Preparation and photoelectric property of large scale monolayer MoS<sub>2</sub>

Wu Peng; Tan Lun; Li Wei; Cao Li-Wei; Zhao Jun-Bo; Qu Yao; Li Ang

doi:10.7498/aps.72.20230273

Abstract

Transition metal dichalcogenide (TMDC) monolayers exhibit enhanced electrical and optoelectrical properties, which are promising for next-generation optoelectronic devices. However, large-scale and uniform growth of TMDC monolayers with large grain size is still a considerable challenge. Presented in this work is a simple and effective approach to fabricating largescale molybdenum (MoS₂) disulfide monolayers by chemical vapor deposition (CVD) method. It is found that MoS₂ grows from single crystal into thin film with the increase of oxide precursor proportion. The photodetector of large scale monolayer layer MoS₂ film is fabricated by depositing metal electrodes on the interdigital electrode mask through using thermal evaporation coating. Finally, the highly stable and repeatable photoelectric responses under the conditions of different voltages and different laser power are characterized under 405-nm laser excitation, with response time decreasing down to the order of milliseconds (ms). In addition, the photodetector achieves a wide spectral detection range from 405 nm to 830 nm, that is, from visible light to near-infrared light wavelength range, with optical response (R) of 291.7 mA/W and optical detection rate (D^*) of 1.629×10⁹ Jones. The monolayer MoS₂ thin film photodetector demonstrated here has the advantages of low cost, feasibility of large-scale preparation, and good stability and repeatability in the wide spectrum range from visible light to near infrared light wavelength, providing the possibilities for future applications of electronic and optoelectronic devices .

Keywords:

Authors and contacts

1.
Beijing Key Lab of Microstructure and Properties of Advanced Materials, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
2.
Hubei Engineering Research Center for Safety Detection and Control of Hydrogen Energy, School of Physics and Electronic Sciences, Hubei University, Wuhan 430062, China

Corresponding author: Li Ang, ang.li@bjut.edu.cn

Funds: Project supported by the Beijing Outstanding Young Scientists Projects, China (Grant No. BJJWZYJH01201910005018) and the National Key Research and Development Program, China (Grant No. 2021YFA1200201).

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References

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Cited By

图 1 (a) CVD生长单层MoS₂薄膜实验装置示意图; (b)化学反应区放大图; (c) CVD生长过程温度曲线

Figure 1. (a) CVD experimental equipment for MoS₂ synthesis; (b) enlarged view of the chemical reaction zone; (c) temperature curve of CVD growth process.

DownLoad: Full-Size Img PowerPoint

图 2 (a)—(d)不同MoO₃前驱体量下制备的MoS₂的SEM形貌; (e) MoS₂覆盖率随前驱体量的变化曲线; (f) MoS₂的AFM照片(插图)和图中黑线高度随位置的变化曲线

Figure 2. (a)–(d) SEM morphologies of MoS₂ prepared under different volumes of MoO₃ precursor; (e) curve of MoS₂ coverage with precursor volume; (f) the height of MoS₂ as a function of position marked as black line in the inset, inset is AFM photograph of MoS₂.

DownLoad: Full-Size Img PowerPoint

图 3 (a) MoS₂单晶光学显微镜图像; (b)单晶MoS₂的拉曼成像; (c) Si/SiO₂基底拉曼成像; (d)对应图(a)中各点的拉曼光谱; (e) MoS₂薄膜的光学显微镜图像; (f) MoS₂薄膜的拉曼成像; (g) Si/SiO₂基底拉曼成像; (h)图(e)各点对应的拉曼光谱

Figure 3. (a) Optical microscope image of single crystal MoS₂; (b) Raman mapping of single crystal MoS₂; (c) Raman mapping of Si/SiO₂ substrate; (d) Raman spectra of each point in Fig. (a); (e) optical microscope image of thin film MoS₂; (f) Raman mapping of thin film MoS₂; (g) Raman mapping of Si/SiO₂ substrate; (h) Raman spectra of each point in Fig. (e).

DownLoad: Full-Size Img PowerPoint

图 4 (a)叉指电极装置示意图; (b) Au和Ti/Au电极上的电流和电压曲线, 插图是MoS₂叉指器件实物图

Figure 4. (a) Schematic diagram of interdigital device; (b) the current and voltage curve with Au and Ti/Au electrodes, the inset shows the image of the MoS₂ interdigital device.

DownLoad: Full-Size Img PowerPoint

图 5 不同电压(a)和光功率(b)条件的电流随时间变化关系; 光电探测器件的响应度和探测率随波长(c)和光功率(d)的变化关系; 器件的响应上升时间(e)和下降恢复时间(f)

Figure 5. The relation of current with time under different voltage conditions (a) and different optical power conditions (b); the relationship between the responsivity and the detection rate of the photodetector with wavelength (c) and with optical power (d); the rise time (e) and the recovery time (f) of the photodetector.

