Ag(111)	MoS₂	50	×	[188]

下载: 导出CSV

表 3 衬底台阶调控hBN生长^[180]

Table 3. Controversial growth behaviours of hBN on substrates with steps^[180].

Substrate	Alignment/%	Symmetry breaking	Ref.
Cu (110)	99	√	[158]
Cu (111)	99	√	[130]
Cu (102) Cu (103)	97	√	[122]
Cu (110)	50	×	[189]
Cu (110) Cu (111)	21 54	×	[75]
Cu (111)	50	×	[190]
Ni (111)	50	×	[113]
Ni (111)	54	×	[191]
Ge (110)	52	×	[179]

下载: 导出CSV

[1]	Novoselov K S, Geim A K, Morozov S V, Jiang D E, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666 Google Scholar
[2]	Manzeli S, Ovchinnikov D, Pasquier D, Yazyev O V, Kis A 2017 Nat. Rev. Mater. 2 17033 Google Scholar
[3]	Huang H, Zha J, Li S, Tan C 2022 Chinese Chem. Lett. 33 163 Google Scholar
[4]	Zhang J, Tan B, Zhang X, Gao F, Hu Y, Wang L, Duan X, Yang Z, Hu P 2021 Adv. Mater. 33 2000769 Google Scholar
[5]	Caldwell J D, Aharonovich I, Cassabois G, Edgar J H, Gil B, Basov D N 2019 Nat. Rev. Mater. 4 552 Google Scholar
[6]	Miró P, Ghorbani-Asl M, Heine T 2014 Angew. Chem. Int. Edit. 53 3015 Google Scholar
[7]	Pi L, Li L, Liu K, Zhang Q, Li H, Zhai T 2019 Adv. Funct. Mater. 29 1904932 Google Scholar
[8]	Si J, Yu J, Shen Y, Zeng M, Fu L 2021 Small Struct. 2 2000101 Google Scholar
[9]	Lin Z, Wang C, Chai Y 2020 Small 16 2003319 Google Scholar
[10]	Mannix A J, Zhang Z, Guisinger N P, Yakobson B I, Hersam M C 2018 Nat. Nanotechnol. 13 444 Google Scholar
[11]	Tan C, Cao X, Wu X J, He Q, Yang J, Zhang X, Chen J, Zhao W, Han S, Nam G H 2017 Chem. Rev. 117 6225 Google Scholar
[12]	Koman V B, Liu P, Kozawa D, Liu A T, Cottrill A L, Son Y, Lebron J A, Strano M S 2018 Nat. Nanotechnol. 13 819 Google Scholar
[13]	Zhao C, Tan C, Lien D-H, Song X, Amani M, Hettick M, Nyein H Y Y, Yuan Z, Li L, Scott M C, Javey A 2020 Nat. Nanotechnol. 15 53 Google Scholar
[14]	Zhu W, Low T, Wang H, Ye P, Duan X 2019 2D Mater. 6 032004 Google Scholar
[15]	Conti S, Pimpolari L, Calabrese G, Worsley R, Majee S, Polyushkin D K, Paur M, Pace S, Keum D H, Fabbri F, Iannaccone G, Macucci M, Coletti C, Mueller T, Casiraghi C, Fiori G 2020 Nat. Commun. 11 3566 Google Scholar
[16]	Li T, Guo W, Ma L, Li W, Yu Z, Han Z, Gao S, Liu L, Fan D, Wang Z, Yang Y, Lin W, Luo Z, Chen X, Dai N, Tu X, Pan D, Yao Y, Wang P, Nie Y, Wang J, Shi Y, Wang X 2021 Nat. Nanotechnol. 16 1201 Google Scholar
[17]	Kim K S, Lee D, Chang C S, Seo S, Hu Y, Cha S, Kim H, Shin J, Lee J H, Lee S 2023 Nature 614 88 Google Scholar
[18]	Wang J, Huang C, You Y, Guo Q, Xue G, Hong H, Jiao Q, Yu D, Du L, Zhao Y, Liu K 2022 J. Phys. Chem. C 126 3797 Google Scholar
[19]	Akinwande D, Huyghebaert C, Wang C H, Serna M I, Goossens S, Li L J, Wong H S P, Koppens F H 2019 Nature 573 507 Google Scholar
[20]	Kim K, Choi J Y, Kim T, Cho S H, Chung H J 2011 Nature 479 338 Google Scholar
[21]	Wang M, Huang M, Luo D, Li Y, Choe M, Seong W K, Kim M, Jin S, Wang M, Chatterjee S 2021 Nature 596 519 Google Scholar
[22]	Chen Z, Xie C, Wang W, Zhao J, Liu B, Shan J, Wang X, Hong M, Lin L, Huang L 2021 Sci. Adv. 7 eabk0115 Google Scholar
[23]	Shi Z, Wang X, Li Q, Yang P, Lu G, Jiang R, Wang H, Zhang C, Cong C, Liu Z, Wu T, Wang H, Yu Q, Xie X 2020 Nat. Commun. 11 849 Google Scholar
[24]	Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548 Google Scholar
[25]	Wang H, Xue X, Jiang Q, Wang Y, Geng D, Cai L, Wang L, Xu Z, Yu G 2019 J. Am. Chem. Soc. 141 11004 Google Scholar
[26]	Yazyev O V, Louie S G 2010 Nat. Mater. 9 806 Google Scholar
[27]	Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720 Google Scholar
