Effect of film thickness on photoelectric properties of <inline-formula>\boldsymbol\beta <img text_id='Z-20220216211654' class='formula-img' style='display:none;' src='4-20211744_Z-20220216211654.jpg'><alternatives></alternatives></inline-formula>-Ga2O3 films prepared by radio frequency magnetron sputtering

Li Xiu-Hua; Zhang Min; Yang Jia; Xing Shuang; Gao Yue; Li Ya-Ze; Li Si-Yu; Wang Chong-Jie

doi:10.7498/aps.71.20211744

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Li Xiu-Hua, Zhang Min, Yang Jia, Xing Shuang, Gao Yue, Li Ya-Ze, Li Si-Yu, Wang Chong-Jie. Effect of film thickness on photoelectric properties of \boldsymbol\beta -Ga2O3 films prepared by radio frequency magnetron sputteringJ. Acta Physica Sinica, 2022, 71(4): 048501. DOI: 10.7498/aps.71.20211744

Citation:

Li Xiu-Hua, Zhang Min, Yang Jia, Xing Shuang, Gao Yue, Li Ya-Ze, Li Si-Yu, Wang Chong-Jie. Effect of film thickness on photoelectric properties of \boldsymbol\beta -Ga2O3 films prepared by radio frequency magnetron sputteringJ. Acta Physica Sinica, 2022, 71(4): 048501. DOI: 10.7498/aps.71.20211744

Citation:

Li Xiu-Hua, Zhang Min, Yang Jia, Xing Shuang, Gao Yue, Li Ya-Ze, Li Si-Yu, Wang Chong-Jie. Effect of film thickness on photoelectric properties of \boldsymbol\beta -Ga2O3 films prepared by radio frequency magnetron sputteringJ. Acta Physica Sinica, 2022, 71(4): 048501. DOI: 10.7498/aps.71.20211744