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YBa2Cu3O7–δ薄膜微结构的同步辐射三维倒空间扫描研究

易栖如 熊沛雨 王焕华 李港 王云开 董恩阳 陈雨 沈治邦 吴云 袁洁 金魁 高琛

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YBa2Cu3O7–δ薄膜微结构的同步辐射三维倒空间扫描研究

易栖如, 熊沛雨, 王焕华, 李港, 王云开, 董恩阳, 陈雨, 沈治邦, 吴云, 袁洁, 金魁, 高琛

Microstructure study of YBa2Cu3O7-δ thin film with synchrotron-based three-dimensional reciprocal space mapping

Yi Qi-Ru, Xiong Pei-Yu, Wang Huan-Hua, Li Gang, Wang Yun-Kai, Dong En-Yang, Chen Yu, Shen Zhi-Bang, Wu Yun, Yuan Jie, Jin Kui, Gao Chen
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  • 高温超导薄膜因其微波表面电阻低, 可用于尖端高温超导微波器件的制作. 然而由于高温超导材料特殊的二维超导机制和极短的超导相干长度, 高温超导材料的微波表面电阻对微结构特别敏感. 为了探究高温超导材料微结构和微波电阻的联系, 采用脉冲激光沉积(PLD)技术在(00l)取向的MgO单晶衬底上生长了不同厚度的YBa2Cu3O7 –δ (YBCO)薄膜. 电学测量发现不同厚度的样品超导转变温度、常温电阻差别不大, 但超导态的微波表面电阻差异很大. 同步辐射三维倒空间扫描(3D-RSM)技术对YBCO薄膜微结构的表征表明: CuO2面平行于表面晶粒(c晶)的多寡、晶粒取向的一致性是造成超导态微波表面电阻差异的主要原因.
    High-temperature superconducting films can be used for fabricating the cutting-edge high-temperature superconducting microwave devices because of their low microwave surface resistances. However, the microwave surface resistances of high-temperature superconducting materials are particularly sensitive to microstructure due to their special two-dimensional superconducting mechanisms and extremely short superconducting coherence lengths. To investigate the correlations between microstructure and microwave surface resistance of high-temperature superconducting materials, YBa2Cu3O7-δ (YBCO) films with different thickness are grown on (00l)-oriented MgO single-crystal substrates by using the pulsed laser deposition (PLD) technique. Electrical measurements reveal that their superconducting transition temperatures and room temperature resistances do not show significant difference. However, their microwave surface resistances in superconducting state display a significant difference. The characterizations of the microstructures of YBCO films by synchrotron radiation three-dimensional reciprocal space mapping(3D-RSM) technique show that the number of the grains with CuO2 face parallel to the surface (c crystals), and the consistency of grain orientation are the main causes for the difference in microwave surface resistance.
      通信作者: 高琛, gaochen@ucas.edu.cn
    • 基金项目: 国家重点研发计划(批准号:2022YFA1603900)、中央高校基本科研业务费专项资金(批准号: E1E40207X2)和中国科学院大学高水平人才培育与稳定支持专项(批准号: E1EG0210X2, 118900M018)资助的课题.
      Corresponding author: Gao Chen, gaochen@ucas.edu.cn
    • Funds: Project supported by the National Key Research and Development Program of China(Grant No. 2022YFA1603900), the Fundamental Research Funds for the Central Universities (Grant No. E1E40207X2) and UCAS (Grant Nos. E1EG0210X2, 118900M018)
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  • 图 1  3D-RSM衍射几何的示意图

    Fig. 1.  Schematic diagram of 3D-RSM.

    图 2  1#样品和2#样品 (a)直流电阻R和(b)微波表面电阻Rs对温度的依赖关系

    Fig. 2.  Dependence of (a) DC resistance R and (b) microwave surface resistance Rs on temperature for sample 1# and sample 2#.

    图 3  (a) 1#样品和(b)2#样品(108)衍射峰的3D-RSM; (c) 1#样品和(d)2#样品(108)衍射峰3D-RSM在水平面上的投影

    Fig. 3.  (a) 3D-RSM of (108) diffraction peaks for sample 1#, and (b) sample 2#; (c) projection of (108) 3D-RSM of sample 1#, and (d) sample 2# on the horizontal plane.

    图 4  (a) 1#样品和(b) 2#样品(200)衍射峰的3D-RSM

    Fig. 4.  3D-RSM of (a) sample #1, and (b) sample #2 around the (200) diffraction peak.