[28]	Banszerus L, Schmitz M, Engels S, Dauber J, Oellers M, Haupt F, Watanabe K, Taniguchi T, Beschoten B, Stampfer C 2015 Sci. Adv. 1 e1500222 Google Scholar
[29]	Cheng Z, Cao R, Wei K, Yao Y, Liu X, Kang J, Dong J, Shi Z, Zhang H, Zhang X 2021 Adv. Sci. 8 2003834 Google Scholar
[30]	Mak K F, Shan J 2016 Nat. Photonics 10 216 Google Scholar
[31]	Lv L, Zhuge F, Xie F, Xiong X, Zhang Q, Zhang N, Huang Y, Zhai T 2019 Nat. Commun. 10 3331 Google Scholar
[32]	Li J, Ding Y, Zhang D W, Zhou P 2019 Acta Phys. -Chim. Sin. 35 1058 Google Scholar
[33]	Yin J, Tan Z, Hong H, Wu J, Yuan H, Liu Y, Chen C, Tan C, Yao F, Li T, Chen Y, Liu Z, Liu K, Peng H 2018 Nat. Commun. 9 3311 Google Scholar
[34]	Zhou X, Cheng J, Zhou Y, Cao T, Hong H, Liao Z, Wu S, Peng H, Liu K, Yu D 2015 J. Am. Chem. Soc. 137 7994 Google Scholar
[35]	Zuo Y, Yu W, Liu C, Cheng X, Qiao R, Liang J, Zhou X, Wang J, Wu M, Zhao Y, Gao P, Wu S, Sun Z, Liu K, Bai X, Liu Z 2020 Nat. Nanotechnol. 15 987 Google Scholar
[36]	Chen K, Zhou X, Cheng X, Qiao R, Cheng Y, Liu C, Xie Y, Yu W, Yao F, Sun Z, Wang F, Liu K, Liu Z 2019 Nat. Photonics 13 754 Google Scholar
[37]	Hong H, Wu C, Zhao Z, Zuo Y, Wang J, Liu C, Zhang J, Wang F, Feng J, Shen H, Yin J, Wu Y, Zhao Y, Liu K, Gao P, Meng S, Wu S, Sun Z, Liu K, Xiong J 2021 Nat. Photonics 15 510 Google Scholar
[38]	Flöry N, Ma P, Salamin Y, Emboras A, Taniguchi T, Watanabe K, Leuthold J, Novotny L 2020 Nat. Nanotechnol. 15 118 Google Scholar
[39]	Dean C R, Young A F, Meric I, Lee C, Wang L, Sorgenfrei S, Watanabe K, Taniguchi T, Kim P, Shepard K L 2010 Nat. Nanotechnol. 5 722 Google Scholar
[40]	El-Kady M F, Shao Y, Kaner R B 2016 Nat. Rev. Mater. 1 16033 Google Scholar
[41]	Xia J, Chen F, Li J, Tao N 2009 Nat. Nanotechnol. 4 505 Google Scholar
[42]	Li H, Tsai C, Koh A L, Cai L, Contryman A W, Fragapane A H, Zhao J, Han H S, Manoharan H C, Abild-Pedersen F 2016 Nat. Mater. 15 48 Google Scholar
[43]	Qin B, Wang D, Hong T, Wang Y, Liu D, Wang Z, Gao X, Ge Z H, Zhao L D 2023 Nat. Commun. 14 1366 Google Scholar
[44]	Kotakoski J, Meyer J C 2012 Phys. Rev. B 85 195447 Google Scholar
[45]	Lee M, Renshof J R, van Zeggeren K J, Houmes M J, Lesne E, Šiškins M, van Thiel T C, Guis R H, van Blankenstein M R, Verbiest G J 2022 Adv. Mater. 34 2204630 Google Scholar
[46]	Liu Z, Ma L, Shi G, Zhou W, Gong Y, Lei S, Yang X, Zhang J, Yu J, Hackenberg K P 2013 Nat. Nanotechnol. 8 119 Google Scholar
[47]	Ye F, Lee J, Feng P X L 2018 Nano Lett. 18 1678 Google Scholar
[48]	Mehmood A, Mubarak N, Khalid M, Walvekar R, Abdullah E, Siddiqui M, Baloch H A, Nizamuddin S, Mazari S 2020 J. Environ. Chem. Eng. 8 103743 Google Scholar
[49]	Jiang H, Zheng L, Liu Z, Wang X 2020 InfoMat 2 1077 Google Scholar
[50]	Liang J, Wang J, Zhang Z, Su Y, Guo Y, Qiao R, Song P, Gao P, Zhao Y, Jiao Q, Wu S, Sun Z, Yu D, Liu K 2019 Adv. Mater. 31 1808160 Google Scholar
[51]	Liu T, Cui Z, Li X, Cui H, Liu Y 2020 ACS Omega 6 988 Google Scholar
[52]	Jiang F, Zhao W S, Zhang J 2020 Microelectron. Eng. 225 111279 Google Scholar
[53]	徐小志, 张晓闻, 王然, 曾凡凯, 周涛 2021 华南师范大学学报(自然科学版) 53 1 Xu X Z, Zhang X W, Wang R, Zeng F K, Zhou T 2021 J. South China Normal Univ. (Natural Science Edition) 53 1
[54]	Xu X, Liu K 2022 Sci. Bull. 67 1410 Google Scholar
[55]	Liu C, Wang L, Qi J, Liu K 2020 Adv. Mater. 32 2000046 Google Scholar
[56]	刘天瑶, 刘灿, 刘开辉 2022 物理学报 71 108103 Google Scholar Liu T Y, Liu C, Liu K H 2022 Acta Phys. Sin. 71 108103 Google Scholar
[57]	Zhang Z, Forti S, Meng W, Pezzini S, Hu Z, Coletti C, Wang X, Liu K 2023 2D Mater. 10 032001 Google Scholar
[58]	Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110 Google Scholar
