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In recent years, transition metal dichalcogenides materials represented by monolayer molybdenum disulfide (MoS2) have aroused great interest due to their excellent optical and electrical properties. The synthesis method of high-quality monolayer MoS2 film is a key problem for scientific research and industrial application. Recently, researchers have proposed a salt-assisted chemical vapor deposition method for growing the monolayer films, which greatly promotes the growth rate and quality of monolayer film. By using this method, we design a growth source of semi-enclosed quartz boat, and successfully obtain high-quality monolayer MoS2 films by using the double auxiliary action of sodium chloride (NaCl). Scanning electron microscopy shows the excellent film formation, and the photoluminescence spectra show that the luminescence intensity is significantly higher than that of the sample grown without NaCl. The NaCl double-assisted growth method proposed in this study can reduce the growth temperature of MoS2, shorten the growth time, and improve the optical properties of the films. Besides, the operation is simple and the cost is low, which provides an idea for growing the large-scale two-dimensional materials.
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Keywords:
- MoS2 /
- chemical vapor deposition /
- NaCl dual-assist strategy /
- monolayer film growth
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图 5 (a)—(c) 不同浓度的NaCl搭配下的光学显微镜图像 (a) 10 mg + 0.1 mmol/L; (b) 10 mg + 0.3 mmol/L, 内插图为MoS2边界的AFM图; (c) 10 mg + 0.5 mmol/L. (d) 10 mg + 0.3 mmol/L条件下生长的MoS2在Si衬底的照片以及左中右三块区域的大范围SEM图像
Figure 5. (a)–(c) Optical microscope images with different concentrations of NaCl: (a) 10 mg + 0.1 mmol/L; (b) 10 mg + 0.3 mmol/L, the inside image is an AFM diagram of MoS2 boundary; (c) 10 mg + 0.5 mmol/L. (d) Photographs of MoS2 grown under the condition of 10 mg + 0.3 mmol/L and large range SEM images corresponding to the three regions of left, middle and right
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Google Scholar
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Google Scholar
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Google Scholar
[4] Wu T, Zhang X, Yuan Q, Xue J, Lu G, Liu Z, Wang H, Wang H, Ding F, Yu Q, Xie X, Jiang M 2016 Nat. Mater. 15 43
Google Scholar
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Google Scholar
Xu Y Q, Wang C 2020 Acta Phys. Sin. 69 184216
Google Scholar
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Google Scholar
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Google Scholar
Fan Z R, Kong Y Y, Li Y H, Li Z, Jia T T 2019 J. Synth. Cryst. 48 1190
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[13] Fu D, Zhao X, Zhang Y Y, Li L, Xu H, Jang A R, Yoon S I, Song P, Poh S M, Ren T, Ding Z, Fu W, Shin T J, Shin H S, Pantelides S T, Zhou W, Loh K P 2017 J. Am. Chem. Soc. 139 9392
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[15] Wang S, Rong Y, Fan Y, Pacios M, Bhaskaran H, He K, Warner J H 2014 Chem. Mater. 26 6371
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Wei X X, Cheng Y, Huo D, Zhang Y H, Wang J Z, Hu Y, Shi Y 2014 Acta Phys. Sin. 63 217802
Google Scholar
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Google Scholar
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Google Scholar
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Google Scholar
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Google Scholar
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Google Scholar
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Google Scholar
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