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The active region of GaAs/AlGaAs bound-to-continuum terahertz quantum-cascade laser (THz QCL) is grown by gas-source molecular beam epitaxy. The device fabrication process of semi-insulating surface-plasmon THz QCL is studied in detail. The electrical and optical characteristics of the fabricated THz QCL device are measured using a far-infrared Fourier transform infrared spectrometer with a deuterated triglycerine sulfate far-infrared detector. At 10 K,the measured lasing frequency is 32 THz and the threshold current density is 275 A/cm2.
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Keywords:
- terahertz /
- quantum-cascade laser /
- waveguide /
- device process
[1] [1]Semtsiv M P,Wienold M,Dressler S,Masselink W T 2007 Appl. Phys. Lett. 90 051111
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[4] [4]Faist J,Capasso F,Sivco D L,Sirtori C,Hutchinson A L,Cho A Y 1994 Science 264 553
[5] [5]Iotti R C,Rossi F 2001 Phys. Rev. Lett. 87 146603
[6] [6]Cao J C 2003 Phys. Rev. Lett. 91 237401
[7] [7]Zhang Y H,Wang C 2006 Chin. Phys. 15 649
[8] [8]Wang C,Zhang Y H 2006 Chin. Phys. 15 2120
[9] [9]Ma M R,Chen Y L,Wang L M,Wang C 2008 Chin. Phys. B 17 1854
[10] ]Khler R,Tredicucci A,Beltram F,Beere H E,Linfield E H,Davies A G,Ritchie D A,Iotti R C,Rossi F 2002 Nature 417 156
[11] ]Williams B S,Kumar S,Hu Q,Reno J L 2006 Electron. Lett. 42 89
[12] ]Williams B S,Kumar S,Hu Q,Reno J L 2005 Opt. Express 13 3331
[13] ]Kumar S,Hu Q,Reno J L 2009 Appl. Phys. Lett. 94 131105
[14] ]Li H,Cao J C,Lü J T,Han Y J 2008 Appl. Phys. Lett. 92 221105
[15] ]Li H,Cao J C and Lu J T 2008 J. Appl. Phys. 103 103113
[16] ]Barbieri S,Alton J,Beere H E,Fowler J,Linfield E H,Ritchie D A 2004 Appl. Phys. Lett. 85 1674
[17] ]Li H,Cao J C,Han Y J,Guo X G,Tan Z Y,Lü J T,Luo H,Laframboise S R,Liu H C 2008 J. Appl. Phys. 104 043101
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[1] [1]Semtsiv M P,Wienold M,Dressler S,Masselink W T 2007 Appl. Phys. Lett. 90 051111
[2] [2]Walther C,Fischer M,Scalari G,Terazzi R,Hoyler N,Faist J 2007 Appl. Phys. Lett. 91 131122
[3] [3]Faist J,Scalari G,Walther C,Fischer M 2007 Materials Research Society Spring Meeting,San Fransisco,California,April 2007
[4] [4]Faist J,Capasso F,Sivco D L,Sirtori C,Hutchinson A L,Cho A Y 1994 Science 264 553
[5] [5]Iotti R C,Rossi F 2001 Phys. Rev. Lett. 87 146603
[6] [6]Cao J C 2003 Phys. Rev. Lett. 91 237401
[7] [7]Zhang Y H,Wang C 2006 Chin. Phys. 15 649
[8] [8]Wang C,Zhang Y H 2006 Chin. Phys. 15 2120
[9] [9]Ma M R,Chen Y L,Wang L M,Wang C 2008 Chin. Phys. B 17 1854
[10] ]Khler R,Tredicucci A,Beltram F,Beere H E,Linfield E H,Davies A G,Ritchie D A,Iotti R C,Rossi F 2002 Nature 417 156
[11] ]Williams B S,Kumar S,Hu Q,Reno J L 2006 Electron. Lett. 42 89
[12] ]Williams B S,Kumar S,Hu Q,Reno J L 2005 Opt. Express 13 3331
[13] ]Kumar S,Hu Q,Reno J L 2009 Appl. Phys. Lett. 94 131105
[14] ]Li H,Cao J C,Lü J T,Han Y J 2008 Appl. Phys. Lett. 92 221105
[15] ]Li H,Cao J C and Lu J T 2008 J. Appl. Phys. 103 103113
[16] ]Barbieri S,Alton J,Beere H E,Fowler J,Linfield E H,Ritchie D A 2004 Appl. Phys. Lett. 85 1674
[17] ]Li H,Cao J C,Han Y J,Guo X G,Tan Z Y,Lü J T,Luo H,Laframboise S R,Liu H C 2008 J. Appl. Phys. 104 043101
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