[59]	Luo Z, Lu Y, Singer D W, Berck M E, Somers L A, Goldsmith B R, Johnson A C 2011 Chem. Mater. 23 1441 Google Scholar
[60]	Han G H, Gunes F, Bae J J, Kim E S, Chae S J, Shin H J, Choi J Y, Pribat D, Lee Y H 2011 Nano Lett. 11 4144 Google Scholar
[61]	Wu T, Zhang X, Yuan Q, Xue J, Lu G, Liu Z, Wang H, Wang H, Ding F, Yu Q, Xie X, Jiang M 2016 Nat. Mater. 15 43 Google Scholar
[62]	Safron N S, Kim M, Gopalan P, Arnold M S 2012 Adv. Mater. 24 1041 Google Scholar
[63]	Kim H, Mattevi C, Calvo M R, Oberg J C, Artiglia L, Agnoli S, Hirjibehedin C F, Chhowalla M, Saiz E 2012 ACS Nano 6 3614 Google Scholar
[64]	Liu C, Xu X, Qiu L, Wu M, Qiao R, Wang L, Wang J, Niu J, Liang J, Zhou X, Zhang Z, Peng M, Gao P, Wang W, Bai X, Ma D, Jiang Y, Wu X, Yu D, Wang E, Xiong J, Ding F, Liu K 2019 Nat. Chem. 11 730 Google Scholar
[65]	Xu X, Zhang Z, Qiu L, Zhuang J, Zhang L, Wang H, Liao C, Song H, Qiao R, Gao P, Hu Z, Liao L, Yu D, Wang E, Ding F, Peng H, Liu K 2016 Nat. Nanotechnol. 11 930 Google Scholar
[66]	Xu X, Qiao R, Liang Z, Zhang Z, Wang R, Zeng F, Cui G, Zhang X, Zou D, Guo Y, Liu C, Fu Y, Zhou X, Wu M, Wang Z J, Zhao Y, Wang E, Tang Z, Yu D, Liu K 2022 Nano Res. 15 919 Google Scholar
[67]	Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 P. Natl. A. Sci. 109 7992 Google Scholar
[68]	Zang X, Zhou Q, Chang J, Teh K S, Wei M, Zettl A, Lin L 2017 Adv. Mater. Interfaces 4 1600783 Google Scholar
[69]	Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096 Google Scholar
[70]	Vlassiouk I V, Stehle Y, Pudasaini P R, Unocic R R, Rack P D, Baddorf A P, Ivanov I N, Lavrik N V, List F, Gupta N, Bets K V, Yakobson B I, Smirnov S N 2018 Nat. Mater. 17 318 Google Scholar
[71]	Chung J W, Dai Z R, Ohuchi F S 1998 J. Cryst. Growth 186 137 Google Scholar
[72]	Cun H, Macha M, Kim H, Liu K, Zhao Y, LaGrange T, Kis A, Radenovic A 2019 Nano Res. 12 2646 Google Scholar
[73]	Ishihara S, Hibino Y, Sawamoto N, Machida H, Wakabayashi H, Ogura A 2018 MRS Adv. 3 379 Google Scholar
[74]	Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano 9 2080 Google Scholar
[75]	Song X, Gao J, Nie Y, Gao T, Sun J, Ma D, Li Q, Chen Y, Jin C, Bachmatiuk A, Rümmeli M H, Ding F, Zhang Y, Liu Z 2015 Nano Res. 8 3164 Google Scholar
[76]	Zhang Z, Yang X, Liu K, Wang R 2022 Adv. Sci. 9 2105201 Google Scholar
[77]	Young E P, Park J, Bai T, Choi C, DeBlock R H, Lange M, Poust S, Tice J, Cheung C, Dunn B S 2018 ACS Appl. Nano Mater. 1 4737 Google Scholar
[78]	Tao L, Cinquanta E, Chiappe D, Grazianetti C, Fanciulli M, Dubey M, Molle A, Akinwande D 2015 Nat. Nanotechnol. 10 227 Google Scholar
[79]	Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656 Google Scholar
[80]	Shi J, Chen X, Zhao L, Gong Y, Hong M, Huan Y, Zhang Z, Yang P, Li Y, Zhang Q 2018 Adv. Mater. 30 1804616 Google Scholar
[81]	Jiao L, Jie W, Yang Z, Wang Y, Chen Z, Zhang X, Tang W, Wu Z, Hao J 2019 J. Mater. Chem. C 7 2522 Google Scholar
[82]	Seo S, Choi H, Kim S Y, Lee J, Kim K, Yoon S, Lee B H, Lee S 2018 Adv. Mater. Interfaces 5 1800524 Google Scholar
[83]	Keller B D, Bertuch A, Provine J, Sundaram G, Ferralis N, Grossman J C 2017 Chem. Mater. 29 2024 Google Scholar
[84]	Zhou W, Zou X, Najmaei S, Liu Z, Shi Y, Kong J, Lou J, Ajayan P M, Yakobson B I, Idrobo J C 2013 Nano letters 13 2615 Google Scholar
[85]	Shu H, Tao X M, Ding F 2015 Nanoscale 7 1627 Google Scholar
[86]	Metin O, Mazumder V, Ozkar S, Sun S 2010 J. Am. Chem. Soc. 132 1468 Google Scholar
[87]	Liu S, Van Duin A C, Van Duin D M, Liu B, Edgar J H 2017 ACS Nano 11 3585 Google Scholar
