Ge-Sb-Se硫系薄膜制备及光学特性研究

张巍; 陈昱; 付晶; 陈飞飞; 沈祥; 戴世勋; 林常规; 徐铁峰

doi:10.7498/aps.61.056801

摘要

介绍了几种常见的硫系薄膜制备方法, 根据现有实验条件采用热蒸发法和磁控溅射法制备出Ge-Sb-Se三元体系硫系薄膜, 通过台阶仪测试薄膜的厚度和表面粗糙度, 计算出两种制备方法的成膜速率, 并通过X射线光电子能谱测试了两种制备方法所得薄膜与块体靶材组分的差别. 利用Z扫描技术和分光光度计测试了热蒸发法制备所得薄膜的三阶非线性性能和透过光谱, 计算出非线性折射率、非线性吸收系数和薄膜厚度等参数. 结果表明热蒸发法制备Ge-Sb-Se薄膜具有良好的物理结构和光学特性, 在集成光学器件方面很高的应用潜力.

关键词:

Abstract

Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are investigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.

Keywords:

作者及机构信息

1.
宁波大学信息科学与工程学院, 宁波 315211;

2.
中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室, 西安 710119

基金项目: 国家自然科学基金(批准号: 60978058, 61008041, 61107047)、宁波市新型光电功能材料及器件创新团队(批准号: 2009B21007)、浙江省自然科学基金(批准号: Y4110322)、中国科学院西安光机所瞬态光学与光子技术国家重点实验室开放基金 (批准号: SKLST201010)、浙江省教育厅科研计划(批准号: Y201017523, Y200907452)、教育部新世纪优秀人才计划项目(批准号: NCET-10-0976)、宁波市自然科学基金(批准号: 2011A610189)和宁波大学王宽诚幸福基金资助的课题.

Authors and contacts

1.
College of Information Science and Engineering, Ningbo University, Ningbo 315211, China;

2.
State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an 710119, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 60978058, 61008041, 61107047), Ningbo Optoelectronic Materials and Devices Creative Team, China (Grant No. 2009B21007), Natural Science Foundation of Zhejiang Province, China (Grant No. Y4110322), Open Research Fund of State Key Laboratory of Transient Optics and Photonics, Chinese Academy of Sciences (Grant No. SKLST201010), Scientific Research Foundation of Education Bureau of Zhejiang Province, China (Grant Nos. Y201017523, Y200907452), Program for New Century Excellent Talents in University, China (Grant No. NCET-10-0976), the Natural Science Foundation of Ningbo, China (Grant No. 2011A610189) and the Magra Fund Sponsored by K. C. Wong in Ningbo University of China.

参考文献

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[6]	Ta'eed V G, Shokook-Saremi M, Fu L B, Moss D J, Rochette M,Littler I, Eggleton B, Ruan Y L, Luther-Davies B 2005 Opt. Lett.30 2900
[7]	Gai X, Han T, Prasad A, Madden S, Choi D Y,Wang R P, Bulla D,Luther-Davies B 2010 Opt. Express 18 26635
[8]	Hu J, Tarasov V, Agarwal A, Kimerling L 2007 Opt. Express 152307
[9]	Kohoutek T, Wagner T, Orava J, Frumar M, Perina V, Mackova A,Hnatowitz V, Vlcek M, Kasap S 2004 Vacuum 76 191
[10]	Song S, Song Z Liu B, Wu L, Feng S 2010 Mater. Lett. 64 317
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[12]	Atyia H E 2008 Physica B 403 16
[13]	Fick J, Nicolas B, Rivero C, Elshot K, Irwin R, Richardson K A,Fischer M, Vallee R 2002 Thin Solid Films 418 215
[14]	Jarvis R A, Wang R P, Rode A V, Zha C, Luther-Davies B 2007 J.Non-Cryst. Solids 353 947
[15]	Mahmoud S T, Ghamlouche H, Qamhieh N, Al-Shamisi H 2007Appl. Surf. Sci. 253 7242
[16]	Gonzalez-Leal J M, Prieto-Alcon R, Stuchlik M, Vlcek M, ElliottS R, Marquez E 2004 Opt Mater. 27 147
[17]	Zhang H F, Du P Y, Weng W J, Han G R 2005 Acta Phys. Sin. 545329 (in Chinese) [张海芳, 杜丕一, 翁文剑, 韩高荣 2005物理学报 54 5329]
[18]	Nemec P, Zhang S, Nazabal V, Fedus K, Boudebs G, Moreac A,Cathelinaud M, Zhang X H 2010 Opt. Express 18 22944
[19]	Yeno H J, Mohanty B C, Yong S C 2010 Solar Energy 84 2213
[20]	Chen A P, Long H, Wang K, Yang G, Fu M, Li Y H, Lu P X 2009Acta Phys. Sin. 58 607 (in Chinese) [陈爱平,龙华, 王凯, 杨光, 付明, 李玉华, 陆培祥 2009 物理学报 58 607]
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[22]	Tauc J, Manth A 1972 J. Non-Cryst. Solids 8-10 569
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施引文献