DownLoad: Full-Size Img PowerPoint

[1]	Gao G Y, Yu J, Yang X X, Pang Y K, Zhao J, Pan C F, Sun Q J, Wang Z L 2018 Adv. Mater. 31 1806905
[2]	Li X F, Yang L M, Si M W, Li S C, Huang M Q, Ye P D, Wu Y Q 2015 Adv. Mater. 27 1547 Google Scholar
[3]	Radisavljevic B, Radenovic A, Brivio J, Giacometti V, Kis A 2011 Nat. Nanotechnol. 6 147 Google Scholar
[4]	Kaushik V, Ahmad M, Agarwal K, Varandani D, Belle B D, Das P, Mehta B R 2020 J. Phys. Chem. C 124 23368 Google Scholar
[5]	Bagot P A J, Silk O B W, Douglas J O, Pedrazzini S, Crudden D J, Martin T L, Hardy M C, Moody M P, Reed R C 2017 Acta Mater. 125 156 Google Scholar
[6]	Wang X D, Wang P, Wang J L, Hu W D, Zhou X H, Guo N, Huang H, Sun S, Shen H, Lin T, Tang M H, Liao L, Jiang A Q, Sun J L, Meng X J, Chen X S, Lu W, Chu J H 2015 Adv. Mater. 27 6575 Google Scholar
[7]	Huang Z Z, Zhang T F, Liu J K, Zhang L H, Jin Y H, Wang J P, Jiang K, Fan S, Li Q Q 2019 ACS Appl. Electron. Mater. 1 1314 Google Scholar
[8]	Furchi M M, Polyushkin D K, Pospischil A, Mueller T 2014 Nano Lett. 14 6165 Google Scholar
[9]	Lee J, Pak S, Lee Y W, Cho Y, Hong J, Giraud P, Shin H S, Morris S M, Sohn J I, Cha S, Kim J M 2017 Nat. Commun. 8 14734 Google Scholar
[10]	Lee D, Hwang E, Lee Y, Choi Y, Kim J S, Lee S, Cho J H 2016 Adv. Mater. 28 9196 Google Scholar
[11]	Choi M S, Lee G H, Yu Y J, Lee D Y, Lee S H, Kim P, Hone J, Yoo W J 2013 Nat. Commun. 4 1624 Google Scholar
[12]	Chen Y F, Wang Y, Wang Z, Gu Y, Ye Y, Chai X L, Ye J F, Chen Y, Xie R Z, Zhou Y, Hu Z G, Li Q, Zhang L L, Wang F, Wang P, Miao J S, Wang J L, Chen X S, Lu W, Zhou P, Hu W D 2021 Nat. Electron. 4 357 Google Scholar
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[14]	Van Der Zande A M, Huang P Y, Chenet D A, Berkelbach T C, You Y, Lee G H, Heinz T F, Reichman D R, Muller D A, Hone J C 2013 Nat. Mater. 12 554 Google Scholar
[15]	Lee H S, Min S W, Chang Y G, Park M K, Nam T, Kim H, Kim J H, Ryu S, Im S 2012 Nano Lett. 12 3695 Google Scholar
[16]	Mak K F, Lee C, Hone J, Shan J, Heinz T F 2010 Phys. Rev. Lett. 105 136805 Google Scholar
[17]	Li H, Wu J B, Ran F R, Lin M L, Liu X L, Zhao Y Y, Lu X, Xiong Q H, Zhang J, Huang W, Zhang H, Tan P H 2017 ACS Nano 11 11714 Google Scholar
[18]	Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666 Google Scholar
[19]	Wang L, Meric I, Huang P Y, Gao Q, Gao Y, Tran H, Taniguchi T, Watanabe K, Campos L M, Muller D A, Guo J, Kim P, Hone J, Shepard K L, Dean C R 2013 Science 342 614 Google Scholar
[20]	Yi M, Shen Z G 2015 J. Mater. Chem. A 3 11700 Google Scholar
[21]	Ren S, Rong P, Yu Q 2018 Ceramics Int. 44 11940 Google Scholar
[22]	Withers F, Yang H, Britnell L, Rooney A P, Lewis E, Felten A, Woods C R, Sanchez Romaguera V, Georgiou T, Eckmann A, Kim Y J, Yeates S G, Haigh S J, Geim A K, Novoselov K S, Casiraghi C 2014 Nano Lett. 14 3987 Google Scholar
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[24]	Sharma M, Singh A, Aggarwal P, Singh R 2022 ACS Omega 7 11731 Google Scholar
[25]	Fu D, Zhao X, Zhang Y Y, Li L, Xu H, Jang A R, Yoon S I, Song P, Poh S M, Ren T 2017 J. Am. Chem. Soc. 139 9392 Google Scholar