[88]	Liu S, Comer J, Van Duin A C, Van Duin D M, Liu B, Edgar J H 2019 Nanoscale 11 5607 Google Scholar
[89]	Zhang X, Xu Z, Hui L, Xin J, Ding F 2012 J. Phys. Chem. Lett. 3 2822 Google Scholar
[90]	Dong J, Zhang L, Dai X, Ding F 2020 Nat. Commun. 11 5862 Google Scholar
[91]	Wang Z J, Dong J, Li L, Dong G, Cui Y, Yang Y, Wei W, Blume R, Li Q, Wang L, Xu X, Liu K, Barroo C, Frenken J W M, Fu Q, Bao X, Schlögl R, Ding F, Willinger M G 2020 ACS Nano 14 1902 Google Scholar
[92]	Dong J, Geng D, Liu F, Ding F 2019 Angew. Chem. Int. Edit. 58 7723 Google Scholar
[93]	Zuo Y, Liu C, Ding L, Qiao R, Tian J, Liu C, Wang Q, Xue G, You Y, Guo Q, Wang J, Fu Y, Liu K, Zhou X, Hong H, Wu M, Lu X, Yang R, Zhang G, Yu D, Wang E, Bai X, Ding F, Liu K 2022 Nat. Commun. 13 1007 Google Scholar
[94]	Zhao R, Zhao X, Liu Z, Ding F, Liu Z 2017 Nanoscale 9 3561 Google Scholar
[95]	Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H j 2009 Adv. Mater. 21 2777 Google Scholar
[96]	Hu B, Ago H, Ito Y, Kawahara K, Tsuji M, Magome E, Sumitani K, Mizuta N, Ikeda K I, Mizuno S 2012 Carbon 50 57 Google Scholar
[97]	Zhang X, Wu T, Jiang Q, Wang H, Zhu H, Chen Z, Jiang R, Niu T, Li Z, Zhang Y 2019 Small 15 1805395 Google Scholar
[98]	Braeuninger-Weimer P, Brennan B, Pollard A J, Hofmann S 2016 Chem. Mater. 28 8905 Google Scholar
[99]	Wang Z J, Liang Z, Kong X, Zhang X, Qiao R, Wang J, Zhang S, Zhang Z, Xue C, Cui G, Zhang Z, Zou D, Liu Z, Li Q, Wei W, Zhou X, Tang Z, Yu D, Wang E, Liu K, Ding F, Xu X 2022 Nano Lett. 22 4661 Google Scholar
[100]	Zhang Z, Xu X, Qiu L, Wang S, Wu T, Ding F, Peng H, Liu K 2017 Adv. Sci. 4 1700087 Google Scholar
[101]	Zhan Y, Liu Z, Najmaei S, Ajayan P M, Lou J 2012 Small 8 966 Google Scholar
[102]	Graf D, Molitor F, Ensslin K, Stampfer C, Jungen A, Hierold C, Wirtz L 2007 Nano Lett. 7 238 Google Scholar
[103]	Xu X, Lin C, Fu R, Wang S, Pan R, Chen G, Shen Q, Liu C, Guo X, Wang Y, Zhao R, Liu K, Luo Z, Hu Z, Li H 2016 AIP Adv. 6 025026 Google Scholar
[104]	Liu L, Li T, Ma L, Li W, Gao S, Sun W, Dong R, Zou X, Fan D, Shao L, Gu C, Dai N, Yu Z, Chen X, Tu X, Nie Y, Wang P, Wang J, Shi Y, Wang X 2022 Nature 605 69 Google Scholar
[105]	Chen L, Liu B, Ge M, Ma Y, Abbas A N, Zhou C 2015 ACS Nano 9 8368 Google Scholar
[106]	Deshpande S, Heo J, Das A, Bhattacharya P 2013 Nat. Commun. 4 1675 Google Scholar
[107]	Kim I H, Park H S, Park Y J, Kim T 1998 Appl. Phys. Lett. 73 1634 Google Scholar
[108]	Wang R, Koch N, Martin J, Sadofev S 2023 Phys. Status. Solidi-R 17 2200476 Google Scholar
[109]	Zhang Z, Ding M, Cheng T, Qiao R, Zhao M, Luo M, Wang E, Sun Y, Zhang S, Li X, Zhang Z, Mao H, Liu F, Fu Y, Liu K, Zou D, Liu C, Wu M, Fan C, Zhu Q, Wang X, Gao P, Li Q, Liu K, Zhang Y, Bai X, Yu D, Ding F, Wang E, Liu K 2022 Nat. Nanotechnol. 17 1258 Google Scholar
[110]	Lin Y C, Komsa H P, Yeh C H, Bjorkman T, Liang Z Y, Ho C H, Huang Y S, Chiu P W, Krasheninnikov A V, Suenaga K 2015 ACS Nano 9 11249 Google Scholar
[111]	Jiang S, Hong M, Wei W, Zhao L, Zhang N, Zhang Z, Yang P, Gao N, Zhou X, Xie C 2018 Commun. Chem. 1 17 Google Scholar
[112]	Wu K, Chen B, Yang S, Wang G, Kong W, Cai H, Aoki T, Soignard E, Marie X, Yano A 2016 Nano Lett. 16 5888 Google Scholar
[113]	Meng J, Zhang X, Wang Y, Yin Z, Liu H, Xia J, Wang H, You J, Jin P, Wang D 2017 Small 13 1604179 Google Scholar
[114]	Mannix A J, Zhou X F, Kiraly B, Wood J D, Alducin D, Myers B D, Liu X, Fisher B L, Santiago U, Guest J R 2015 Science 350 1513 Google Scholar