    图 5  (a) 1#样品和(b) 2#样品(109)衍射峰的3D-RSM, 图中同时画出了(108)的3D-RSM; (c)和(d)是(a)和(b)在45º方向的垂直截面

    Fig. 5.  (a) 3D-RSM of sample 1#, and (b) sample 2# around the (109) diffraction peak, while 3D-RSM of the diffraction peak of (108) are plotted in the figure; (c) and (d) are vertical cross sections of (a) and (b) in the 45º direction.

    表 1  YBCO(108), (018), (109), (019), (130)衍射峰的相对强度

    Table 1.  Relative intensities of YBCO (108), (018), (109), (019), (130) diffraction peaks.

    衍射峰实测三维积分强度
    (108)(018)(109)(019)(130)
    卡片上的相对强度13 56 4 5
    YBCO 400 nm$ 9.136\times {10}^{6} $$ 5.974\times {10}^{6} $
    YBCO 1000 nm$ 11.503\times {10}^{6} $$ 7.769\times {10}^{6} $
    下载: 导出CSV

    表 2  由(109), (019), (130)衍射峰的强度计算出的c晶/b晶比

    Table 2.  The c-crystal to b-crystal ratio calculated from the intensities of the (109), (019), and (130) diffraction peaks.

    样品厚度衍射峰三维积分强度c晶/b晶比
    (109), (019)(130)
    YBCO 400 nm$ 1.015\times {10}^{6} $$ 0.180\times {10}^{6} $5.639∶1
    YBCO 1000 nm$ 1.278\times {10}^{6} $$ 0.276\times {10}^{6} $4.630∶1
    下载: 导出CSV
  • [1]

    Feng D, Ming N B, Hong J F, Yang Y S, Zhu J S, Yang Z, Wang Y N 1980 Appl. Phys. Lett. 37 607Google Scholar

    [2]

    Zhu S N, Zhu Y Y, Zhang Z Y, Shu H, Wang H F, Hong J F, Ge C Z 1995 J. Appl. Phys. 77 5481Google Scholar

    [3]

    Zhu S N, Zhu Y Y, Ming N B 1997 Science 278 843Google Scholar

    [4]

    Jin H, Liu F M, Xu P, Xia J L, Zhong M L, Yuan Y, Zhou J W, Gong Y X, Wang W, Zhu S N 2014 Phys. Rev. Lett. 113 103601Google Scholar

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    Xu T X, Switkowski K, Chen X, Liu S, Koynov K, Yu H H, Zhang H J, Wang J Y, Sheng Y, Krolikowski W 2018 Nat. Photonics 12 591Google Scholar

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    Zhao Z X, Chen L Q, Yang Q S, Huang Y Z, Chen G H, Tang R M, Liu G R, Cui C G, Chen L, Wang L Z, Guo S Q, Li S L, Bi J Q 1987 Chin. Sci. Bull. 6 412

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    [30]

    Mastuda J S, Oba F, Murata T, Yamamoto T, Ikuhara Y 2004 J. Mater. Res. 19 2674Google Scholar

    [31]

    Tang C Y, Cai Y Q, Yao X, Rao Q L, Tao B W, Li Y R 2007 J. Phys. :Condens. Matter 19 076203Google Scholar

    [32]

    Wang X, Cai Y Q, Yao X, Wan W, Li F H, Xiong J, Tao B W 2008 J. Phys. D: Appl. Phys. 41 165405Google Scholar

    [33]

    Krivanek O L, Dellby N, Hachtel J A, Idrobo J C, Hotz M T, Plotkin-Swing B, Bacon N J, Bleloch A L, Corbin G J, Hoffman M V, Meyer C E, Lovejoy T C 2019 Ultramicroscopy 203 60Google Scholar

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    Zheng H, Cao F, Zhao L G, Jiang R H, Zhao P L, Zhang Y, Wei Y J, Meng S, Li K X, Jia S F, Li L Y, Wang J B 2019 Microscopy 68 423

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    Song B, Zhao S, Shen W, Collings C, Ding S Y 2020 Front. Plant Sci. 11 479Google Scholar

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出版历程
  • 收稿日期:  2022-09-12
  • 修回日期:  2022-11-09
  • 上网日期:  2022-12-02
  • 刊出日期:  2023-02-20

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