[1]	Ganjoo A 2008 J. Non-Cryst. Solids 354 2757
[2]	Anne M L, Keirsse J, Nazabal V 2009 Sensor 9 7389
[3]	Grillet C, Smith C, Freeman D, Madden S, Luther-Davies B, MagiE, Moss D, Eggleton B 2006 Opt. Express 14 1070
[4]	Zakery A, Elliott S R 2003 J. Non-Cryst. Solids 330 1
[5]	Ruan Y, LiW, Jarvis R, Madsen N, Rode A, Luther-Davies B 2004Opt. Express 12 5140
[6]	Ta'eed V G, Shokook-Saremi M, Fu L B, Moss D J, Rochette M,Littler I, Eggleton B, Ruan Y L, Luther-Davies B 2005 Opt. Lett.30 2900
[7]	Gai X, Han T, Prasad A, Madden S, Choi D Y,Wang R P, Bulla D,Luther-Davies B 2010 Opt. Express 18 26635
[8]	Hu J, Tarasov V, Agarwal A, Kimerling L 2007 Opt. Express 152307
[9]	Kohoutek T, Wagner T, Orava J, Frumar M, Perina V, Mackova A,Hnatowitz V, Vlcek M, Kasap S 2004 Vacuum 76 191
[10]	Song S, Song Z Liu B, Wu L, Feng S 2010 Mater. Lett. 64 317
[11]	Castillo-Alvarado F L, Inoue-Chavez J A, Vigil-Galan, Sanchez-Meza E, Lopez-Chavez E, Contreras-Puente G 2010 Thin SolidFilms 518 1796
[12]	Atyia H E 2008 Physica B 403 16
[13]	Fick J, Nicolas B, Rivero C, Elshot K, Irwin R, Richardson K A,Fischer M, Vallee R 2002 Thin Solid Films 418 215
[14]	Jarvis R A, Wang R P, Rode A V, Zha C, Luther-Davies B 2007 J.Non-Cryst. Solids 353 947
[15]	Mahmoud S T, Ghamlouche H, Qamhieh N, Al-Shamisi H 2007Appl. Surf. Sci. 253 7242
[16]	Gonzalez-Leal J M, Prieto-Alcon R, Stuchlik M, Vlcek M, ElliottS R, Marquez E 2004 Opt Mater. 27 147
[17]	Zhang H F, Du P Y, Weng W J, Han G R 2005 Acta Phys. Sin. 545329 (in Chinese) [张海芳, 杜丕一, 翁文剑, 韩高荣 2005物理学报 54 5329]
[18]	Nemec P, Zhang S, Nazabal V, Fedus K, Boudebs G, Moreac A,Cathelinaud M, Zhang X H 2010 Opt. Express 18 22944
[19]	Yeno H J, Mohanty B C, Yong S C 2010 Solar Energy 84 2213
[20]	Chen A P, Long H, Wang K, Yang G, Fu M, Li Y H, Lu P X 2009Acta Phys. Sin. 58 607 (in Chinese) [陈爱平,龙华, 王凯, 杨光, 付明, 李玉华, 陆培祥 2009 物理学报 58 607]
[21]	Yang G, Chen Z H 2007 Acta Phys. Sin. 56 1182 (in Chinese) [杨光, 陈正豪 2007 物理学报 56 1182]
[22]	Tauc J, Manth A 1972 J. Non-Cryst. Solids 8-10 569
[23]	Nazabal V, Nemec P, Jurdyc A M, Zhang S, Charpentier F, LhermiteH, Charrier J, Guin J P, Moreac A, Frumar M, Adam J L 2010Thin Solid Films 518 4941

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