[115]	Wang X, He J, Zhou B, Zhang Y, Wu J, Hu R, Liu L, Song J, Qu J 2018 Angew. Chem. Ger. Edit 130 8804 Google Scholar
[116]	Yuhara J, Shimazu H, Ito K, Ohta A, Araidai M, Kurosawa M, Nakatake M, Le Lay G 2018 ACS Nano 12 11632 Google Scholar
[117]	Yuhara J, He B, Matsunami N, Nakatake M, Le Lay G 2019 Adv. Mater. 31 1901017 Google Scholar
[118]	Zhou J, Chen J, Chen M, Wang J, Liu X, Wei B, Wang Z, Li J, Gu L, Zhang Q 2019 Adv. Mater. 31 1807874 Google Scholar
[119]	Gao J, Yip J, Zhao J, Yakobson B I, Ding F 2011 J. Am. Chem. Soc. 133 5009 Google Scholar
[120]	Yuan Q, Yakobson B I, Ding F 2014 J. Phys. Chem. Lett. 5 3093 Google Scholar
[121]	Li X, Dong J, Idrobo J C, Puretzky A A, Rouleau C M, Geohegan D B, Ding F, Xiao K 2017 J. Am. Chem. Soc. 139 482 Google Scholar
[122]	Li J, Li Y, Yin J, Ren X, Liu X, Jin C, Guo W 2016 Small 12 3645 Google Scholar
[123]	Wang S, Dearle A E, Maruyama M, Ogawa Y, Okada S, Hibino H, Taniyasu Y 2019 Adv. Mater. 31 1900880 Google Scholar
[124]	Li P, Wei W, Zhang M, Mei Y, Chu P K, Xie X, Yuan Q, Di Z 2020 Nano Today 34 100908 Google Scholar
[125]	Nie S, Wofford J M, Bartelt N C, Dubon O D, McCarty K F 2011 Phys. Rev. B 84 155425 Google Scholar
[126]	Griep M H, Sandoz-Rosado E, Tumlin T M, Wetzel E 2016 Nano Lett. 16 1657 Google Scholar
[127]	Dai J, Wang D, Zhang M, Niu T, Li A, Ye M, Qiao S, Ding G, Xie X, Wang Y 2016 Nano Lett. 16 3160 Google Scholar
[128]	Driver S, Toomes R, Woodruff D 2016 Surf. Sci. 646 114 Google Scholar
[129]	Bets K V, Gupta N, Yakobson B I 2019 Nano Lett. 19 2027 Google Scholar
[130]	Chen T A, Chuu C P, Tseng C C, Wen C K, Wong H S P, Pan S, Li R, Chao T A, Chueh W C, Zhang Y 2020 Nature 579 219 Google Scholar
[131]	Ohta T, Bostwick A, Seyller T, Horn K, Rotenberg E 2006 Science 313 951 Google Scholar
[132]	Berger C, Song Z, Li X, Wu X, Brown N, Naud C, Mayou D, Li T, Hass J, Marchenkov A N, Conrad E H, First P N, de Heer W A 2006 Science 312 1191 Google Scholar
[133]	Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, Ruoff R S 2009 Science 324 1312 Google Scholar
[134]	Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706 Google Scholar
[135]	Xu X, Zhang Z, Dong J, Yi D, Niu J, Wu M, Lin L, Yin R, Li M, Zhou J, Wang S, Sun J, Duan X, Gao P, Jiang Y, Wu X, Peng H, Ruoff R S, Liu Z, Yu D, Wang E, Ding F, Liu K 2017 Sci. Bull. 62 1074 Google Scholar
[136]	Hou Y, Wang B, Zhan L, Qing F, Wang X, Niu X, Li X 2020 Mater. Today 36 10 Google Scholar
[137]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung T F, Peng P, Guisinger N P, Stach E A, Bao J, Pei S S, Chen Y P 2011 Nat. Mater. 10 443 Google Scholar
[138]	Wu M, Zhang Z, Xu X, Zhang Z, Duan Y, Dong J, Qiao R, You S, Wang L, Qi J, Zou D, Shang N, Yang Y, Li H, Zhu L, Sun J, Yu H, Gao P, Bai X, Jiang Y, Wang Z J, Ding F, Yu D, Wang E, Liu K 2020 Nature 581 406 Google Scholar
[139]	Li Y, Sun L, Chang Z, Liu H, Wang Y, Liang Y, Chen B, Ding Q, Zhao Z, Wang R, Wei Y, Peng H, Lin L, Liu Z 2020 Adv. Mater. 32 2002034 Google Scholar
[140]	Li L, Ma T, Yu W, Zhu M, Li J, Chen Z, Li H, Zhao M, Teng J, Tian B, Su C, Loh K P 2021 2D Mater. 8 035019 Google Scholar
[141]	Wan Y, Fu J H, Chuu C P, Tung V, Shi Y, Li L J 2022 Chem. Soc. Rev. 51 803 Google Scholar
[142]	Lee J H, Lee E K, Joo W J, Jang Y, Kim B S, Lim J Y, Choi S H, Ahn S J, Ahn J R, Park M H, Yang C W, Choi B L, Hwang S W, Whang D 2014 Science 344 286 Google Scholar
[143]	Zhang Z, Penev E S, Yakobson B I 2016 Nat. Chem. 8 525 Google Scholar
[144]	Sun X, Liu X, Yin J, Yu J, Li Y, Hang Y, Zhou X, Yu M, Li J, Tai G, Guo W 2017 Adv. Funct. Mater. 27 1603300 Google Scholar