[26]	Lee C H, Zhang Y, Johnson J M, Koltun R, Gambin V, Jamison J S, Myers R C, Hwang J, Rajan S 2020 Appl. Phys. Lett. 117 123102 Google Scholar
[27]	Jie W J, Yang Z B, Zhang F, Bai G X, Leung C W, Hao J H 2017 ACS Nano 11 6950 Google Scholar
[28]	Kodu M, Avarmaa T, Jaaniso R, Leemets K, Mändar H, Nagirnyi V 2016 Superlattices Microstruct. 98 18 Google Scholar
[29]	Wang J, Fan L, Wang X M, Xiao T T, Peng L P, Wang X M, Yu J, Cao L H, Xiong Z W, Fu Y J, Wang C B, Shen Q, Wu W D 2019 Appl. Surf. Sci. 494 651 Google Scholar
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[31]	Hu S, Wang X F, Meng L, Yan X 2017 J. Mater. Sci. 52 7215 Google Scholar
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[33]	Li M G, Yao J D, Wu X X, Zhang S C, Xing B R, Niu X Y, Yan X Y, Yu Y, Liu Y L, Wang Y W 2020 ACS Appl. Mater. Interfaces 12 6276 Google Scholar
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[35]	Zhang Z W, Huang Z W, Li J, Wang D, Lin Y, Yang X D, Liu H, Liu S, Wang Y L, Li B, Duan X F, Duan X D 2022 Nat. Nanotechnol. 17 493 Google Scholar
[36]	Lopez-Sanchez O, Lembke D, Kayci M, Radenovic A, Kis A 2013 Nat. Nanotechnol. 8 497 Google Scholar
[37]	Zhang W, Huang J K, Chen C H, Chang Y H, Cheng Y J, Li L J 2013 Adv. Mater. 25 3456 Google Scholar
[38]	Di Bartolomeo A, Genovese L, Foller T, Giubileo F, Luongo G, Croin L, Liang S J, Ang L K, Schleberger M 2017 Nanotechnology 28 214002 Google Scholar
[39]	Nie C B, Yu L Y, Wei X Z, Shen J, Lu W Q, Chen W M, Feng S L, Shi H F 2017 Nanotechnology 28 275203 Google Scholar
[40]	Han P, St Marie L, Wang Q X, Quirk N, El Fatimy A, Ishigami M, Barbara P 2018 Nanotechnology 29 20LT01 Google Scholar
[41]	Pak Y, Park W, Mitra S, Sasikala Devi A A, Loganathan K, Kumaresan Y, Kim Y, Cho B, Jung G Y, Hussain M M, Roqan I S 2018 Small 14 201703176
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[43]	Wang J, Yao Q, Huang C W, Zou X, Liao L, Chen S, Fan Z, Zhang K, Wu W, Xiao X, Jiang C, Wu W W 2016 Adv. Mater. 28 8302 Google Scholar
[44]	Li Y N, Li L N, Li S S, Sun J Y, Fang Y, Deng T 2022 ACS Omega 7 13615 Google Scholar
[45]	Zhao T G, Guo J X, Li T T, Wang Z, Peng M, Zhong F, Chen Y, Yu Y Y, Xu T F, Xie R Z, Gao P Q, Wang X R, Hu W D 2023 Chem. Soc. Rev. 52 1650 Google Scholar
[46]	Suleman M, Lee S, Kim M, Nguyen V H, Riaz M, Nasir N, Kumar S, Park H M, Jung J, Seo Y 2022 ACS Omega 7 30074 Google Scholar
[47]	Sun P, Liu Y W, Ma J, Li W, Zhang K L, Yuan Y J 2019 CrystEngComm 21 6969 Google Scholar
[48]	Zhao T G, Zhong F, Wang S C, Wang Y K, Xu T F, Chen Y, Yu Y Y, Guo J X, Wang Z, Yu J C, Gao P Q 2022 Adv. Opt. Mater. 11 2202208
[49]	Sinha S, Kumar S, Arora SK, Sharma A, Tomar M, Wu H C, Gupta V 2021 J. Appl. Phys. 129 155304 Google Scholar

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Vol. 72, Issue 11 - 2023-06-05

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Preparation and photoelectric property of large scale monolayer MoS₂

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Preparation and photoelectric property of large scale monolayer MoS2

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Preparation and photoelectric property of large scale monolayer MoS₂