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Residual stress measurement of porous silicon thin film by substrate curvature method

Di Yu-Xian Ji Xin-Hua Hu Ming Qin Yu-Wen Chen Jin-Long

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Residual stress measurement of porous silicon thin film by substrate curvature method

Di Yu-Xian, Ji Xin-Hua, Hu Ming, Qin Yu-Wen, Chen Jin-Long
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  • Abstract views:  9830
  • PDF Downloads:  1699
  • Cited By: 0
Publishing process
  • Received Date:  23 November 2005
  • Accepted Date:  15 December 2005
  • Published Online:  05 May 2006

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