[145]	Liu Y, Penev E S, Yakobson B I 2013 Angew. Chem. Int. Edit. 52 3156 Google Scholar
[146]	Feng B, Zhang J, Zhong Q, Li W, Li S, Li H, Cheng P, Meng S, Chen L, Wu K 2016 Nat. Chem. 8 563 Google Scholar
[147]	Kiraly B, Liu X, Wang L, Zhang Z, Mannix A J, Fisher B L, Yakobson B I, Hersam M C, Guisinger N P 2019 ACS Nano 13 3816 Google Scholar
[148]	Liu H, Gao J, Zhao J 2013 Sci. Rep. -UK 3 3238 Google Scholar
[149]	Li W, Kong L, Chen C, Gou J, Sheng S, Zhang W, Li H, Chen L, Cheng P, Wu K 2018 Sci. Bull. 63 282 Google Scholar
[150]	Zhong Q, Kong L, Gou J, Li W, Sheng S, Yang S, Cheng P, Li H, Wu K, Chen L 2017 Phys. Rev. Mater. 1 021001 Google Scholar
[151]	Wu R, Drozdov I K, Eltinge S, Zahl P, Ismail-Beigi S, Božović I, Gozar A 2019 Nat. Nanotechnol. 14 44 Google Scholar
[152]	Wu R, Eltinge S, Drozdov I K, Gozar A, Zahl P, Sadowski J T, Ismail-Beigi S, Božović I 2022 Nat. Chem. 14 377 Google Scholar
[153]	Yang W, Berthou S, Lu X, Wilmart Q, Denis A, Rosticher M, Taniguchi T, Watanabe K, Fève G, Berroir J M, Zhang G, Voisin C, Baudin E, Plaçais B 2018 Nat. Nanotechnol. 13 47 Google Scholar
[154]	Yankowitz M, Ma Q, Jarillo-Herrero P, LeRoy B J 2019 Nat. Rev. Phys. 1 112 Google Scholar
[155]	Hu S, Lozada-Hidalgo M, Wang F, Mishchenko A, Schedin F, Nair R R, Hill E, Boukhvalov D, Katsnelson M, Dryfe R A 2014 Nature 516 227 Google Scholar
[156]	Wang L, Meric I, Huang P, Gao Q, Gao Y, Tran H, Taniguchi T, Watanabe K, Campos L, Muller D 2013 Science 342 614 Google Scholar
[157]	Lu G, Wu T, Yuan Q, Wang H, Wang H, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6160 Google Scholar
[158]	Liu L, Park J, Siegel D A, McCarty K F, Clark K W, Deng W, Basile L, Idrobo J C, Li A-P, Gu G 2014 Science 343 163 Google Scholar
[159]	Wang L, Xu X, Zhang L, Qiao R, Wu M, Wang Z, Zhang S, Liang J, Zhang Z, Zhang Z, Chen W, Xie X, Zong J, Shan Y, Guo Y, Willinger M, Wu H, Li Q, Wang W, Gao P, Wu S, Zhang Y, Jiang Y, Yu D, Wang E, Bai X, Wang Z J, Ding F, Liu K 2019 Nature 570 91 Google Scholar
[160]	Ma K Y, Zhang L, Jin S, Wang Y, Yoon S I, Hwang H, Oh J, Jeong D S, Wang M, Chatterjee S, Kim G, Jang A R, Yang J, Ryu S, Jeong H Y, Ruoff R S, Chhowalla M, Ding F, Shin H S 2022 Nature 606 88 Google Scholar
[161]	Liu Z, Gong Y, Zhou W, Ma L, Yu J, Idrobo J C, Jung J, MacDonald A H, Vajtai R, Lou J, Ajayan P M 2013 Nat. Commun. 4 2541 Google Scholar
[162]	Caneva S, Weatherup R S, Bayer B C, Blume R, Cabrero-Vilatela A, Braeuninger-Weimer P, Martin M-B, Wang R, Baehtz C, Schloegl R, Meyer J C, Hofmann S 2016 Nano Lett. 16 1250 Google Scholar
[163]	Liu D, Chen X, Yan Y, Zhang Z, Jin Z, Yi K, Zhang C, Zheng Y, Wang Y, Yang J, Xu X, Chen J, Lu Y, Wei D, Wee A T S, Wei D 2019 Nat. Commun. 10 1188 Google Scholar
[164]	Jang A R, Hong S, Hyun C, Yoon S I, Kim G, Jeong H Y, Shin T J, Park S O, Wong K, Kwak S K, Park N, Yu K, Choi E, Mishchenko A, Withers F, Novoselov K S, Lim H, Shin H S 2016 Nano Lett. 16 3360 Google Scholar
[165]	Biswas A, Ruan Q, Lee F, Li C, Iyengar S A, Puthirath A B, Zhang X, Kannan H, Gray T, Birdwell A G, Neupane M R, Shah P B, Ruzmetov D A, Ivanov T G, Vajtai R, Tripathi M, Dalton A, Yakobson B I, Ajayan P M 2023 Appl. Mater. Today 30 101734 Google Scholar
[166]	Lee Y H, Yu L, Wang H, Fang W, Ling X, Shi Y, Lin C T, Huang J K, Chang M T, Chang C S 2013 Nano Lett. 13 1852 Google Scholar
[167]	Zhang Y, Zhang Y, Ji Q, Ju J, Yuan H, Shi J, Gao T, Ma D, Liu M, Chen Y 2013 ACS Nano 7 8963 Google Scholar
[168]	Van Der Zande A M, Huang P Y, Chenet D A, Berkelbach T C, You Y, Lee G H, Heinz T F, Reichman D R, Muller D A, Hone J C 2013 Nat. Mater. 12 554 Google Scholar
[169]	Najmaei S, Liu Z, Zhou W, Zou X, Shi G, Lei S, Yakobson B I, Idrobo J-C, Ajayan P M, Lou J 2013 Nat. Mater. 12 754 Google Scholar
[170]	Yang P, Zhang S, Pan S, Tang B, Liang Y, Zhao X, Zhang Z, Shi J, Huan Y, Shi Y, Pennycook S J, Ren Z, Zhang G, Chen Q, Zou X, Liu Z, Zhang Y 2020 ACS Nano 14 5036 Google Scholar
[171]	Hu J, Quan W, Yang P, Cui F, Liu F, Zhu L, Pan S, Huan Y, Zhou F, Fu J, Zhang G, Gao P, Zhang Y 2023 ACS Nano 17 312 Google Scholar
[172]	Yang P, Wang D, Zhao X, Quan W, Jiang Q, Li X, Tang B, Hu J, Zhu L, Pan S, Shi Y, Huan Y, Cui F, Qiao S, Chen Q, Liu Z, Zou X, Zhang Y 2022 Nat. Commun. 13 3238 Google Scholar
[173]	Aljarb A, Fu J H, Hsu C C, Chuu C P, Wan Y, Hakami M, Naphade D R, Yengel E, Lee C J, Brems S, Chen T A, Li M Y, Bae S H, Hsu W T, Cao Z, Albaridy R, Lopatin S, Chang W H, Anthopoulos T D, Kim J, Li L J, Tung V 2020 Nat. Mater. 19 1300 Google Scholar
[174]	Aljarb A, Cao Z, Tang H L, Huang J K, Li M, Hu W, Cavallo L, Li L J 2017 ACS Nano 11 9215 Google Scholar
[175]	Wang J, Xu X, Cheng T, Gu L, Qiao R, Liang Z, Ding D, Hong H, Zheng P, Zhang Z, Zhang Z, Zhang S, Cui G, Chang C, Huang C, Qi J, Liang J, Liu C, Zuo Y, Xue G, Fang X, Tian J, Wu M, Guo Y, Yao Z, Jiao Q, Liu L, Gao P, Li Q, Yang R, Zhang G, Tang Z, Yu D, Wang E, Lu J, Zhao Y, Wu S, Ding F, Liu K 2022 Nat. Nanotechnol. 17 33 Google Scholar
[176]	Mounet N, Gibertini M, Schwaller P, Campi D, Merkys A, Marrazzo A, Sohier T, Castelli I E, Cepellotti A, Pizzi G 2018 Nat. Nanotechnol. 13 246 Google Scholar
[177]	Dumcenco D, Ovchinnikov D, Marinov K, Lazić P, Gibertini M, Marzari N, Sanchez O L, Kung Y C, Krasnozhon D, Chen M W, Bertolazzi S, Gillet P, Fontcuberta i Morral A, Radenovic A, Kis A 2015 ACS Nano 9 4611 Google Scholar
[178]	Li N, Wang Q, Shen C, Wei Z, Yu H, Zhao J, Lu X, Wang G, He C, Xie L, Zhu J, Du L, Yang R, Shi D, Zhang G 2020 Nat. Electron. 3 711 Google Scholar
[179]	Wang Q, Li N, Tang J, Zhu J, Zhang Q, Jia Q, Lu Y, Wei Z, Yu H, Zhao Y, Guo Y, Gu L, Sun G, Yang W, Yang R, Shi D, Zhang G 2020 Nano Lett. 20 7193 Google Scholar
[180]	Yin J, Liu X, Lu W, Li J, Cao Y, Li Y, Xu Y, Li X, Zhou J, Jin C, Guo W 2015 Small 11 5375 Google Scholar
[181]	Zheng P, Wei W, Liang Z, Qin B, Tian J, Wang J, Qiao R, Ren Y, Chen J, Huang C, Zhou X, Zhang G, Tang Z, Yu D, Ding F, Liu K, Xu X 2023 Nat. Commun. 14 592 Google Scholar
[182]	Ma Z, Wang S, Deng Q, Hou Z, Zhou X, Li X, Cui F, Si H, Zhai T, Xu H 2020 Small 16 2000596 Google Scholar
[183]	Chubarov M, Choudhury T H, Hickey D R, Bachu S, Zhang T, Sebastian A, Bansal A, Zhu H, Trainor N, Das S, Terrones M, Alem N, Redwing J M 2021 ACS Nano 15 2532 Google Scholar
[184]	Choi S H, Kim H J, Song B, Kim Y I, Han G, Nguyen H T T, Ko H, Boandoh S, Choi J H, Oh C S, Cho H J, Jin J W, Won Y S, Lee B H, Yun S J, Shin B G, Jeong H Y, Kim Y M, Han Y K, Lee Y H, Kim S M, Kim K K 2021 Adv. Mater. 33 2006601 Google Scholar
[185]	Li J, Wang S, Jiang Q, Qian H, Hu S, Kang H, Chen C, Zhan X, Yu A, Zhao S, Zhang Y, Chen Z, Sui Y, Qiao S, Yu G, Peng S, Jin Z, Liu X 2021 Small 17 2100743 Google Scholar
[186]	Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J-A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001 Google Scholar
[187]	Grønborg S S, Ulstrup S, Bianchi M, Dendzik M, Sanders C E, Lauritsen J V, Hofmann P, Miwa J A 2015 Langmuir 31 9700 Google Scholar
[188]	Pan S, Yang P, Zhu L, Hong M, Xie C, Zhou F, Shi Y, Huan Y, Cui F, Zhang Y 2021 Nanotechnology 32 095601 Google Scholar
[189]	Tumino F, Grazianetti C, Martella C, Ruggeri M, Russo V, Li Bassi A, Molle A, Casari C S 2021 J. Phys. Chem. C 125 9479 Google Scholar
[190]	Tay R Y, Park H J, Ryu G H, Tan D, Tsang S H, Li H, Liu W, Teo E H T, Lee Z, Lifshitz Y, Ruoff R S 2016 Nanoscale 8 2434 Google Scholar
[191]	Uchida Y, Iwaizako T, Mizuno S, Tsuji M, Ago H 2017 Phys. Chem. Chem. Phys. 19 8230 Google Scholar
[192]	Taslim A B, Nakajima H, Lin Y C, Uchida Y, Kawahara K, Okazaki T, Suenaga K, Hibino H, Ago H 2019 Nanoscale 11 14668 Google Scholar
[193]	Butashin A V, Vlasov V P, Kanevskii V M, Muslimov A E, Fedorov V A 2012 Crystallogr. Rep.+ 57 824 Google Scholar
[194]	Zhang X, Nan H, Xiao S, Wan X, Gu X, Du A, Ni Z, Ostrikov K 2019 Nat. Commun. 10 598 Google Scholar
[195]	Li X, Shi X, Marian D, Soriano D, Cusati T, Iannaccone G, Fiori G, Guo Q, Zhao W, Wu Y 2023 Sci. Adv. 9 eade5706 Google Scholar
[196]	Liu F, Wu W, Bai Y, Chae S H, Li Q, Wang J, Hone J, Zhu X Y 2020 Science 367 903 Google Scholar
[197]	Chen C, Lv H, Zhang P, Zhuo Z, Wang Y, Ma C, Li W, Wang X, Feng B, Cheng P 2022 Nat. Chem. 14 25 Google Scholar
[198]	Zhang X, Huangfu L, Gu Z, Xiao S, Zhou J, Nan H, Gu X, Ostrikov K 2021 Small 17 2007312 Google Scholar

[1]	李建军, 崔屿峥, 付聪乐, 秦晓伟, 李雨畅, 邓军. 具有多MO喷嘴垂直MOCVD反应腔外延层厚度均匀性的优化理论及应用. 物理学报, 2024, 73(4): 046801. doi: 10.7498/aps.73.20231555
[2]	刘天瑶, 刘灿, 刘开辉. 表界面调控米级二维单晶原子制造. 物理学报, 2022, 71(10): 108103. doi: 10.7498/aps.71.20212399
[3]	陈振飞, 冯露, 赵洋, 齐红蕊. 力和扩散机理下外延形貌的演化分析. 物理学报, 2015, 64(13): 138103. doi: 10.7498/aps.64.138103
[4]	陈城钊, 郑元宇, 黄诗浩, 李成, 赖虹凯, 陈松岩. 硅基低位错密度厚锗外延层的UHV/CVD法生长. 物理学报, 2012, 61(7): 078104. doi: 10.7498/aps.61.078104
[5]	苏少坚, 汪巍, 张广泽, 胡炜玄, 白安琪, 薛春来, 左玉华, 成步文, 王启明. Si(001)衬底上分子束外延生长Ge0.975Sn0.025合金薄膜. 物理学报, 2011, 60(2): 028101. doi: 10.7498/aps.60.028101
[6]	乌晓燕, 孔明, 李戈扬, 赵文济. Si3N4在h-AlN上的晶体化与AlN/Si3N4纳米多层膜的超硬效应. 物理学报, 2009, 58(4): 2654-2659. doi: 10.7498/aps.58.2654
[7]	张营堂, 何萌, 陈子瑜, 吕惠宾. 用激光分子束外延在玻璃衬底上生长La0.67Sr0.33MnO3薄膜. 物理学报, 2009, 58(3): 2002-2004. doi: 10.7498/aps.58.2002
[8]	喻利花, 董师润, 许俊华, 李戈扬. TaN/TiN和NbN/TiN纳米结构多层膜超硬效应及超硬机理研究. 物理学报, 2008, 57(11): 7063-7068. doi: 10.7498/aps.57.7063
[9]	宋禹忻, 俞重远, 刘玉敏. 沉积速率和生长停顿对InAs/GaAs量子点超晶格生长影响的综合分析. 物理学报, 2008, 57(4): 2399-2403. doi: 10.7498/aps.57.2399
[10]	何萌, 刘国珍, 仇杰, 邢杰, 吕惠宾. 用激光分子束外延在Si衬底上外延生长高质量的TiN薄膜. 物理学报, 2008, 57(2): 1236-1240. doi: 10.7498/aps.57.1236
[11]	李美亚, 汪晶, 刘军, 于本方, 郭冬云, 赵兴中. YBa2Cu3O7-x涂层导体的外延生长和性能对CeO2缓冲层的依赖性. 物理学报, 2008, 57(5): 3132-3137. doi: 10.7498/aps.57.3132
[12]	喻利花, 董松涛, 董师润, 许俊华. AlN/Si3N4纳米多层膜的外延生长与力学性能. 物理学报, 2008, 57(8): 5151-5158. doi: 10.7498/aps.57.5151
[13]	赵文济, 董云杉, 岳建岭, 李戈扬. Si3N4的晶体化和ZrN/Si3N4纳米多层膜的超硬效应. 物理学报, 2007, 56(1): 459-464. doi: 10.7498/aps.56.459
[14]	刘艳, 董云杉, 岳建岭, 李戈扬. 反应磁控溅射ZrN/AlON纳米多层膜的晶体生长和超硬效应. 物理学报, 2006, 55(11): 6013-6019. doi: 10.7498/aps.55.6013
[15]	孔明, 魏仑, 董云杉, 李戈扬. TiN/Al2O3纳米多层膜的共格外延生长及超硬效应. 物理学报, 2006, 55(2): 770-775. doi: 10.7498/aps.55.770
[16]	周耐根, 周浪, 杜丹旭. 面心立方晶体外延膜沉积生长中失配位错的结构与形成过程. 物理学报, 2006, 55(1): 372-377. doi: 10.7498/aps.55.372
[17]	魏仑, 梅芳华, 邵楠, 李戈扬, 李建国. TiN/SiO2纳米多层膜的晶体生长与超硬效应. 物理学报, 2005, 54(4): 1742-1748. doi: 10.7498/aps.54.1742
[18]	劳技军, 孔明, 张惠娟, 李戈扬. TiN/SiC纳米多层膜的生长结构与力学性能. 物理学报, 2004, 53(6): 1961-1966. doi: 10.7498/aps.53.1961
[19]	王剑屏, 郝跃, 彭军, 朱作云, 张永华. 蓝宝石衬底上异质外延生长碳化硅薄膜的研究. 物理学报, 2002, 51(8): 1793-1797. doi: 10.7498/aps.51.1793
[20]	叶健松, 胡晓君. 超薄膜外延生长的Monte Carlo模拟. 物理学报, 2002, 51(5): 1108-1112. doi: 10.7498/aps.51.1108

计量

文章访问数: 5910
PDF下载量: 163
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板